SMC Corporation of America
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1 Output RoHS 3-Screen Display High-Precision Digital Pressure Switch IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

The required lifting force can then be determined by dividing the theoretical lifting force by the safety factor t.

The required lifting force can then be determined by dividing the theoretical lifting force by the safety factor t.

The required lifting force can then be determined by dividing the theoretical lifting force by the safety factor t.

M5 M5 M5 1/61/4 11.5Nm ) Rc Rc Rc Rc Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 6 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 7 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (E) (T) DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN

Ports 2, 4 size (metric) Ports 2, 4 Symbol C3 C4 C6 M5 CM Ports 1, 3, 5 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting M5 threads Mixed size/with port plug Top ported elbow 3.2 One-touch fitting Top ported elbow 4 One-touch fitting Top ported elbow 6 One-touch fitting M5 threads Bottom ported elbow 3.2 One-touch fitting Bottom ported elbow 4 One-touch fitting Bottom ported

To operate the cylinder at these values, prevent dust from entering by installing an AN120-M5 silencer on the EXH port.

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Y30 Y40 Spacer 234 Y30L Y40L Spacer with L-bracket Y30T Y40T Spacer with T-bracket qAF4000 wAFM4000 eITV3000 Modular Products and Accessory Combinations Applicable products and accessories Applicable model ITV20ll ITV30ll AF3000 AF4000 q Air filter w Mist separator e L-bracket r T-bracket t Spacer y Spacer with L-bracket u Spacer with T-bracket AFM3000 AFM4000 B310L B410L B310T B410T Y30

Cycle time: T can be found from the following equation. Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

E 41 SN LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tubing size Metric size Inch size Applicable process pump Applicable process pump Applicable Applicable Reducing Reducing Class No.

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)