Electric Rotary Table

22 13.5 4H8 ( ) depth 5 +0.018 0 2 x M8 x 1.25 x 16 25 2 +0.018 0 4H8 ( ) depth 5 127 LER30-2 (Rotation angle: 180) LER30-3 (Rotation angle: 90) 5.5 2 x M6 x 1.0 (Adjuster bolt) 14.5 6 x M5 x 0.8 x 8 5.2 23 2 49 126 (at max. adjuster bolt length) 30 19.5 66 46 123.2 (Arm operating range) 48 Note) Not applicable to 180 specification (LER30-2) 75 2 x 11 depth of counterbore 6.5 depth 0 0.046

Shock Absorbers and Rate Controls

56 128 58 7l 0[Xl4.0f{xZ 3r3 1 1 ( 127 lilll5 x 2 35 88 95 203 102 74 80 0Illl4.0l{lx4 414 436 t2l l5 x 2 35 88 95 254 t27 74 r05 0I[4.0[x6 516 538 t2l i l l l 5 x 2 35 88 95 305 153 74 108 0tlll4.0lllx8 643 665 127 Ml l5 x ? 35 88 0{ 356 t7B 74 r08 0Etll4.0llx I 0 745 761 127 Ml15 x ?

Round Type Hydraulic Cylinder

M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ

2-Color Display

Piping Specifications Model 01 N01 C4H C6H N7H C4L C6L N7L R1/8 M5 x 0.8 NPT1/8 M5 x 0.8 Port size 4 mm 5/32 inch One-touch fitting, Straight type 6 mm 1/4 inch 4 mm 5/32 inch One-touch fitting, Elbow type 6 mm 1/4 inch Sensor pressure receiving area: Silicon Sensor pressure receiving area Wetted parts material PBT, POM, Stainless steel 304, C3604 (electroless nickel plated) O-ring: NBR

3 Port Solenoid Valve Series VQ100 1

x 0.8 (E port) VZ 2-M5 x 0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum 18 stations) Formula: L1 = 10n + 32 L2 = 10n + 43 Dimensions n L 2 3 4 5 6 7 8 9 10 L1 L2 (L3) (L4) (L5) 11 12 13 14 15 16 17 18 52 63 83 112.5 123 62 73 93 112.5 123 72 83 103 125 135.5 82 93 113 137.5 148 92 103 123 150 160.5 102 113 133 162.5 173 112 123 143

3 Port Solenoid Valve Series VQ100

V100 SY (L5) Plug assembly 1 2 3 2-4.5 mounting hole (L4) SYJ VVQ100-12A(L3) 88 (8.5) L2 VK 48.7 L1 VZ VT (45) (35) 33 25 (5.5) 23.5 VP 12.3 VG R11 (Min. bending inner radius) Manual override 21.5 (29.3) VP 104 S070 VQ VKF Stations12345n D side U side VQZ 2-M5 x 0.8 (E port) VZ 2-M5 x 0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum

3 Port Solenoid Valve Series VQ100 1

V100 SY (L5) Plug assembly 1 2 3 2-4.5 mounting hole (L4) SYJ VVQ100-12A(L3) 88 (8.5) L2 VK 48.7 L1 VZ VT (45) (35) 33 25 (5.5) 23.5 VP 12.3 VG R11 (Min. bending inner radius) Manual override 21.5 (29.3) VP 104 S070 VQ VKF Stations12345n D side U side VQZ 2-M5 x 0.8 (E port) VZ 2-M5 x 0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum

1

How to Order Air Output Port: KBV, KBZ (P. 15-2-113) 1 04 KB 1 V Elbow Module: KBV Elbow Socket Module: KBV T Connection thread Applicable tubing O.D. 4 Model Model Model Tube size/ Connecting female thread size Body size KBV1-04 KBV1-06 KBV2-06 KBV1-M5 KBV1-M6 KBV2-M5 M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 6 KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Rc Branch Elbow Module

AR Series Modular Type Regulator

Note 7) v: For pipe thread type: M5, NPT only 450 Regulator AR10-A to AR40-A Series Standard Specifications Model AR10-A AR20-A AR25-A AR30-A AR40-A AR40-06-A Port size M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 Pressure gauge port size 1/16 Note) 1/8 Fluid Air Ambient and fluid temperature 5 to 60C (with no freezing) Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Set

ZSE F/ISE

Y, Z directions 3 times each (Not energized) 3% F .S. or less of measured pressure at 25C in temperature range of 0 to 50C Pressure receiving area: Stainless steel 630, Fittings: Stainless steel 304 02: R 1/4, M5 x 0.8 T2: NPT 1/4, M5 x 0.8 5-wire oil proof heavy-duty cable (0.15 mm2) Approx. 120 g (Each including 3 m lead wire) PF2 Enclosure Ambient temperature range Ambient humidity range

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

IDG

IN OUT 9 24 140 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 97 8.5 115 118 Purge air for dehumidification 5 M5 x 0.8 Drain Drain (Maintenance space 100 mm or more) 5.5 M5 x 0.8 With fittings for purge air discharge (Option: P) Purge air discharge tubing port for

VFA3000

3 x 4.3 (Pilot port) (Mounting hole) 2 x 18 2 x M5 x 0.8 (Breathing port) 5 x , 14 38 (Piping port) 1769 Series VFA5000 Dimensions: Base Mounted 2 position single: VFA514402 03 04 2 x 5.3 (6.5) M5 x 0.8 (Pilot port) (Mounting hole) (Breathing port) Max. 2 5 x , , 38 14 12 (Piping port) ( ): Value for Rc 1/2 2 position double: VFA524402 03 04 2 x 5.3 (6.5) 2 x M5 x 0.8 (Mounting hole) (Breathing

/

385.5 397.5 9 345 357 369 385 397 409 415 427 439 10 69 81 93 77 89 101 83 95 107 276 288 300 308 320 332 332 344 356 L1 L2 L3 L1 L2 L3 L1 L2 L3 VXE21 VXE22 VXE23 Manifold construction 2 stations x 1 3 stations x 1 2 stations x 2 2 stations + 3 stations 3 stations x 2 2 stations x 2 + 3 stations 2 stations + 3 stations x 2 3 stations x 3 2 stations x 2 + 3 stations x 2 (mm) Electrical entry

Title not found

-diameier r-t, L, | , u, E 3/16" 1t4" 07 09 1 1 3/8" 1/2" 6mm 8mm 10mm 12mm 06 08 1 0 H , T , U , X , N '10-32 UNF Thread 1/16" NPT 1/8" NPT 1/; NPT H, L, W, T, Y, U, E Double branch \" Male run tee Double branch universal elbow Branch unNersal elbow Branch universal female elbow Triple branch universal elbow M5 x 0.8 M6 x 1.0 PT1/8 PT1/4 PT3/8 Pr1/2 M6 0 t 02 03 o4 a a a a a a a a a a a

EXxx-OMY0004

Required screws are as follows: 2 x M5 (End plate: torque = 1.5 Nm) 2 x M5 (SI Unit : torque = 1.5 Nm) 4 x M (Valve manifold: refer to valve manifold catalogue) Fig. 7-1 Required screws All manifolds are mounted using 8 screws (except VQC4000 which uses 7 screws). 25 No.EX##-OMY0004 7.1.1. Valve manifold connection Connect the valve manifold with the 2 screws on the SI Unit.

ITV

12.5 (11) SMC REGULATOR ITV2000 M5 x 0.8 Solenoid valve EXH 93 Rc1/4 Exhaust port Solenoid valve EXH OUT 19 13.5 EXH (3) SUP (1) OUT (2) 12 Flat bracket P3020114 (Optional) 36 2 x Rc1/4, 3/8 Port size 4 x M5 x 0.8 thread depth 6 mm through Mounting hole L-bracket G OUT 2 19 R3.5 15 25 36 7 45 2.3 (10) 30 L-bracket INI-398-0-6 (Optional) 2 x Rc1/4, 3/8 SUP port, OUT port (7) 36 14-8-24 25

Pneumatic Transfer System Series MF

plug) Air supply unit circuit diagram M5 x 0.8 Stroke end air supply port 2-M5 x 0.8 air supply port C 82 (air supply port D on reverse side, hexagon socket head plug) 52 36 8 44 SMC When equipped with air supply unit system 1, there are two supply ports, A and C.

Parallel Type Air Gripper

-40 M8 x 1.25 17.7 16 Max. tightening torque (Nm) Model Screw MHZ2-10 M2.5x0.45 0.49 MHZ2-16 M3 x 0.5 0.88 MHZ2-20 M4x0.7 2.1 MHZ2-25 M5 x 0.8 4.3 MHZ2-32 M5 x 0.8 4.3 MHZ2-40 M6x1 7.3 Note) If auto switches D-Y59, D-Y69, or D-Y7P are used, or the auto switch is mounted to the corner of the body, only a tapped body can be used.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Y, Z directions 3 times each (Not energized) 3%F.S. or less of measured pressure at 25C in temperature range of 0 to 50C Pressure receiving area: Stainless steel SUS 630, Fittings: Stainless steel SUS 304 02: R 1/4, M5 x 0.8 T2: NPT 1/4, M5 x 0.8 5 wire oil proof heavy duty cable (0.15mm2) Approx. 120g (Each including 3m lead wire) Enclosure Ambient temperature range Ambient humidity range