ZP3

u i y t Component Parts u No.

VFS

U side mounting D U Symbol Plug assembly (Option) Refer to page 3-8-8.

CQ2

U U U U U U U U CQS 12 19.5 20.5 26.5 23 26 22 16 22.5 23.5 29.5 26 29 25 CQ2 20 24.5 25.5 31.5 28 31 27 25 27.5 28.5 34.5 31 34 30 MU 32 31.5 32.5 38.5 35 38 34 27 29 26.5 40 35 36 42 38.5 41.5 37.5 30.5 32.5 30 50 41 42 48 44.5 47.5 43.5 36.5 38.5 36 63 47.5 48.5 54.5 51 54 50 40 42 39.5 80 57.5 58.5 64.5 61 64 60 50 52 49.5 100 67.5 68.5 74.5 71 74 70 60 62 59.5 Auto Switch Mounting Mount

SX

. (20 stations maximum) When a longer DIN rail is desired than the specified stations, specify the station number to be required. (20 stations maximum) Terminal block mounting position Symbol Mounting position Symbol Mounting position U U side U U side A, B port size (Metric size) A, B port size (Metric size) D D side D D side Valve stations Valve stations Symbol Port size Applicable series

Modular Design with Uniform Body Style

Rubber accelerator u u Others Thread-lock fluid Seawater Leak tester u : Essentially safe : Some effects may occur. u: Effects will occur.

Table of Contents

w u w t e r !

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

SV

U side D side POWERRUNSD RD ERR Name of terminal block, LED Note Cable wiring ADDRESS NO.

VQ5000

side U side U side D side U side D side 107.8 106 Station Nos.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

For R and U, only DC voltage is available.

Table of Contents

side, side port) End plate assembly (U side, side port) Aluminum Aluminum y y End plate assembly (U side, front port) End plate assembly (U side, front port) Note 2) O-ring e is included with manifold valve r.

Table of Contents

7 u !6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

side U side U side D side U side D side 107.8 106 Station Nos.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

U U U U U U U U U 12 19.5 20.5 26.5 23 26 22 16 22.5 23.5 29.5 26 29 25 20 24.5 25.5 31.5 28 31 27 25 27.5 28.5 34.5 31 34 30 32 26.5 31.5 32.5 38.5 35 38 34 27 29 40 30 44 35 36 42 38.5 41.5 37.5 30.5 32.5 50 36 50 41 42 48 44.5 47.5 43.5 36.5 38.5 63 39.5 56.5 47.5 48.5 54.5 51 54 50 40 42 80 49.5 66.5 57.5 58.5 64.5 61 64 60 50 52 100 59.5 76.5 67.5 68.5 74.5 71 74 70

Vacuum Pad

-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Electric Actuator/Slider Type

0 B A u !7 !6 y q w t !5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

V100

For R and U, DC voltage is only available.

High Vacuum Angle Valve

U type: DC only.

7

C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (200.5) 96 (104) 104 (112) 90.5 (98.5) U 168 (176

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on