Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3 11.4 12 8.4 9.3 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 7 28.7 17.5 9.6 12.7 33.8 28.8 8 9.3 10-32 UNF 30.1 25.1 10.8 34.5 31.9 23.3 20.7 16.5 13.7 8 17 17.5 9.3 13.1 12.7 31.8 18 36.1 31.1 12.7 NPT 1/8 14.2 32.1 27.1 23.9 25.6 28.2 21.9 23.9 25.6 28.2 31 10.9 16.5 18.5 21 16 17 18.5 14 19 21 32 33 36 39

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Applicable model D5 L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS-10L AS1002FS3.4 14.8 18.3 11 27.5 19.5 3.4 4.9 7.3 12 1 AS-20L AS2002FS 15.6 19.6 12.6 29 21 1.2 AS-25L AS2052FS 19.6 24.6 17 38 28 AS-30L AS3002FS4.5 24.8 29.8 22 43 33 4.5 6.5 9.5 15.5 1.4 AS-40L AS4002FS 25.7 30.7 28 49 39 Part no.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

(17.5) 13 AQ 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 ASV 24.5 28.5 9.3 19.2 47 (48) AS32l1FSl-U02-08 8 13.2 22.7 33 14.2 AS32l1FSl-U02-10 10 15.9 26.7 37 35.7 15.6 48 (49) AS32l1FSl-U02-12 12 18.5 29.7 40 34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

39.6 18.5 18.3 21.9 35.2 30.6 8 15.2 5/32" 10.4 12.9 36 16 32 16.2 10.9 AS231FG-02-10 AS231FG-N02-05 31 47.9 42.1 21 20.2 23.9 38.7 31.1 10 18.5 3/16" 11.4 40 17 33 NPT 1/4 AS331FG-02-06 AS231FG-N02-07 39.9 34.9 34.4 29.4 25.2 46.5 45.1 17 25.6 38.5 34.2 6 12.8 1/4" 13.2 60 18.5 19 36 17.5 20.6 18.3 12.9 AS331FG-02-08 AS231FG-N02-09 28.2 49.5 47.9 18.5 28.2 39.7 35.2 8 15.2 5/16" 15.2 63 39

AZ1000

0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100 200 300 400 500 600 700 Flow rate (slpm, N2) 0 200 400 600 800 1000 1200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International. 39

COQ2BP

6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread [I (mm) c l BonI.1iIi (mm) A L[) R N X Y LG L 0 ~ t::;r H LH L1 . 50s 107 .2 15 39

CG5-S

0.050 0.093 0.065 0.117 CD-E03SUS 32, 40 NT-03SUS 25, 32 10 C type 10 for shaft 16.5 9.6 38.4 33 1.55 1.15 17 (19.6) M10 x 1.25 6 CD-E05SUS 50, 63 NT-G04SUS 40 14 C type 14 for shaft 18 13.4 59.6 53.2 2.05 1.15 19 (21.9) M14 x 1.5 8 CD-E08SUS 80, 100 NT-05SUS 50, 63 22 C type 22 for shaft 26 21 87.2 79.4 2.55 1.35 27 (31.2) M18 x 1.5 11 NT-08SUS 80 31 32 (37.0) M22 x 1.5 13 NT-10SUS 100 39

Round Type Hydraulic Cylinder

Do not indicate lead wire length symbol N (none) for types D-A3, D-A44, D-G-39 or D-K39. Since there are applicable auto switches other than listed, refer to page 326 for details. For details about auto switches with pre-wired connector, refer to pages 474 and 475. D-A9, M9, M9W, M9A are shipped together (but not assembled).

CJ5-S

Type C 8 for axis 7.6 27.6 22.8 1.5 0.9 19 (21.9) 18 M14 x 1.5 8 0.040 0.076 0.050 0.093 0.065 0.117 CD-E03SUS 32, 40 NT-05SUS 50, 63 10 Type C 10 for axis 9.6 38.4 33 1.55 1.15 27 (31.2) 26 M18 x 1.5 11 CD-E05SUS 50, 63 NT-08SUS 80 14 Type C 14 for axis 13.4 59.6 53.2 2.05 1.15 32 (37.0) 31 M22 x 1.5 13 CD-E08SUS 80, 100 NT-10SUS 100 22 Type C 22 for axis 21 87.2 79.4 2.55 1.35 41 (47.3) 39

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Rotating angle Size Operating range ( ) Operating range ( ) Proper mounting position A (mm) Proper mounting position A (mm) 90 13 9 30 42 81 180 22 18 Operating range at proper mounting position /2 90 22.5 18.5 50 30 44 180 39 35 Most sensitive position Operating range of single auto switch Values which include hysteresis are for guideline purposes

CNA

Part no. 0.1 0.3 +0.070 0 12 I-04 I-05 I-08 I-10 40 50, 63 80 100 NT-04 NT-05 NT-08 NT-10 40 50, 63 80 100 16 15.5 20 69 22 24 55 M14 x 1.5 M14 x 1.5 8 22 25.4 21 0.1 0.3 +0.070 0 12 74 27 28 15.5 20 11 60 M18 x 1.5 M18 x 1.5 27 31.2 26 16 0.1 0.3 +0.070 0 18 36 22.5 26 91 37 71 M22 x 1.5 M22 x 1.5 13 32 37.0 31 28 0.1 0.3 +0.084 0 20 28 37 40 24.5 105 83 M26 x 1.5 M26 x 1.5 16 41 47.3 39

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

+ Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

ST 10 20 30 40 50 9+ST 19 29 39 49 59 10+ST 20 30 40 50 60 37+ST 47 57 67 77 87 47+ST 57 67 77 87 97 CXSJ6-10 21-/2211-/12CXSJ6-20 CXSJ6-30 CXSJ6-40 CXSJ6-50 21-/2211-/1221-/2211-/1221-/2211-/1221-/2211-/1278 Dual rod cylinder/Compact type CXSJ 2122CXSJ/ 1112Dimensions / 10 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for Vacuum Equipment Precautions. Selection Handling of One-touch Fittings 1. Do not use in a line where a pressurized condition is maintained since the body may be damaged. Warning Caution 1.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet 2 2 C B 3 32.5 13 11 6 39 16 14.5 10 49 20 20.5 N S U F GN GS A J K ZP3 T 04 06 08 B B5 15 57 38.5 10 20 64.5 46 JB K Width across flats 7 Dimensions Per Vacuum Inlet: One-touch Fitting Model D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber 40 161 EPR 39 160 40 50 63 80 100 125 1 0 89 158 2 0 56 156 3 0 55 396 6 0 155 347 12 1 121 345 22 3 120 580 118 531 116 529 How to Order ZPT 40 HB N A14 Mounting thread diameter (Vacuum entry) Pad diameter (mm) Pad diameter Thread dia.

ZSE30A(F)/ISE30A

.: ZS-38-4L) Brown DC (+) Black OUT (1) White OUT (2) Blue DC () 2000 39 ZSE30A(F)/ISE30A Series Dimensions Panel fitting dimensions 1 pc. mounting Multiple (2 pcs. or more) horizontal mounting 31 0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less 24 or more Multiple (2 pcs. or more) vertical mounting 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4

NCQ8

K Auto switch 2 sides x 4 places 0.25-counter bore 0.15 depth M1 A + Stroke 0.13 + Stroke E (Inch) A Symbol C M2 H E D Z Q P M1 K J I W Bore 1/4" to 1"st 1-1/4" to 2"st 075 (3/4") 106 (1-1/16") 1.94 2.50 0.46 0.31 1.25 #10-32UNF 1.56 0.06 0.25 0.86 1.22 #10-32UNF 0.19 1.31 0.38 5/16-24UNF NPT1/8 2.25 2.88 0.70 0.50 1.56 2.03 0.16 0.44 1.19 1.69 0.25 1.72 0.56 39 Series NCQ8 Dimensions/NCDQ8B150

AFF

90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AM AFF2B 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39

AMD

180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39