Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

CQS

5 5 1 Made to Order Note 1) Consult SMC for shorter stroke length than indicated in the table.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Contents CE1 Operating pressure (MPa) Bore size (mm) Piston area (mm2) Rod size (mm) Operating direction 0.7 0.5 0.3 12 16 20 25 CQSY12-PS Piston seal 1 pc. Rod seal 1 pc. Tube gasket 1 pc. Grease pack (10 g) 1 pc.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE1 Operating pressure (MPa) Bore size (mm) Piston area (mm2) Rod size (mm) Operating direction 0.7 0.5 0.3 12 16 20 25 CQSY12-PS Piston seal 1 pc. Rod seal 1 pc. Tube gasket 1 pc. Grease pack (10 g) 1 pc.

CJ5-S

1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No. CG5SR CG5SV Rod cover Stainless steel 304 Water resistant scraper Head cover Stainless steel 304 i Rod seal Cylinder tube Stainless steel 304 o NBR FKM Piston seal Piston rod Stainless steel 304 !0 Valve seal Bumper Urethane !1 Valve retainer gasket Rod end nut Stainless steel 304 !

CJ5-S

1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No. CG5SR CG5SV Rod cover Stainless steel 304 Water resistant scraper Head cover Stainless steel 304 i Rod seal Cylinder tube Stainless steel 304 o NBR FKM Piston seal Piston rod Stainless steel 304 !0 Valve seal Bumper Urethane !1 Valve retainer gasket Rod end nut Stainless steel 304 !

MVGQ

8 R port (with plug) 4-MM depth ML Solenoid valve: Series VZ5000 4-NN through Speed controller RS Q G RS H A RZQ Rc 1/8 P port MI W S CEP1 CE1 CE2 Rc 1/8 R port C + Stroke B + Stroke A + Stroke ML2B C J G5-S MVGQM, MVGQL Common Dimensions CV Applicable solenoid valve B C DA F G H J K L MM ML NN PW Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) MVGQ 40 124 38 M8 x 1.25 20 M8 x 1.25

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

Compact Manifold Regulator

A R 04 Z A q w e r u t y N Common Supply Type 1.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 and 2 L ranges.

KP/KPQ/KPG

-00 KPGU12-00 20.9 20.9 18.1 58 46 32 57.2 32.9 25 Q Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

25 32 46 58 18.1 20.9 57.2 32.9 KPGU12-00 KPQU12-00 Q Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

25 32 46 58 18.1 20.9 57.2 32.9 KPGU12-00 KPQU12-00 Q Note 1) D indicates the maximum diameter.

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

20.9 18.1 58 46 32 57.2 32.9 25 KPQU12-00 KPGU12-00 Q Note 1) D indicates the maximum diameter.

VCA

36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 S 51 54 57 57 Q 27 30 32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted

Environment

0 i o e r t q u !1 !2 !3 !