99

340 369 3/4, 1 615 3/8, 1/2 FGH300 70 x L496 591 620 3/4, 1 69 HEPO2Element for FGH Series EJ Series RoHS Specifications Model EJS-002 EJS-004 EJS-006 EJS-013 Filtration accuracy (Filtration efficiency 99%) 2 4 6 13 1890 2310 2090 2490 117 mm Length Filtration area (cm2) 4250 5200 4700 5600 246 mm 8500 10400 9400 11200 496 mm Heat resistant temperature (C) 80 Filter media Polyester Material

RSH

Option (1) D C S Without option With locking mechanism With cancel cap With lever detection switch Action (2) D B T Double acting (1) The options can be combined, provided that the priority order is indicated as D, C, S.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

Heavy Duty Stopper Cylinder

4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !

CY1F

When screwing in the plug for the second time, wrap a sealant tape around the plug to prevent leakage. (1) M5 First tighten lightly until the rotation stops. Then tighten an additional 1/6 to 1/4 turn. (2) Rc1/8 Tighten with a 7 to 9Nm torque using tightening tools. 30 Series CY1F Specific Product Precautions 3 Be sure to read before handling. Adjustment Caution Caution 1.

Digital Flow Switch (Remote type monitor unit)

CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard

IDX-OM-W038

C( E) ( ) 1-1 3-2 ( ) 1-1 P. I. D3-3 5 P. I.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

4" 5/16" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7 NPT 1/8 26.7 30.7 45.3 52.8 24.4 14.3 NPT 1/4 28.7 34.7 45.3 52.8 24.4 17.5 NPT 3/8 30.4 36.7 45.3 52.8 24.4 17.5 NPT 1/4 33.8 39.8 49.6 55.6 30 17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

High Vacuum L Type Valve

Not adhering to these specifications, can result in damage to the product. 13 XL*-OMI0011-E 8-2. Disassembly procedure Step 1 Step 2 Bolt c 3 Bolt b S valve seal assembly 1 2 O-ring 4 Bonnet assembly Heater Pilot port M Bolt a Cover Pilot port S Body The heater is removed by loosening bolt a. Bolt a is behind the cover. Remove the cover using a watchmaker's screwdriver.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

1/8 54 8 75 44 55.5 93.2 8.5 35.8 10.5 33.8 70 M42 x 1.5 2.3 33.8 37 42.5 21 7 10-/21-AR50K-B 3.2 80.3 3/4, 1 40 70 1/8 66 7 90 65.8 44 125.2 11 43 13 43.3 90 3.2 43.3 10-/21-AR60K-B 3.2 80.3 1 44.5 70 1/8 4.5 66 95 65.8 44 129.6 11 46 13 43.3 90 3.2 43.3 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

1 Direct Operated Solenoid Valve Metal Seal Series VS4 10 Model Flow characteristics Max. (1) operating cycle (cpm) (3) VK Response (2) time (ms) Weight (kg) Model Port size Rc (Nominal size) Number of positions JIS Symbol P A/B A/B EA/EB VZ C [dm 3/(sbar)] C [dm 3/(sbar)] b b Cv Cv AC DC AC DC AC DC VS4110-01 (6A) 3.2 3.2 0.42 0.37 0.86 0.80 1 8 2 (Single) 1,200 180 13 or less 45 or less

Series 11-MXJ Air Slide Table

Refer to the Specific Product Precautions. 19 26 19 (Through) Note 1) 3 +0.05 0 depth 2 7 3.5 3 +0.03 0 depth 2 13 (Through) Note 1) M 2 x M1.7 x 0.35 thread depth 3.5 8 K 12.5 3.5 Vacuum port M3 x 0.5 Operating port 2 x M3 x 0.5 (Plugged when the product is not a symmetric type.) (Plugged when the product is not a symmetric type.)

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

effective thread depth 8 10 (11) Rod end male threads M M 48 24.5 D D 10 10 2-5.5 through 4-9 counter bore depth 7 36 36 8 20 2-Rc 1/8 (port size) 20 57 + Stroke 5 5 + Stroke 67 + 2 strokes C X L C X L + Stroke 47 32 to 100 2-P (port size) Approx.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

The stroke can be set in 1 mm increments.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 #1 !6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5