10

x 2 28.5 34 25 +0.084 0 32 0.10 0.30 Y-03MNote 1) 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-04MNote 1) 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-05MNote 1) 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 +0.10 40 0.10 0.30 Y-08MNote 1) 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30 Y-10MNote 1) 100 40 65 M26 x 1.5 20

Vacuum Module Series ZX

(For replacement) ZH Philips screw (M2.5 x 28) How to order (1) Valve unit (Supply valve: N.C.)

24

52 128 200 300 42 54 92 128 178 100 M12 x 1.75 24 28 100 17.5 32.5 89 64 210 90 236 188 210 166 48 72 148 220 320 35 47 85 121 171 124 M14 x 2.0 28 11 MGPL (Ball bushing) MGPA (High precision ball bushing) A, DB, E Dimensions MGPM (Slide bearing) A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E 50 st or less Over 50 st 200 st or less Over 200 st 50 st or less Over 50 st 200 st or less

Hydraulic Filters

28 28 28 28 G 9 9 9 9 9 9 9 9 Weight (kg)* E 47 47 52 58 58 63 Z 2.8 2.8 2.8 5.3 5.3 5.4 Port size Port size Port size 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 2.7 2.7 2.7

CL

CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 CG-020-24A CG-025-24A CG-032-24A CG-040-24A 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 18.1 20.7 23.6 27.3 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 38.3 42.1 53.8 64.6 Rod End Nut Clevis Pin Knuckle Pin

Series PSE digital pressure switches allow pressure to be controlled from a remote location. Series PSE510 is compact and lightweight, allowing the sensor to be mounted where needed. The use of stainless steel for all wetted parts (SUS630 for diaphragm, SUS304 for fitting) allows the PSE520 pressure sensor to be used in a wide variety of gas and fluid applications. Pressure sensor for general

ZP

43 65 105 156 4.5 50 ZPX50HJ50-B01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-B01-A18 52 171 222 80 82 16.5 28 43 65 174 227 4.5 ZPX HJ-B01-A22 (With buffer) 100 125 Hexagon width across flats 30 Hexagon width across flats 17 Width across flats 19 Hexagon width across flats 21 (mm) Model A 100 ZPX100HJ25-B01-A22 D 186 ZPX100HJ50-B01-A22 ZPX100HJ75-B01-A22 ZPX100HJ100-B01

Metal Seal/Rubber Seal Series VQ Body Ported

For details, refer to page 2-4-28. Note 2) For details, refer to page 2-4-29.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

holes for manifold) 7 21.8 (Mounting holes for manifold) (Lead wire length) 39.1 [45.6] About 300 Bracket 23.2 equivalent (Mounting holes) 23.2 equivalent (Mounting holes) 18.5 18.5 28 [34.5] 28 [34.5] 20 20 15.6 18.5 18.5 13.5 13.5 9 9 69 69 98.6 79.4 [82] [ ]for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 24 Valve

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

H W2 W1 K E E H J K L1 L1 L2 L2 M W2 Model t W1 M 4 3 6 10 8 12 19 25 LQ3P11 LQ3P12 LQ3P21 LQ3P31 LQ3P32 LQ3P41 LQ3P51 LQ3P61 M 11 6 14 10 9 14.5 23.5 22.5 56 58 8 16 17 16 7 20 17 16 20.5 28 27 67 69 8 21 24 H (E,E) (E,E) 21 7 25 22.5 19.5 24.5 39 36 83 89 8 26 28 L1,L1 KK L2,L2 24 32 41 9 9 10 29 37 49 24 22 30.5 44.5 42.5 96 100 117 136 8 13 13 32 41 50 36 43 55 Panel hole diameter K 26.5

CG5-S

GA GB 2-P Bore size A AL B1 H H1 MM ZZ W 10 M BM H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 Max.

CG1

TU TV TW TX TY TZ 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 18.1 20.7 23.6 27.3 29.7 34.3 35.8 39.8 49.4 58.4 72.4 90.4 42 42 48 56 64 74 72 93 16 20 22 30 36 46 85 100 28 28 28 30 36 46 45 60 38.3 42.1 53.8 64.6 79.2 97.2 110 130 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 (mm) Part No.

MGG

depth 14.5 M16 x 2 depth 28 27 30 55 200 13.5 115 76 170 214 30 160 M12 x 1.75 depth 24 262 138 70 75 230 234 17.5 23 depth 17 M18 x 2.5 depth 32 30 32 70 245 15 125 80 210 245 35 190 304 153 M14 x 2 depth 28 80 85 280 274 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V U T S R Q P Y R O 63 80 100 63

Stopper Cylinder

44 28 15 50 82 54 25 64 8 10 28 7 50 50 6.6 11 depth 8 1/8 1/8 1/8 24.5 56 28 19 B + Stroke R R KA KB D-X * Refer to pages 572 and 573 for the auto switch proper mounting position and mounting height. * For the single acting type, a One-touch fitting is on the rod end only. * The position of the width across flats (K) is arbitrary and is not specified. 567 B RSQ Series These 3 figures show

CATALOG VC10

COIL NO. 7C-101-A24 7C-102-A24 7C-103-A24 7C-104-A24 7C-105-A24 7C-1-K24 7C-2-K24 7C-3-K24 7C-4-K24 7C-5-K24 12 16 24 28 11 14 21 25 2.5 3.3 5 6 41 48 55 97 110 37 43 49 87 98 8 10 12 20 24 7C-106-A24 7C-107-A24 7C-108-A24 7C-109-A24 7C-110-A24 7C-6-K24 7C-7-K24 7C-8-K24 7C-9-K24 7C-10-K24 120 140 150 240 204 110 124 135 220 182 26 28 32 50 46 7C-111-A24 7C-112-A24 7C-113-A24 7C-114-A24 7C

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

17 17 M10 x 1.5 20 16 22 M16 x 1.5 30 3/8 43 116 11 10 9 73 262 19 63 28 8 80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14

HRX-OM-S004

Table 3-12 Piping port size Name Port size1 Recommended Recommended piping tightening torque specification Circulating fluid outlet port Rc3/4 28 to 30Nm 1.0MPa and more Circulating fluid return port Rc3/4 28 to 30Nm 1.0MPa and more Facility water inlet port*1 Rc3/4 28 to 30Nm 1.0MPa and more.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

alloy Guide tube Piston rod 5 21 Structural steel Structural steel Ring Collar 6 22 Aluminum alloy Aluminum alloy Pin A Retaining ring 7 23 Structural steel Tool steel Pin B Bushing 8 24 Structural steel Lead-bronze casted Cover assembly Magnet 9 25 Stainless steel DSpatter cover Wear ring 10 26 Tough pitch copper Resin Hexagon bolt Piston seal 11 27 Structural steel NBR -X Rod seal 12 28

2/3 Port Valve

40 28 40 33 50 33 50 43 29 43 29 28 19 28 19 18 11 18 11 12 7 8 5 5 3 3.8 2.5 1.3 1 0.7 VNB1-6A VNB1-8A VNB1-10A VNB24-10A VNB2-10A VNB24-15A VNB2-15A VNB34-20A VNB3-20A VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6-40F VNB74-50A VNB7-50A VNB74-50F VNB7-50F 1 8 1 4 770 520 770 520 500 330 500 330 320 210 320 210 220 130 140 90 90 55 70 45 23 18

TABLE OF CONTENTS

COIL NO. 7C-101-A24 7C-102-A24 7C-103-A24 7C-104-A24 7C-105-A24 7C-1-K24 7C-2-K24 7C-3-K24 7C-4-K24 7C-5-K24 12 16 24 28 11 14 21 25 2.5 3.3 5 6 41 48 55 97 110 37 43 49 87 98 8 10 12 20 24 7C-106-A24 7C-107-A24 7C-108-A24 7C-109-A24 7C-110-A24 7C-6-K24 7C-7-K24 7C-8-K24 7C-9-K24 7C-10-K24 120 140 150 240 204 110 124 135 220 182 26 28 32 50 46 7C-111-A24 7C-112-A24 7C-113-A24 7C-114-A24 7C