Mechanical Valves Series NVM, NVFM, NVZNI

25.4\, Millimeters in Parentheses ACTIIATOR SUB ASSEMBLY Note: MTG Screws 1.) 2-M3x8 2.) 2-M3x10 3.) 4-M3x27 Daacrlpdon Roll.r llrt vlr 100 hnNo. vil 200400 h]tNo. vil 830 Pr|t No.

Digital pressure switch for energy-saving control ejector

When 1 digit = 1 kPa, the pressure is given with an increment of Digit (Min. setting unit) 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

ZQ

Rated pressure range ( ) ZQ1S-D51--AS ZQ1S-D32--AS ZQ1S-D52--AS ZQ1S-D31--AS 0 to 100 kPa Set pressure range 0 to 99 kPa Withstand pressure 0.2 MPa Fluid Air/Non-corrosive metal/Non-combustible gas Power supply voltage 12 to 24 VDC 10% Current consumption 35 mA or less [with power supply voltage of 24 VDC and switch output ON (with no load)] Ambient temperature range 5 to 50 C (with no freezing

IIIIIII

25.4\, Millimeters in Parentheses ACTIIATOR SUB ASSEMBLY Note: MTG Screws 1.) 2-M3x8 2.) 2-M3x10 3.) 4-M3x27 Daacrlpdon Roll.r llrt vlr 100 hnNo. vil 200400 h]tNo. vil 830 Pr|t No.

Soft Start-up Valve AV2000/3000/4000/5000

(50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 Option D: Type D DIN terminal Nil G None With pressure gauge How to Order Pilot Valve Assemblies Y: Type Y DIN terminal SF4 1 G 80 Rated coil voltage 100VAC (50/60Hz) 200VAC (50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 For soft start-up valve Note) The grommet type can

VVX31/32/33

AC, DC C.O. 7.5 55 6 45 50 42 18 60 37 12 AC Cv converted Av x 10 6 (m 2 ) VX32 AC (Full wave rectification) 50/60 10 8.5 60 1 3 5 0.08 1.5 1.0 0.6 220 1.9 VX311 -00 DC 8.5 60 11 60 9.5 50 1 3 5 0.16 0.5 0.3 220 3.8 VX312 -00 50 55 22 60 47 18 AC 0.6 370 VX3225-00 2.2 0.19 4.6 VX33 1.0 530 VX3325-00 AC (Full wave rectification) 50/60 14 11.5 60 1 3 5 0.24 DC 11.5 60 0.3 0.2 5.8 220 1.0

ZSE30A(F)/ISE30A

ZSE20 ISE20 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range ZSE30 ISE30 ZSE30 ISE30 Switch ZSE40 ISE40 For vacuum pressure 101 kPa 0 ZSE30A 10 kPa 105 kPa ZSE10 ISE10 For compound pressure 100 kPa 100 kPa ISE70 ZSE30AF 105 kPa 105 kPa ZSE80 ISE80 For positive pressure 100 kPa 1 MPa ISE30A 105 kPa (0.105 MPa) 1.05 MPa PS Rated pressure range of switch Set pressure range of switch ISA3 ISA2

Electronic Pressure Switch Series (Separate Type)

to 100 kPa 10 to 100 kPa 50 to 500 kPa 0.1 to 1 MPa 10 to 101 kPa 101 to 101 kPa 10 to 100 kPa Set pressure range 0.2 to 2 kPa 12 to 24 VDC (Ripple p-p 10% or less) Voltage 0.5% F.S. or less (0 to 50C) Temperature characteristics 0.1% F .S. or less Repeatability Hysteresis mode: Variable Window comparator mode: Fixed (3 digits) Hysteresis mode: Variable Window comparator mode: Variable Hysteresis

Air Pilot Operated Series NVSA

L..k.g.: Port to porl (internal) not 1o exceed 0.m7 cubic feet per minule at 100 PSIG (6.9 Kgtcm'). Op.r.Sng Pr..rur..! 28 'Vacuuh to 30o FSIG (20 Kglrcm?).

IDX-OM-W023

T 100 2 () 100 IDU Series 4-1 4 1 IDX-OM-W023 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDU Series 4-2 4 2 IDX-OM-W023 4 30 (2) 30 () O IDU Series 4-2 4 3 IDX-OM-W023 4 AD48-A 1 IDU8E/11E/15E1 ) 20193 20192SERIAL No.XPAD48 SMC WEB IDF-S0002 1 IDU8E/11E/15E1 C42FP-260S 1 IDU8E/11E/15E1 IDF-S1933 1 IDU8E/11E/15E1 2 IDU Series 4-2 4 4 IDX-OM-W023 5 5 5-1 3 ON OFF () 3 2

PFA/PFW

(43.5) 2 1 42 4 3 4 Connector pin numbers Pin name Pin No. 2-3.4 43 DC (+) 1 NC 2 DC () 3 Flow direction OUT 4 Dimension L Model 100 PFW504 106 PFW520 16 Digital Flow Switch for Water Series PFW Dimensions (mm)/ Separate Type For Water 1in = 25.4mm Scale: 65% PFW540-m (N) 62 120 23 78.2 1.6 60 50 34 2-Piping port size 4-4.5 34 40 50 1 2 48 (43.5) 3 4 Connector pin numbers Pin names Pin

DOC1020530

Target position: 100.000[mm] (=10 [m] = 186A0h) Target speed: 100[r/min] (=10 [0.01r/min] = 2710h) Acceleration time constant: 100 [ms] (= 64h) Deceleration time constant: 100 [ms] (= 64h) The setup value is as follows.

3 Port Air Operated Valve

(Convertible) Standard 0.2 to 1.0 Operating pressure range (MPa) For vacuum 100 kPa to 0.2 Pilot pressure (MPa) 0.2 to 1.0 (Equivalent to the operating pressure or more) Ambient and fluid temperature (C) 10 to 50 (No freezing) Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction to axis and right

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Move Speed Position Accel PushingF T riggerL V PushingSp Moving F Area1 Area2 In posn mm/s2 mm/s mm mm/s2 mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 6.

VXH

Electrical entry Rated voltage G Grommet 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz C Conduit D DIN terminal 3 110 VAC 50/60 Hz T Conduit terminal 4 220 VAC 50/60 Hz 7 240 VAC 50/60 Hz Refer to the table (1) given below for availability. 8 48 VAC 50/60 Hz 9 Other (Only AC) Table (1) Rated VoltageElectrical Entry-Electrical Option Caution Insulation type Electrical entry Electrical option 1 (100

44

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. Maintenance Caution KQ2 1. Pre-maintenance inspection When the product is removed, turn off the power, cut off the supply pressure, and confirm that fluid in the piping has been discharged. KQB2 KS KX 2.

VT325

(Values at the initial period) VT325-C VT325-G JIS Symbol Solenoid Specifications Grommet, Conduit, DIN terminal, Conduit terminal 100, 200 VAC, 50/60 Hz, 24 VDC 15 to +10% of rated voltage 75 VA 60 VA 27 VA 17 VA 12 W Electrical entry Coil rated voltage Allowable voltage fluctuation 50 Hz 60 Hz 50 Hz 60 Hz Inrush AC Apparent power (3) Holding DC Power consumption (3) Note 3) At rated voltage

PSxx-OMS0006CN

<> () ,() 13[SEt] [SEt] ()[P_1][n_1] ()( ) ()( 50) ( )(50 ) 2OUT1 (2P_1) 1 2 2 3(29)OFF ([SEt]) -24No.PS-OMS0006CN-G 24 P1L()P1H()WH1() dt1) (n1L n1H) 31 -25No.PS-OMS0006CN-G , 35[F 0] [F] 2 3 5 F0 F1 F99 ()[-] [F 0] 28 ISE20 MPa ""M ZSE20(F) kPa ISE20 P psi ZSE20(F) [F 1] OUT1 29 () OFF ISE20 0.500 MPa ZSE20 -50.5 kPa ZSE20F50.0 kPa ONOFF ISE200.050 MPa ZSE20 5.1 kPa ZSE20F5.0

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-55 14 Series LVD Fitting Assembly Procedure Assemble fittings following the procedure shown below.

Water Strainer

Mesh: 100/70/50/25 mesh How to Order WF300 02 Port size Mesh 02 Rc1/4 03 Rc3/8 04 Rc1/2 Nil 100 mesh 1-X204 70 mesh 2-X204 50 mesh 3-X204 25 mesh Related Equipment Check Valve INA-14-290/XTO-674Water Regulator WR110--X224/WR110--X215 Body material: Brass Body material: Special brass Best Pneumatics 14-E627 Port size Set pressure range (-X224): 0.08 to 0.39 MPa Rc1/8, Rc1/4 Set pressure