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IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

ML2B

For detailed specifications, refer to page 10-20-1. RB Electrical entry (Fetching direction) D-Z80 Grommet (In-line) J Type Model Features Without indicator light Normally closed (NC = b contact), solid state switch (D-Y7G/Y7H type) are also available. For details, refer to page 10-20-41. Reed switch D-X 20Data 10-13-17

ML2B

For detailed specifications, refer to page 10-20-1. RB Electrical entry (Fetching direction) D-Z80 Grommet (In-line) J Type Model Features Without indicator light Normally closed (NC = b contact), solid state switch (D-Y7G/Y7H type) are also available. For details, refer to page 10-20-41. Reed switch D-X 20Data 10-13-17

Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Sine Rodless Cylinder Series REBR Direct Mount Type

23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z Model REBR15 18 54.5 98 REBR25

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

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Rod Couplers Part # Rod Thread DMA-312 5 16-24 DMA-375 38-24 DMA-437 7 16-20 DMA-500 12-20 The Table on the right shows the Rod Couplers that offers. The thread shown is a male / female thread as the coupler has both a male and female end.

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Rod Couplers Part # Rod Thread DMA-312 5 16-24 DMA-375 38-24 DMA-437 7 16-20 DMA-500 12-20 The Table on the right shows the Rod Couplers that offers. The thread shown is a male / female thread as the coupler has both a male and female end.

EXxx-OMY0006CN

PROFIsafe PROFIsafe 20 "PROFIsafe PROFINET 16.3.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 5020 74 115 152 174 16 15 52 74 136 36 132 32 40 40 34.5 196 25 89 128 169 196 20 21 62 89 153 46 149 42 50 50 141.5 156 199 25 41 84 131 152 172 199 20 16 37 57 84 63 63 29.5 144.5

Peltier-type Chiller Thermo-con/ Compact Type

) 148 40 185 163 Air Air Dustproof filter Model no. label NRTL label 90 20 20 110 Rubber legs (4 pcs.)

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(cm2) (mm) (mm) direction 3 4 i 5 6 12.57 j37.7 50.3 62.8 75.4 OUT 40 20 1 140.2: 168.2 28.0 84.1 112.1 37.7 47.2 56.6 IN 9 .43 1283 19.63 58.9 78.5 98.2 117.8 OUT 50 20 49.5 16.49 66.0 IN 82.5 199.0 124.7 155.9 !

One-touch Fittings

Chamfer dimension of R and NPT thread with sealant, and Uni thread Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 D Rz 12.5 45 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.

Transfer

500 1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) 30 40 20 20 5 4 3 10 10 5 4 3 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 2 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B40 2

Pin Clamp Cylinder Series CKQ/CLKQ

Dimensions Auto Switch Internal Circuit Indicator light 6 14 Main circuit of switch NO.4 8.8 9.2 NO.3 32 4 300 44 2-3.5 mounting hole 6 1 Indicator light/Display method 6 20 ON Operating range OFF 13 Most sensitive position Indication Green Red Red Optimum operating position 1 2 3 4 Connector pin 19

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

/8 1/4 H 41 45 45 50 H1 5 6 6 8 20 0 0.033 0 0.033 0 0.033 0 0.039 20 26 26 32 M10 X 1.25 25 M10 X 1.25 M14 X 1.5 32 40 Boss-cut Dimensions for Other Mounting Brackets Bore ZZ 106 110 112 141 Add 3mm to each ZZ dimension of the standard style (double acting/single rod) on p.1.4-10 to 1.4-18. 20 Auto Switch Position Basic Low friction 25 CM2QB20SCM220A, #1 CM2QB25SCM225A, #1 CM2QB32SCM232A

Plate Cylinder with Lock Series MLU

CD-MU02 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

VQ1430 20 or less 26 or less Metal seal Exhaust center 110 6.3 (0.35) VQ1431 25 or less 33 or less Rubber seal 4.5 (0.25) VQ1530 20 or less 26 or less Metal seal Pressure center 6.3 (0.35) VQ1531 25 or less 33 or less Rubber seal Note 1) Values are for cylinder port size C6.