Modular Design with Uniform Body Style

with T-spacer*5, *6 p. 55 IS10T-20-m01-D IS10T-20-m02-D IS10L-30-m01-D IS10L-30-m02-D IS10L-30-m03-D IS10L-40-m02-D IS10L-40-m03-D IS10L-40-m04-D IS10L-60-m04-D IS10L-60-m06-D IS10L-60-m10-D Pressure switch with L-shaped piping adapter*5, *6 IS10L-20-m01-D IS10L-20-m02-D IS10L-50-m04-D IS10L-50-m06-D p. 56 IS10E-40-m02-D IS10E-40-m03-D IS10E-40-m04-D IS10E-40-m06-D IS10E-60-m06-D IS10E-60

MXQ

F F A Lr 6 6 6 Lr = 40 mm MXQ6-30 MXQ6-30 0.015 0.03 0.05 MXQ6-30 MXQ6-50 MXQ6-10 MXQ6-10 MXQ6-20 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-50 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Modular F.R.L. Unit

AD27 AD37 AD37NNote 6) AD37 AD37NNote 6) AD47 AD47NNote 6) AD47 AD47NNote 6) Spacer Y200 Y300 Y300 Y400 Y500 Pressure switch Note 5) IS1000M-20 IS1000M-30 IS1000M-30 IS1000M-40 IS1000M-50 T-interface Note 4) Note 5) Y21001 (02) Y310(01) 02 Y310(01) 02 Y410(02) 03 Y510(02) 03 Attachments 3-port valve for residual pressure release Note 5) VHS20-01 02 VHS30-02 03 VHS30-02 03 02 03 04 VHS40VHS40

KJ

Note) D: Max. diameter 10.4 4 6 4 9.8 13.4 9.8 13.4 15.3 20.5 22 23.5 24 23.5 10.5 14.5 12 14.5 18.5 15.5 18.5 20.5 19.5 20.5 22 25 18 26.5 18 26.5 27 27 30 32.5 31.5 32.5 36 39 15 16 2.9 2.9 4 22.5 15 22.5 21 23 24 26 25 26 30 31 3.8 3.8 Connection thread 6 12.8 17 7.5 5.9 6 Applicable tubing 17.6 28.5 16 11.2 15.2 8 8 18.5 20.6 27.5 20.5 14.3 20.6 31 21 18.5 27 20.3 8 10 25.2 34

MXS

MXS6-50 VWith stroke adjuster MXS6-10AS MXS6-20AS MXS6-30AS MXS6-50AS SMXS6N, #1 SMXS6N, #2 SMXS6N, #3 SMXS6, #1(#1+#5) (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 MXS6-10 MXS6-20 MXS6-30 MXS6

Modular F.R.L. Units

AC55B-B 1 1/8 191.2 234.1 43 98.1 30 43.3 3.2 70 50 11 20 6 60 AC60B-B 1 1/8 196.2 234.1 46 98.1 30 43.3 3.2 70 50 11 20 6 60 Optional specifications Semi-standard specifications Metal bowl with level gauge With drain guide Metal bowl with drain guide With barb fitting With auto drain Metal bowl with level gauge, with drain guide Square embedded type pressure gauge Round type pressure

Free Mount Cylinder

Bore size (mm) 6 18 10 20 16 33 20 40 25 46 32 56 7 9 Free Mount Cylinder Double Acting, Double Rod Series CUW 6, 10, 16, 20, 25, 32 How to Order 6 30 30 CUW D Without auto switch 6 30 M9B 30 CDUW D With auto switch Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Air Cylinder

30 M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 88 18 177

Proposals for Energy Saving

30 30 40 45 50 57.5 63.5 69 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 36 46 53 30 30 30 59 71 82 46 55 66 45 55 68 58 67 73 21 26 32 23.5 28 34.5 34.5 40 46.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 10 14 14 18 18 18 4 5 5 12 15 15 M6 x 1.0 M8 x

Table of Contents

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

CM2

For construction, refer to page 6-4-30. Since the dimensions of mounting style is the same as pages 6-4-32 to 6-4-34, refer to those pages. For other specifications, refer to page 6-4-22.

LJ1H

Limit switch 10 20 30 None B contact specification 2 pcs.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

+ 30 (n 2) n = 2, 4, 6, 8 Same side 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 1 15 35 55 110 110 110 150 150 150 -XC30 Front trunnion Different sides Same side 2 -XC35 With coil scraper 150 + 30 (n 2) n = 2, 4, 6, 8 Different sides 35 + 30 (n 2) 55 + 55 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 D-A44 n 150 + 50 (n 2) n = 2, 4, 6, 8 Same side 110 + 50 (n 2) n = 2, 4, 6, 8 150 1 15

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

Integrated Controller

9 to 300 5 to 150 30 to 900 24 to 640 12 to 320 6 to 160 Actuator specifications 450 to 500 30 to 900 24 to 640 12 to 320 6 to 160 Max. acceleration/ deceleration [mm/s2] Horizontal 101 Vertical 50001 Pushing speed [mm/s2]5 25 35 30 Positioning repeatability [mm] 0.02 Lost motion [mm]6 0.1 or less Lead [mm] 10 5 2.5 20 12 6 3 24 16 8 4 Impact/Vibration resistance [m/s2]7 50/20 Actuation

Rotary Actuator/Vane Type

D2 = CB = C X = [mm] Size CRB2, CRBU2 Y L2 max D2 10 2 to 8 Y-1 3 [mm] Size CRB2 CRBU2 X L1 max D1 X L1 max D1 10 4 to 14 X-3 3 2 to 14 X-1 3 15 5 to 18 X-4 3 to 4 3 to 18 X-1.5 3 to 4 20 6 to 20 X-4.5 3 to 5 3 to 20 X-1.5 3 to 5 30 6 to 22 X-5 3 to 6 3 to 22 X-2 3 to 6 15 3 to 9 Y-1.5 3 to 4 20 3 to 10 Y-1.5 3 to 5 30 3 to 13 Y-2 3 to 6 40 6 to 15 Y-4.5 3 to 8 86 Simple Specials CRB2 Series

Air Cylinder

30.4 5.5, 9.5 depth of counterbore 6 15 18 M8 x 1.25 27 1/8 75 38 11 104 25 Up to 200 22 19.5 17 10 14 2 22 10 32 6 31 5.5 8 36.4 6.6, 11 depth of counterbore 7 18 22 M10 x 1.25 29 1/8 77 44 12 111 32 Up to 200 22 19.5 17 12 18 2 26 10 32 6 38 5.5 10 42.4 9, 14 depth of counterbore 9 21 24 M10 x 1.25 33 1/8 83 45 13 117 40 Up to 300 30 27 19 16 25 2 30 10 39 8 47 6 14 52.4 11, 17.5 depth

10

1) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 95 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 105 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 125

ZP

5 x 10 5 x 20 Symbol Breadth x Length (mm) 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 3507 4010 4020 4030 5010 5020 5030 6010 6020 6030 8020 8030 ZF ZP ZCU Dimensions AMJ Series ZPT Series ZPR Series ZPY Misc.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

52 24 9 36 64 1.5 6 23 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions: Bracket Options JSX20, 30 JSX20U, 30U The grommet type is only available for the JSX20 and 30.