® Electric Slide Table/Compact Type LES8, 16, 25 Series LES Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Electric Slide Table/Compact Type Step Motor (Servo/24 VDC) Servo Motor (24 VDC) LES8, 16, 25 Series LES RoHS How to Order S 1 1 R J 6N LES 8 30 q w e r t y u i o !0 !1 !2 !

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

0oi q w e r t y u i !1 !2 No.

S Couplers Series KK/KKH/KK13

3 Gasket M-5G2 T Electroless nickel plated KK3/4/6 i q u !3 !7 !1 r !6 t y !2 e !4 !5 !4 !5 !

5 Port Solenoid Valve SY Series

e (EB) 3 (EA) 5 (P) 1 t 2 position double JIS Symbol 2 position double (A) (B) 4 2 q w y u r (P) 1 (EB) 3 (EA) 5 t 3 Position Closed center / Exhaust center / Pressure center JIS Symbol 3 position closed center (A) (B) 4 2 q w y u r 3 position exhaust center 3 position pressure center (EB) 3 (EA) 5 (P) 1 t (This figure shows a closed center type.)

IDX-OM-W025

Specification for Option L 10 1 Safety instructions . 10 1 10 2 Specification . 10 1 10 3 Maintenance . 10 2 Chapter 11 Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Cautions for handling the motor type auto drain . 11 2 11 4 Electric circuit . 11 2 Chapter 12 Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

IDX-OM-W034

SIZE PORT SIZE B G H D E WITH LAMP SWITCH DRAFT AIR OUTLET THERMOMETER EVAPORATION BALL VALVE BLOCK TERMINAL AUTO DRAIN F C VENTILATION VENTILATION [DIA.911]) (WIRE DIA.0.4 ENTRY HOLE POWER CORD DRAIN TUBE LENGTH39.4[1000] J N M K L P [4XDIA.13] 4XDIA.0.5 (SIZE OF RECOMMENDED BOLTM10) A B C D E F G H J K L M N P Q R Model Port Size Dimensions (inch [mm] ) 31.5 [800] 34.2 [868] IDFB55E 2 1.4

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

389 4-13-10

IDX-OM-W035

S 10 S 10-1 10-2 PE IDFB Series 10-1 10-1 IDX-OM-W035 11 T 11 T 11-1 IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ONOFF 3 () 5 /1 () 11-1 IDFB Series 11-1 IDX-OM-W035 11 T 11-4 IDFB22E/37E PE 1 2 3 0.25inch (6.5mm) (1.25mm 2) AWG14 (2mm 2) AWG16 (1.25mm 2) AWG14 (2mm 2) AWG16 IDFB Series 11-4 11-2 IDX-OM-W035 11 T IDFB55E/75E =M4X10 3 2 1 0.25inch (6.5mm) 0.4inch (

Fieldbus system IO-Link Master Unit

IOL_Autostart DI_C/Q Digital input only. DO_C/Q Digital output only. -23No.EX-OMY0026 IO-Link master unit parameters (continued) No.

MGC

w e r t y u i o !

Low Profile 2/3-Port Solenoid Valve

Drain flushing Remove drainage from the air filters regularly. -7- Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire

How to Order LER10, 30, 50 Series LER Step Motor (Servo/24 VDC) Electric Rotary Table ®

Step Motor (Servo/24 VDC) Electric Rotary Table How to Order LER10, 30, 50 Series LER RoHS LER 10 1 1 S K 6N q w e r t y u i o !

Low Profile

SX90/090 Series CAT.ES70-59A Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model

LEC-OM034xx

CN2: TB/PC connector.33 9. 1 How to use.33 10. LED display.34 10. 1 LED display.34 10. 2 Controller IF communication status and LED display.35 11. Mode.36 11. 1 Outline.36 11. 2. Step data input mode .36 11. 3. Numerical data input mode.36 11. 4. Data writing mode.38 12.

CJ2X/CUX/CQSX/CQ2X/CM2X

0.05 MK(2) Standard Stroke RS Q G Bore size (mm) Standard stroke (mm) RS H A 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 RZQ Precautions MI W S CEP1 Be sure to read before handling.

CJ2X/CUX/CQSX/CQ2X/CM2X

0.05 0.05 MK(2) Standard Stroke RS Q G Bore size (mm) Standard stroke (mm) RS H A 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 RZQ Precautions MI W S CEP1 Be sure to read before handling.

CJ2X/CUX/CQSX/CQ2X/CM2X

16 20 25 32 RHC Min. operating pressure (MPa) 0.06 0.06 0.05 0.05 0.05 MK(2) Standard Stroke RS Q G Bore size (mm) Standard stroke (mm) RS H A 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 RZQ Precautions MI W S CEP1 Be sure to read before handling.