4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

S 20 20 stations A,B port side R1,R2 Port M5T M5 0.8 M5 0.8 R1,R2 Port M5 0.8 N3T One-touch fitting A, B Port M5 0.8,N3T P Port NPTF P Port NPTF A, B Port M5 0.8,N3T How To Order: Flat Ribbon Cable Manifold Type 21P (4 Port/Body Ported Type) Applicable valve: SYJ3 23 LOU --M3 SYJ3 23Y LOU --M3 5 6 5 6 AB Port M3 0.5 SS5YJ3--21P-07 00T Applicable connector ass'y: SY3000-37-28A (For 2

Vacuum Ejector with Solid State Timer, Series ZMA

Models Standard supply pressure Nozzle diameter (mm) Diffuser construction Air consumption l/min (ANR) Max. suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90 45 Series ZMA How to Order ZMA 07

Ejector Valve Unit, Series ZYY/ZYX

5V, 3VDC/100V, 110V, 200V, 220VAC Nil 1 None With silencer Lead wire length 300mm Lead wire length 600mm With lead wires (length 300mm) Without lead wires Without connector With lead wires (length 300mm) Without lead wires Without connector G H L LN LO M MN MO Grommet L type plug connector Max. vacuum pressure -84kPa {-630mmHg} -53kPa {-400mmHg} S L M type plug connector Nozzle diameter 07

OML0002-C

How to Order IZN10 01 P 06 Z B1 IZN10 High frequency AC nozzle type Series name Nozzle shape NIL 01 02 11 Piping female Note 1) Rc1/8 Type Energy saving charge elimination nozzle Large flow nozzle Output specification NIL NPN P PNP Piping diameter 06 f6: metric 07 f6.351/4"): inch 16 f6: metric (elbow) 17 f6.351/4"): inch (elbow) Power supply cable NIL 3m Z 10m N Not provided Bracket NIL

Miniature Regulator

operating pressure Regulating pressure range Rc 1/8, NPT 1/8 (Female thread) Air 1.2 MPa 0.8 MPa Standard: 0.2 to 0.7 MPa, Low pressure use (0.2 MPa setting): 0.05 to 0.2 MPa 5 to 60C (No freezing) Relieving type 0.065 Ambient and operating temperature range Construction Weight (kg) Model Port size IN Model OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07

Manifold Specifications

(Example) VV5Z3-43P-07-C41 pc. (Manifold base) VZ3143-5MOZ 3 pcs. (Valve) VZ3243-5MOZ 3 pcs. (Valve) DXT192-13-3A1 pc. (Blanking plate assembly) DXT192-52-1-4A3 pcs. (Connector assembly) DXT192-52-2-4A3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

Ejector Valve Unit Series ZYY/ZYX

Note 1) Note 2) Max. vacuum pressure Manual override S L 84 kPa 53 kPa Nil D E Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nozzle diameter 07 10 0.7 mm 1.0 mm 1082 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYX3000 ZA Lead wire/ Voltage suppressor specifications ZX Plug-in type Serial transmission type LOZ ZR LOZ 10 X3 ZY 5 M Z

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H K VCKL1209-02F H KFS-12 N Gasket VCKK-4-1 Nylon 1 10 set unit 23 Troubleshooting (Valve

Return Filter

Symbol Differential pressure indication Symbol Nominal filtration 0 None 4 Differential pressure indicator standard 074 74m 5 Differential pressure indication switch 105 105m 003 3m Table1-1 Port size (Rc) 005 5m Non-standard 010 10m Port size Threaded connection 020 20m Symbol 040 40m 149 149m 06 3/4 270 270m 08 1 10 1 1/4 12 1 1/2 16 2 20 2 1/2 24 3 10 / 17 FGX-OM-F001-A 2.

RS2H-OM0045P

OFF (OFF) 1. 2. 60 21 - 10. 22 - 23 - B 24 - A RS2H-OM0044PRS2H-OM0045P 12 B 17,24 9 C C +86-10-67885566 : 08:0017:00() SMC() URL http://www.smc.com.cn 2 100176 +86-20-28396516 : 08:4517:30() SMC() URL http://www.smcgz.com.cn 3 2 510660 +81-3-5207-8249 Fax: 81-3-5298-5362 : 09:0017:00() SMC URL http://www.smcworld.com /101-0021 4-14-1 2017 SMC Corporation All Rights Reserved

10

C D (Drill through) Applicable split pin Clevis Knuckle CD-M03Note 1) 32, 40 10 0.040 0.076 44 36 4 3 3 x 18 l CD-M05Note 1) 50, 63 14 0.050 0.093 60 51 4.5 4 4 x 25 l CD-M08Note 1) 80, 100 22 0.065 0.117 82 72 5 4 4 x 35 l IY-12Note 2) 125 25 0.065 0.117 79.5 69.5 5 4 4 x 40 l CJP NT-03 32 M10 x 1.25 6 17 19.6 16.5 NT-04 40 M14 x 1.5 8 22 25.4 21 NT-05 50, 63 M18 x 1.5 11 27 31.2 26 NT-08

CG1

Bore size (mm) Auto switch model 20 25 32 40 50 63 80 100 D-C7/C8 BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-H7 D-B5/B6 BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 D-G5/K5 A set of following stainless steel mounting screws is attached. (A switch mounting band is not attached. Please order the band separately.)

3 Port Solenoid Valve Series VQ100 1

Plug-in unit manifold VV3Q 1 1 08 C U 1 D Plug-in unit manifold with cable (3 m) VV3Q11-05CU21 set Manifold base part no. VQ110-5F4 set Valve part no. (1st to 4th stations) VVQ100-10A-11 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug-in type) VQ10-F 1 VQ100 Series For mounting latching type, please consult with SMC.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

two or more symbols are specified, indicate them alphabetically. 2-3-7 8 Series SQ1000 Manifold Option Blanking plate SSQ1000-10A-3 Individual SUP/EXH spacer SSQ1000-PR1-3Name plate (-N) SSQ1000-N3-n External pilot specifications (-R) P. 2-3-44 P. 2-3-45 P. 2-3-47 P. 2-3-48 C6 L6 External pilot port SUP/EXH block SSQ1000-PR-3-C8 (-S) SUP block plate SSQ1000-B-P Blanking plug KQ2P-23/04/06/08

Plug-in/Plug Lead: Single Unit

X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 Rc 1/8 PE port Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 External pilot port 27.5 27.5 41 41 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 2-6-7 Series VQ5000 Base Mounted Plug Lead Unit: C Kit (Connector Kit) How to Order Manifold C W VV5Q 5 5 08

Free Mount Cylinder for Vacuum Series ZCUK

Symbol 2 to 8 10 to 16 20 to 32 40, 50 02 04 06 08 10 13 16 20 25 32 40 50 Suffix 2 4 6 8 10 13 16 20 25 32 40 50 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 B4 M4 x 0.7 Female thread Applicable cylinder model Symbol M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Nil ZC(D)UK 16 to 32 M10 x 1.25 B10 Material Note) -X11 pad: 2 to 8 diameter and flat style

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

cylinder -Y7PSAPC -Y7PSC CXS, CXSW Direct Body Mount All applicable bore sizes in each series uses this Auto Switch "SC" auto switch MGF, MGP Direct Body Mount All applicable bore sizes in each series uses this Auto Switch -F5PSAPC -F5PSC CDA1 Tie Rod Mounting BT-03 (32/40 Bore) BT-04 (50/63 Bore) BT-06 (80/100 Bore) The above older CDLA Tie Rod Mounting BT-04 (40/50 Bore) BT-06 (63 Bore) BT-08

Table of Contents

Filter case Pin Slot Housing Filter element (ZX1-FE) Filter gasket Gasket groove Connector Socket Lead wire Hook 16-7-3 4 Series ZSP1 Dimensions Grommet type: ZSP10X Adjusting needle Pressure sensor Vacuum supply port ADJ 20 Adsorption nozzle port 08 7 48.3 Lead wire length 600 (3000) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

ZSP1

Filter case Pin Slot Housing Filter element (ZX1-FE) Filter gasket Gasket groove Connector Socket Lead wire Hook 16-7-3 4 Series ZSP1 Dimensions Grommet type: ZSP10X Adjusting needle Pressure sensor Vacuum supply port ADJ 20 Adsorption nozzle port 08 7 48.3 Lead wire length 600 (3000) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

SMC Electronic Switch Series Variations

Hook Connector Indication of polarity on name plate Lever Filter case Pin Filter element Slot (ZX1-FE) Housing Filter gasket Connector Socket Gasket groove Hook Lead wire 3.11-3 Adsorption Confirmation Switch ZSP1 Dimensions Grommet style ZSP1-l0Xl-l Adjustment needle Pressure sensor Vacuum supply port ADJ 20 PSE Adsorption nozzle port 08 ZSE4 ISE4 7 48.3 ZSE5 ISE5 Lead wire length 600 (