Precision Cylinder Series MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty.

Electro-Pneumatic Valve NVEP/NVEF Series

5 1 l 3 = % =V2 0 1 0 3 NVEP 31 4 Size I Pressure Size Code PSIG (Kg7cm2) NPTF (Base mount type) 2 1 7-90 (0.s-5.5)O2=t/c 03=% 2 15-135 (1-9) 4 1 o.7 -22.5 (0.051.s) 03=% O4=th 06 =Vr Subplates (NVEF2120; NVEFII20; NVERI I20) Part No.

RSH/RS1H

0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !2 #7 #4 #7 @2 e #5 #3 @8 #7 #7 #1 @8 w 10-9-6 6 Heavy Duty Stopper Cylinder Series RSH/RS1H Construction Component Parts (For single acting) No.

Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

COQ2BP

M8x1.2S 6.6 A 0 9 67 76 89 8 Ml 0X l .5 15 50 98. Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .

Aluminum High Vacuum Angle Valve

0 !

CE2

0 !1 !2 !3 !4 !5 !6 !7 !8 !

Industrial Filters

FGC FGC FGF How to Order Elements FGH B 200 E N 005 FQ1 Element symbol Seal material/Operating temperature range FN Seal material Operating temperature range (C) Symbol Symbol Element material EB ES A Note) Element material Bronze Stainless steel 316 0 to 150 0 to 120 0 to 80 0 to 120 Non-asbestos Fluororesin NBR FKM T N V B S Symbol Element size Note) Not possible with bronze elements.

LV50-OMQ0002

Approx. 1.7 mm Colours Brown, White, Black, Blue Sheath Material Lead free heat and oil resistant PVC Finished O.D. 6 -66No.LV50***-OMQ0002-G Characteristics Chart Flow characteristics (pressure loss) LFE1 LFE2 0.02 0.02 P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n]

rep-modular-e

0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Lubrication Equipment

0 !

Microspeed Cylinder

mm Speed waveform Speed mm/s Displacement mm 0 0 Operating direction in Operating direction out Operating direction in Operating direction out 2.0 -2.0 60 40 Displacement waveform 20 20 Displacement waveform 20sec. 20sec. 0 0 Time Time Data conditions Working fluid .Air Mounting orientation Horizontal no-load Operating pressure ..0.35MPa Operating circuit .Meter-in Note 1) The average

Uniaxial Electric Actuator Series LJ1

0 0 2 4 6 8 10 0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/Lateral a=1000 a=1000 a=1000 20 200 100 a=2000 a=2000 L3 mm L3 mm L3 mm a=2000 L3 100 10 50 W M3 a 0 1 2 3 4 5 0 10 30 20

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

to 5mm Both ends, 0 to 3mm each Both ends, 0 to 5mm each Both ends, 0 to 4mm each Rubber stopper Stroke adjustment range Shock absorber One side only, 0 to 6mm Both ends, 0 to 5mm each Metal stopper Reed switches (2 wire, 3 wire) Solid state switches (2 wire, 3 wire) 2 color indication solid state switches (2 wire, 3 wire) Auto switches +1 0 mm Stroke length tolerance Theoretical Output

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

th o.7 1 8 0 30 or less 0.95 (0.43) 3 position ,& ln case of NVFR2O00-OFZ-017 t_SpecialOrder Non-locking push type {extended), Lock type Note) Operaling pressure: 0^130PSl (0-g.okgl/cm'z) Pilot operating pressure 2 position double: 15-150PSl {1 -g.Skgycm?) 2 position singlei 3 posilion: 30^ 130PSl {2.0^9.0k9/cm'?)

CC-Link-E

S. ) 4095] H EX O ut put pressure 0% F. S. 100% F. S. a EX. ) To set pressure at 0. 3M Pa by I TV2030( f or 0. 5M Pa t ype) ( 0. 3M Pa/0. 5M Pa) 40952457D EC999( H EX) A pressure of 0. 3M Pa i s set by sendi ng i nput dat a of 999 t o t he el ect ropneum at i c regul at or t hrough t he m ast er PLC. Com m uni cat i on dat a al l ocat i on For "1" t he num ber of t he st at i on.

PSxx-OMH0002CN

0 UPDOWN0 0 0 () () ISE75-(10 MPa) 00 0 0.40.50.69.910.0 000.10.20.30.40.50.69.910.0 ISE75H-(15 MPa) 00 0 0.50.614.915.0 000.10.20.30.40.50.614.915.0 0 0 ISE75 00.410.0 MPa 010.0 MPa ISE75H 00.515.0 MPa 015.0 MPa 0 SETOUT1 -19No.PS-OMH0002CN-D 8 SET 2 SET 2 1. 1) OUT1 1. 2) OUT1 1. 3) OUT2 -27-67 1. 4) OUT2 -27-67 2. 3. 4.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Heavy Duty Stopper Cylinder

4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !