Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

MNB

10 46 45.5 54 97 Up to 500 12 13 83 13 13 19.5 D38 40 8 16 10 30 22 1/8 35 14 52 52.5 63 104 Up to 500 12 13 91 16.5 14 27 46.5 50 11 20 12.5 35 27 1/4 40 18 65 58.5 75 120.5 Up to 600 15 14 104.5 19 15.5 32 -X 56.5 63 11 20 17.5 35 27 1/4 45 18 75 68 90 134.5 Up to 600 12 14 119.5 23 16.5 32 72 80 13 25 22 40 32 1/4 45 22 95 81 102 169 Up to 750 18 20 150 19 33 37 2089 100 16 30 25 40 41

7ND9071en

9.4 Adjustment.41 9.5 Removal of the limit switches for accessing the valve controller.41 9.6 Circuit diagrams.41 9.7 Maintenance .41 10 TOOLS.41 11 ORDERING SPARE PARTS .41 12 DRAWINGS AND PARTS LISTS.42 12.1 Exploded view ND9100, ND9400, ND7100 .42 12.2 Exploded view ND9100_/D__, ND9100_/I__, ND9100_/K0_ and ND9100_/B06.43 12.3 Exploded view ND9200, ND9300, ND7200 44 12.4 Exploded view

Magnetically Coupled Rodless Cylinder

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

PA300/500/700

Area: (800) 258-9200-www.stevenengineering.com VV3PA5-41-051-03 Base specifications VR 42 41 Individual exhaust Combination symbol Common exhaust Piping 2A Side Side Passage VH Air supply port (P port) is common.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

Stainless Steel One-touch Fittings Series KG

8 KGY08-03 17 47 30.5 37 1 8 KGY10-01 27 49.5 31 R(PT) 1 4 3 8 KGY10-02 KGY10-03 50.5 52 30 32 17 29 10 21 28.4 40.0 18.5 17 26.5 39 1 2 KGY10-04 36 54.5 66 31 41 22 1 4 3 8 KGY12-02 KGY12-03 53.5 55 31 33 17 12 22 45.4 57.4 20.9 17 28.5 1 2 KGY12-04 37 57.5 22 68 3 8 KGY16-03 26.5 38 20.9 34 25 81 (81) 113 (113) 65.5 112 16 22 1 2 KGY16-04 41 67 116 Reference dimensions after R(PT) thread

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

D-A3 D-G39 D-K39 D-A44 100 + 100 (n 2) (n = 2, 3, 4, 5 ) 35 + 30 (n 2) (n = 2, 3, 4, 5 ) 35 100 10 Mounting nut width across flats (mm) Bore size (mm) Mounting nut thread Tightening torque (Nm) n: Number of auto switches 20 25 32 40 45 M22 x 1.5 26 Theoretical Output 60 M24 x 1.5 32 85 M30 x 1.5 38 Unit (N) M33 x 1.5 41 110 1 3 7 Operating direction Operating pressure (MPa) Bore size (mm

High Power Cylinder Series RHC

47.3 M26 x 1.5 41 100 NT-10 3 High Power Cylinder Series RHC Construction (20 to 40) A A Parts list Section A enlarged view Description Material Note No.

Round Type Hydraulic Cylinder

Tightening torque (Nm) M22 x 1.5 Mounting nut width across flats (mm) Bore size (mm) Mounting nut thread 20 25 32 40 26 45 M24 x 1.5 32 60 M30 x 1.5 38 85 M33 x 1.5 41 110 2.

ZP

51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

RHC

Applicable bore (mm) C D d H Applicable bore (mm) C D d H 5 26 30 12.5 8 M8 x 1.25 15 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 32 36.9 16.5 8 M10 x 1.25 19.6 M24 x 1.5 32 17 25, 32 25 SOR-25 NT-03 8 38 43.9 21.0 9 M14 x 1.5 M30 x 1.5 25.4 38 22 40 32 SOR-32 NT-04 11 41 47.3 26 11 M18 x 1.5 31 M33 x 2.0 41 27 50, 63 40 SOR-40 NT-05 13 31 M22 x 1.5 37 32 80 NT-08 16 39 M26 x 1.5 47.3 41 100 NT-

C95

L3 d1 H9 MB1 Part no. d3 h KJ27D KJ36D KJ42D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 40 Refer to Page 6-16-1 for details on auto switches.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M 13 40.5 6 18.5 10 10 12.8 12.8 KB 8 A L 14 44.5 48.5 53.5 57 54 59.5 62.5 4.2 8 17 15.2 20.5 26 18 15.2 KR (R) Connection threads H 10 19 18.5 23 41 29 18.5 KA (R) 12 22 20.9 20.9 24 58 46 2 x Applicable tubing KQG2 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Profile Design ISO/VDMA Air Cylinder Series CP95

4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55 18 11 20 230 Mounting type ES Piston rod ball joint to DIN 648K Bore d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 18 20 11

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121

C76

XB XC + Stroke Rod clevis, Head clevis: C76C32, C75C40 XB XC + Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis, Head clevis AB 7 9 Bore CZ XB 47 57 XC AB 7 9 AO AU 14 20 LS LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66 80 W 34 40 XL 120 154 XS 48 60 12 0.032 0.059 NB TDe8 TZ 47.9 59.3 XB 47 57 XC CW 13 17 LT 4 5 CE CG 41

C76

XB XC + Stroke Rod clevis, Head clevis: C76C32, C75C40 XB XC + Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis, Head clevis AB 7 9 Bore AB 7 9 AO AU 14 20 LS LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66 80 W 34 40 XL 120 154 XS 48 60 12 0.032 0.059 NB TDe8 TZ 47.9 59.3 XB 47 57 XC CW 13 17 LT 4 5 CZ XB 47 57 XC CE CG 41

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Type 40/Type 41 How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 F N T A A A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 Note) If there are more than 6 stations

Air Pilot Operated Series NVSA

NVSA 41 1 4-'l 1 N b a NVSA 41 1 4-0ON vatle mount , on a #11 block. 't1 '12 = Mouoled on siacking manilotd block r,, NPT side ports (2) '14 = Mounled on stacking manifold block 7." NPT side & bottom pons (4) '16 = Mounted on stacking moLlnted block 7." NPT side (2) & bottom (5) ports To Order "Faclory Built" Valve/t anifotd Assmbty: EXAITPLE 1 Pce.