reduces flow setting time

9.3 19.2 47 (48) AS321FS-02-08 (S) 8 13.2 22.7 33 14.2 AS321FS-02-10 (S) 10 15.9 26.7 37 35.7 15.6 38 (39) AS321FS-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FS-03-06 (S) 6 1/4 19 16.6 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

24.7 47.3 17 28 AS331FSG1-02-06 (S) 6 8.2 16.5 29.9 17.5 40.1 13.3 1/4 17 (17.5) 12.9 13 49.7 48.3 44.2 42.8 24.5 19.2 ASV 49 AS331FSG1-02-08 (S) 8 13.2 37.1 23.5 59.9 14.2 50 AS331FSG1-02-10 (S) 10 15.9 17.4 23 41.2 26.1 62.5 15.6 53 AS331FSG1-02-12 (S) 12 18.5 42.5 28.3 64.7 17 55 AS331FSG1-03-06 (S) 6 11.2 12.9 16.6 20.2 36 21.4 57.8 13.3 AK 1/4 19 63.1 61.7 57.9 56.5 24.5 19.2 VCHC 41

Tie-rod Type Hydraulic Cylinder

9 23 20 28 17 13 M10 x 1.5 M16 x 1.5 25 22 73 17 35 53 20 26 3/8 30 18 112 43 63 21 55 16 8 27 22.4 30 17 13 M10 x 1.5 M18 x 1.5 28 25 80 17 40 60 22 26 3/8 30 20 116 47 80 26 65 M12 x 1.75 18 8 31 28 32 22 15 M22 x 1.5 32 29 100 20 45 75 26 30 1/2 35 22 127 57 100 34 80 M27 x 2 M12 x 1.75 20 6.5 35 35.5 35 27 16 38 34 118 19 50 90 27 32 1/2 35 24 137 66 125 34 80 M14 x 2 M27 x 2 22 6.5 41

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The

Vacuum Unit

(Ejector system) 41 A Vacuum Unit ZK2mA Series Electrical Wiring Specifications D-sub Connector Flat Ribbon Cable Connector Triangle mark indicator position Polarity Terminal Connector terminal no. Terminal number Polarity number Connector terminal no.

ZSE30A(F)/ISE30A

Note) When the display calibration function is used, the set pressure value may change 1 digit. 41 ZSE30A(F)/ISE30A Series The F in ( ) shows the function code number. Refer to the Operation Manual for the details of operation procedures and function codes.

NCA1

Location (X46US) . 22-23 Oversized Rod w/ Special Trunnion Location (XB5 X46US) . 24 Stainless Steel Tie Rods/Tie Rod Nuts (X130US) .. 25-31 Rod Boot . 32 Oversized Rod / Non-Rotating (XB5 / X119US) 33-36 Adjustable Stroke Extended (XC8) .. 37 Adjustable Stroke Return (XC9) . 38 Dual Operation Double Rod (XC10) . 39 Dual Operation Single Rod (XC11) .. 40 Special Rod End Modifications . 41

CRQ2

L L 13 16 22.5 24.5 28.5 Size Screw M4 M4 M6 M8 M8 10 15 20 30 40 11-8-8 9 Series CRQ2 Compact Rotary Actuator Rack & Pinion Style Proper Auto Switch Mounting Position at Rotation End Solid state switch Reed switch Rotating angle Size Operating angle ( m) Operating angle ( m) Hysteresis angle Hysteresis angle 75 (41) A 10.5 13.5 13.5 17.5 26 32 33 41 38 47.5 B 13 22.5 18 30.5 34.5 53.5 45

CE2

For details, refer to page 10-20-41. 5 6 6.5 6.5 7 Data 6 7 7.5 7.5 8 9 9 10 10 11 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

MVGQ

For details, refer to page 10-20-41. 10-16-20

C85

7 2C 2D e r t y u i Hard chrome plated Chromate Nickel plating (Switch type only) Nickel plating 6-11-41 41 Series C85R Dimensions [First angle projection] Double acting, Single rod Base mounting/C85RAF Y Without magnet, Built-in magnet (Band mounting type) 8 to 16 Stroke B XB G2 EE WH G1 EE SW 2-LD D D KK NA NA B LH K AM C N2 LX NA N1 NA S + Stroke H L ZZ + Stroke Head cover Y Head cover

CNG

A1 E1 L1 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 16 20 22 +0.4 +0.2 8 16 34 41 42 2 25, 32 40 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 8 10 10 21 11.5 25 30 30 20 34 41 42 8.5 M8 x 1.25 10.3 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 20 M10 x 1.25 25.6 14 M10 x 1.25 12.8 25, 32 40 10.5 16 +0.5 +0.3 18 M14 x 1.5 41.6

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Use the collision speed when calculating dynamic moment. 12 28 41 MXP16 26 Symbol Unit Definition Definition Symbol Symbol Unit mm An (n = 1 to 3) V Collision speed mm/s Correction values of moment center position distance J E Va Average speed Kinetic energy mm/s J Emax W Load weight Allowable kinetic energy kg mm Ln (n = 1 to 3) Wa Allowable load weight Overhang kg Nm M (Mp, My, Mr) We

Electromagnetic Digital Flow Switch

Apply a wrench Width across flats of attachment 3/8 24 mm 1/2 28 mm 3/4 35 mm 1 41 mm Moment load Turn the piping OK Flexible piping Vibration Refer to the tightening torque in the right table for connecting steel piping. Torque lower than the value in the table leads to fluid leakage. For mounting the fittings on the market, refer to the torque specified for each.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

, NPT1/41, G1/41, Rc1/8, URJ1/42, TSJ1/43 Copy function5, Auto-shift function5 Copy function, Auto-shift function 1 M5 female threaded 2 Face seal fitting 3 Compression fitting 4 1 output in SIO mode (NPN or PNP switching type) 5 This function is not provided with the IO-Link compatible type. 3-Screen Display High-Precision Digital Pressure Switch ZSE20B(F)/ISE20B Series How to Order p. 13

30

49.5 60 74.5 20 25, 32 40 50, 63 Semi-standard type Pneumatic: to 1 MPa (mm) Maximum thread depth P Allowable eccentricity U Maximum operating tensile and compressive force N Applicable cylinder bore size Model Nominal size Pitch Center of sphere R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41

1

Reduction of length when using JT and JCM Product length Reduction Max. 77 mm when using JT Overall Length Comparison JT Series Size JA + CM2 Series JT + JCM Series Reduction rate Workpiece 20 139.5 mm 90.2 mm 35% 32 149.0 mm 96.0 mm 36% 40 189.0 mm 112.0 mm 41% Cylinder (JCM) Weight Comparison JA Series Size JA + CM2 Series JT + JCM Series Reduction rate 20 190 g 102 g 46% Workpiece Cylinder

S Couplers

R 3/8 32.9 32.9 39.4 KKA4P-02M 17 R 1/4 28.3 36.2 42.2 -03M 1/4 R 3/8 18.9 6.9 26.4 36.6 36.7 43.2 T A -04M 22 R 1/2 65.9 38.2 46.2 KKA6P-03M R 3/8 60.3 40.6 47.1 24 -04M 1/2 R 1/2 20.4 10.0 54.2 69.2 39.9 47.9 -06M 30 R 3/4 119.0 40.4 49.9 KKA7P-04M R 1/2 173.9 58.1 66.3 32 -06M 3/4 R 3/4 27.6 13.5 99.6 209.6 59.9 69.4 L2 H -10M 36 R 1 275.0 59.5 69.9 L1 KKA8P-06M R 3/4 362.8 73.4 82.9 41

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The

Slider Type Ball Screw Drive/11-LEFS Series

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%