High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

MRQ

motion, Rotary motion/Specifications CRB1 Linear motion Bore size (mm) 32 40 Piston speed 50 to 500mm/s CRBU Cushion With air cushion, Without air cushion Port size Rc(PT)1/8 CRA1 Rotary motion Output torque (At 0.5 MPa) 1Nm 1.9Nm 0.2 to 1s/90 CRQ Stable rotation time regulation range Cushion MRQ Allowable kinetic energy 0.023J 0.028J Order Made P.1.5-18 to 1.5-19 Port size Rc (PT)1/8, M5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

Stroke (mm) Pulling force Bore size (mm) 40, 50, 63 80, 100 Thread size 3 10N M3 x 0.5 x 30l or more 3 24.5N M5 x 0.8 x 40lor more Remove the bolt for normal operation. It can cause lock malfunction or faulty release. Rubber cap wManual release lock type Push the M/O knob and turn it 90 counterclockwise.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Vibration, Noise L Model Screw size Max. tightening torque [Nm] A [mm] L [mm] LEJ40 M5 3.0 5.5 36.5 LEJ63 M6 5.2 6.8 49.5 Items for internal check 1. Lubricant condition on moving parts. For lubrication, use lithium grease No. 2. 2. Loose or mechanical play in fixed parts or fixing screws.

XLAQ/XLDQ

normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW) Body: Aluminum alloy, Bellows: Stainless steel 316L, Bellows holder: Stainless steel 304, FKM (Standard seal material) Note 2) Principal materials External: Hard anodized Internal: Raw material Surface treatment 0.4 to 0.7 Pilot pressure (MPa) (G) Pilot port size M5

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2 3 4.5 2 0.59 1.2 2.4 0.59 1.2 1.5 0.6 0.2 1.5 0.6 1.5 3.0

VFA3000

x M5 x 0.8 (Breathing port) 5 x , 14 38 (Piping port) 1769 Series VFA5000 Dimensions: Base Mounted 2 position single: VFA514402 03 04 2 x 5.3 (6.5) M5 x 0.8 (Pilot port) (Mounting hole) (Breathing port) Max. 2 5 x , , 38 14 12 (Piping port) ( ): Value for Rc 1/2 2 position double: VFA524402 03 04 2 x 5.3 (6.5) 2 x M5 x 0.8 (Mounting hole) (Breathing port) 2 x 18 (Pilot port) Max. 2 Max. 2

Check Valve Series AK 1

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

ASD

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

XLDV Series

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

ML1C

Range (mm) No. of auto switches mounted Applicable auto switch Bore size (mm) 25 6 4 D-M5, D-M5W, D-M5T D-E7A, D-E80A Auto switch model 40 6 4 D-M5, M5W, M5T D-E7A, E80A 32 6 4 10 15 5 10 1 pc. 2 pcs.

PSE530

M5 x 0.8 male thread R06 R07 1/4 inch reducer type Port size 6 reducer type Pressure sensor: Silicon, O-ring: NBR Wetted parts material Body: Stainless steel 304 Body: PBT 41 g 38 g With sensor cable (3 m) Without sensor cable Mass 7 g 3.8 g 829

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators Size: 50 Single shaft Double shaft 8 x M8 x 1.25 depth 8 (Opposite side 4 locations) 118 44 62 4 x 9 (Mounting hole) 48 20 15 11 0 0.2 15 (g6) 14 0 0.2 25 (h9) 17 M5 x 0.8 (Vacuum suction port) 15 (g6) 25 5 Auto switch 2 x Cushion valve (Width across flats 3) 9.5 9.5 0 0.030 5 36 2.5 98 7.5 6 7.5 6 108 5 33 14.5 41 A port 2 x Rc1/8 B port 8.5

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

IR1000/2000/3000

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) IR3000-03 IR3000-03 IR3000-03 Conditions: Supply pressure 0.5MPa Conditions: Back pressure 0.5MPa 0.204 0.5 0.2 Set pressure P2 MPa Set pressure MPa Set pressure MPa 0.202 0.4 Setting point 0.15 0.200 0.3 0.1 0.198 0.2 0.196 0.05 0.1 0.194 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500 3000

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

6 M5 type U10/32 type M5 type U10/32 type e !0 i t NBR, Stainless steel !1 !6 w y Gasket M5 type only !7 r Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) AS231FM type is made of steel. Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM.