Rotary Cylinder Series MRQ Size: 32, 40 1

2 !3 !4 !5 !6 !7 !8 !

High Pressure Coolant Valve

mounting Same as back side 8 locations J B G Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P O A F D Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2

Compact Cylinder with Lock Series CLQ

state switch J79C Connector M9NW M9PW M9BW M9NA M9PA M9BA M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) Relay, PLC Yes Yes Yes Yes None None 24 V 2-wire 3-wire (NPN) 3-wire (PNP) Grommet IC circuit Water resistant (2-color indication) 2-wire 4-wire F79F P4DW IC circuit With diagnostic output (2-color indication) 5

V100

List part numbers of the installed valve and option in required station location separately under manifold part number. 4-2-7 8 Series V100 Common SUP/Common EXH Type S41 How to Order Applicable solenoid valve Note) VV100 S41 05 M5 V114V114AV124V124AStations 2 port size 02 M5 M5 x 0.8 2 stations 2 Applicable blank plate assembly V100-77-1A 1 20 20 stations 3 2 1 port M5 x 0.8 3 port M5 x

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

M3 4 M3 4 3 90 2 AS-10AB 5 135 2 AS-11AB 7 180 2 AS-12AB 9 220 2 AS-13AB Ex.) AS2002FS-06 When connecting 4 pcs. and mounting L-brackets on both sides AS-20A Speed controller AS2002FS-06 4 pcs. 3 111 2 L-bracket AS-20L 2 pcs.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 No. No.

SI unit for DeviceNet TM

Class attribute ID Access rule Description Value 1 Get revision 2 3-2. Class common service Service code Description 0Eh Get_Attribute_Single -23No.EX-OME0015-F 3-3.

MRQ

CRB1 CRBU CRA1 CRQ 1=m 2 r 2 2 1 2 2 1=m1 +m2 3 a 3 a MRQ uSphere wThin rod MSQ Position of rotation axis: Perpendicular to the rod and passes through the center of gravity. Position of rotation axis: Sphere centered about axis of rotation. MSUB 1=m 12 a 2 1=m 5 2r 2 eThin rectangle board (Parallelogram) iDisc Position of rotation axis: Disc centered about axis of rotation.

VPA4

1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm M4:

CLQ

2-wire A93 A93V 12 V 24 V A73C A79W Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) M9N M9NV F79 F7NV IC circuit 5 V, 12 V Grommet M9P M9PV F7PV F7P M9B M9BV F7BV J79C J79 12 V 2-wire Connector Solid state switch 3-wire (NPN) 3-wire (PNP) F9NW F9NWV F7NWV F79W 24 V IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V F9PW F9PWV

VK3000

VK300-82-2-01 VK300-82-2-03 110 VAC 110V 200 VAC 200V VK300-82-2-02 VK300-82-2-04 220 VAC 220V VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD 3-2-11

SJ1000/2000/3000 Series

When Using a 4 Port Valve as a 3 Port Valve Caution When using a 4 port valve as a 3 port valve The SJ1000/2000/3000 series can be used as normally closed (N.C.) or normally open (N.O.) 3 port valves by plugging one of the cylinder ports 4(A) or 2(B). However, exhaust ports should be left open. It is convenient when a double solenoid 3 port valve is required.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Indicate part numbers of valve and option beneath the manifold part no. 643 A Manifold specifications 10-V100 Common SUP / Common EXH S41 type How to Order Applicable solenoid valve Note) VV100 S41 05 10 M5 10-V11410-V114A10-V12410-V124AApplicable blanking plate assembly V100-77-1A Stations 2 stations 2 port size M5 M5 x 0.8 Clean series 02 2 1 20 20 stations 3 2 Port 1 M5 x 0.8 Port 3

LX Series Compact Electric Actuators

Set bank 1 input on,2 & 3 off. 2. Set point A input on. 3. Busy output is on while actuator moves. 4. Busy output turns off; point A output turns on. 5. Set point A input otf, and point A output turns otf. 5 First work piece is inspected. 6 Move from present position to next piece (incremeni + 1,000 pursesl. 1. Set bank 1 input on, 2 & 3 off. 2. Sei ooinl B inout on. 3.

VK3000

VK300-82-2-01 100 VAC V100 VK300-82-2-03 110V 110 VAC 200 VAC 220 VAC VK300-82-2-02 200V VK300-82-2-04 220V S070 240V 6V 12V 24VD 48VD 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 DIN terminal VQD VQD-V Light (Built-in connector) Marking Circuit with light AC Circuit diagram 12 VDC or less Circuit diagram 24 VDC or more Circuit

EXxx-OMK0006

Register Error register Manufacturer specific Error Field When Self-diagnosis Error occurs, the SI unit puts the error result in bytes 2 and bytes 3 of the Emergency Object and sends to master.

Process Pump

This may cause internal damage to the process pump or liquid leakage. 10 Specifications Model PA3310 PAP3310 Actuation Automatically operated Rc, NPT, G, NPTF 3/8" Female thread Main fluid suction discharge port Rc, NPT, G, NPTF 3/8" 3/8", 1/2" Tube extension Female thread With nut (size 3, 4, 5) 3/8", 1/2" Integrated fitting type Port size Pilot air supply/exhaust port Rc, NPT, G, NPTF 1

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree