SMC Corporation of America
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3 LMD1-4 LMD1-5 LMD1-6 n 3 6 9 12 15 18 L1 4 x 5.5 3 x Rc1/8 n = Rc 1/8 LMD2 n: Stations L1 25.5 44.5 63.5 82.5 101.5 120.5 L 38 57 76 95 114 133 Model LMD2-1 LMD2-2 LMD2-3 LMD2-4 LMD2-5 LMD2-6 n 2 4 6 8 10 12 2 x 6.5 n x Rc1/8 2 x 6.5 2 x Rc1/8 L1 1067

Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 31/2, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Standing Style/Model Model AMD1000 Rated flow (l/min(ANR)) 8000 AMD800 24000 AMD900 40 Port size (Nominal size B) 2B Flange 2B

Compact Hydraulic Cylinder Double Acting/Double Rod Series CHQWB 20, 32, 40, 50, 63, 80, 100 3.5MPa How to Order B B 50 30 D CHQ CHDQ 50 30 A72 D W W With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc. "n" pcs.

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VT315**-OMH0005-A / / / / 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) * * * *3) 3) 3) 3) 1 1 1 1 1 1 1 1 () 3 VT315**-OMH0005-A VT315 Series VT315 Series VT315 Series VT315 Series 3 3 3 3 / / / / / / / / 3 () C-R ( )C-R DC 5% () () () ( ( ( ( ) ) ) ) () AC 15% (SSR (SSR (SSR (SSR ) ) ) ) AC AC AC

m 4 m 6 m 13 m Filtration efficiency 99% FQ1 HEPO 2 FGH100 to 300 FN The membrane element cannot be selected for FGH100.

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

t{cRBl0w20 NCRBl0W30 * c it E F .E lE 6 IE 1 2 3 4 5 6 7 8 X 10.61.21.8 2.4 3.0 3.6 5.2 4.4 XlO-41 o.a 1.2 1.6 2.O 2.4 2.4 Moment ol Inertie (ln-lbs-s2) | | : tndica's nomenl ot jrertja $,hen usiDg an intrnsl rubtr bumpr : No inlernel rubbr bumper ... : llse of an intemal rubber bumper (llsing al end ot rolation) (Wth auto switch) Nole: No ifitrnal bumpr is usd on NCRA1BWTo.

06 10 14 B 3 4 1B 1 8 Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 4 B 1 B 1 2 20 2B IN-OUT reversal direction -T Element service indicator Option HA AT ID AMG AFF AM Misc. 14-20-31 3 Series AMH Flow Characteristics/Select the model taking the max. flow capacity into Element oil saturation Initial condition Note) Compressed air over max. flow line in the table below may not meet the specifications

U A B B A D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U SMC SMC Approx. U B A B A Approx. U D-A73C D-A80C D-J79C D-A7*C,D-A80C Approx. U Approx. U D-A7*C,D-A80C A B A B Approx.

t{cRBl0w20 NCRBl0W30 * c it E F .E lE 6 IE 1 2 3 4 5 6 7 8 X 10.61.21.8 2.4 3.0 3.6 5.2 4.4 XlO-41 o.a 1.2 1.6 2.O 2.4 2.4 Moment ol Inertie (ln-lbs-s2) | | : tndica's nomenl ot jrertja $,hen usiDg an intrnsl rubtr bumpr : No inlernel rubbr bumper ... : llse of an intemal rubber bumper (llsing al end ot rolation) (Wth auto switch) Nole: No ifitrnal bumpr is usd on NCRA1BWTo.

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 11 12 Vacuum suction type Relief type (with specially treated sliding parts) CXSJM, CXSJL CXSJL CXS 6 50 J 11 L M9B S 21 CXS L J 6 50 M9B S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !0, !2, !3, !6, !7, !8, !9 IL220 KT-IL220 Set of left nos. u, i, !1, !2, !4, !5, !

of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: 2) : 1. 2. 3. 1. 2. 3. 4

Burst Pressure Characteristic Curve and Operating Pressure 7 How to Order 6 TUH0604 B 20 5 Burst pressure MPa Bundle length 4 Tubing Model Length 20m bundle 100m bundle Symbol 20 100 3 2 Color Color Black White Blue Translucent Maximum operating pressure Symbol B W BU N 1 0 -20 0 20 Operating temperature C 40 60 F = (1.8 x C) + 32 1MPa = 145 psi 3 Series TUH Safety Instructions Safety Instructions

Solenoid valve EXH 12 114 Rc(PT) 1/2 35.7 Exhaust port OUT 2 SUP (1) OUT (2) EXH (3) 22 8 25 Flat bracket P3020114 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 m36 Port size 4-M5 X 0.8 thread depth 6mm through Mounting hole G OUT 2 30 25 22 R3.5 15 25 m36 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 (7) 36 SUP port, OUT port 1.12-8 Series ITV2000/3000 Made to Order Specifications

hole 3-7 Mounting hole 5-3-32 3 4/5 Port Air Operated Valve Series VSA430 Model Valve model Body size Function Flow characteristics P A/B C[dm3/(sbar)] 6.4 8.7 9.2 6.4 8.7 9.2 6.2 8.1 10 6.6 8.9 11 Port size Rc 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 Note) Weight (kg) A/B EA/EB Pilot port size SA C[dm3/(sbar)] 6.3 8.2 9.6 6.3 8.2 9.6 5.8 7.5 9.5 5.5 6.7 9.4 b 0.16 0.28 0.14 0.16

Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Air cushion 2-8. Control direction 2-9.Mounting brackets 2-10.Auto switches 3. Maintenance P17 3-1. Checks 3-2. Replacement of seals 3-3. Consumable parts 3-4. Troubleshooting 4.

3 x 7.2 (= 21.6) 8-M3 OUT2 NC Sensor 36 +0.5 0 8 Load 6.4 4 OUT1 Black 7 3 Load 1 2 3 4 Brown + 6 2 +0.5 0 Blue 19.4 5 1 12 to 24 VDC Series PF2D5 5 6 7 8 PF2D301-A(-M) Do not connect the white wire of the sensor to c of the display unit.

cylinder Series M(D)U Technical Data Standard 2.4-2 20-MU SMUl 2.4-6 Double rod 20-MUW Precision cylinder Series MTS 4.11-6 Standard MTS SMTSl 4.11-6 With end lock MTSR 5.5-3 Copper-free Actuators SMC Actuator 6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Air Cylinder Series Application Bore size (mm) Name of CAD file Page in Vol.2 Standard Copper-free 6 8 12 (10)