Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: 4x10, Flat, Pad Styles: Flat Style, Material: Conductive NBR, Vacuum Entry: Male Thread M5X0.8

Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø4, Pad Styles: Flat Style, Material: Fluoro Rubber, Vacuum Entry: Male Thread M5X0.8

Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø10, Pad Styles: Flat Style, Material: Urethane Rubber, Vacuum Entry: Male Thread M5X0.8

Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø4, Pad Styles: Flat Style, Material: Silicon Rubber, Vacuum Entry: Male Thread M5X0.8

Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø8, Pad Styles: Flat Style, Material: Fluoro Rubber, Vacuum Entry: Male Thread M5X0.8

Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø10, Pad Styles: Flat w/Ribs, Material: Silicon Rubber, Vacuum Entry: Male Thread M5X0.8

Cooling Capacity: 510 W, Power Supply: 100 to 240 VAC, Pipe Thread: -, Feet: -, Flow switch: -, High-pressure pump: -

Cooling Capacity: 400 W, Power Supply: 100 to 240 VAC, Pipe Thread: -, Feet: -, Flow switch: -, High-pressure pump: -

Cooling Capacity: 200 W, Power Supply: 100 to 240 VAC, Pipe Thread: -, Feet: -, Flow switch: -, High-pressure pump: -

Cooling Capacity: 800 W, Power Supply: 100 to 240 VAC, Pipe Thread: -, Feet: -, Flow switch: -, High-pressure pump: -

Pad Diameter: ø16, Pad Styles: Flat Style, Material: Conductive NBR, Vacuum Entry: Male Thread M5X0.8

Pad Diameter: ø13, Pad Styles: Compact, Material: Conductive NBR, Vacuum Entry: Male Thread M5X0.8

CG5-S

8 -04 R 1/2 -04 R 1/2 Straight Union KGH KGLU12-02 R 1/4 12 -03 R 3/8 -04 R 1/2 Applicable tubing O.D.

Modular F.R.L. Unit

) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02

VFS

03 04 q Description No.

Air Fittings & Tubing

Thread R(PT) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 64 65.5 67.5 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 8 4 KM14-04-08-01S-3 30 38 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

V

04 4mm 06 6mm Imperial 00 Built-in Silencer 07 1/4 Models O.D size d D1 D2 L1 L2 L3 L4 M1 Weight AQ240F-04-04 4 9.5 8.9 39.3 5 13.7 23.4 13 5.7 AQ240F-06-06 6 11.5 11 43.9 6 14.7 26.5 14 7.3 AQ340F-06-06 6 11.5 11 45.2 6.3 19.6 31.7 14 12.5 Courtesy of Steven Engineering, Inc. !

Flow Control Equipment

AS43l1F-04 R(PT)1/2 Note 1) Only elbow style.

Speed Controller with One-touch Fitting

-04 1/2 Note 3) Note 1) Without sealant type can be selected as a standard option.