Vacuum Saving Valve

size Symbol Thread size 0.5 0.3 0.7 1.0 B5 B6 B01 BG1 BN1 M5 No.0.8 M6 Rc1/8 Female thread G1/8 NPT1/8 Pad side Specifications Connection thread size for the pad M5, M6 M8, R1/8, G1/8, NPT1/8 Fixed orifice size (mm) 0.3 0.5 0.7 0.5 0.7 1.0 Fluid Air Max. operating pressure range (MPa) 0 to 0.7 Max. operating vacuum pressure range (kPa) 0 to 100 Ambient and fluid temperature (C) 5 to 60

HRX-OM-X037

Indication Item Setting and selection Setting range [High] Set the temperature range of the circulating fluid SP. +0.1 C to +10.0 C +1.0 C Upper/lower temperature limit (1) High/ Low [Low] Set the temperature range of the circulating fluid SP. -0.1 C to -10.0 C -1.0 C TEMP READY signal is output when the set time has passed after the circulating fluid temperature rises/drops within the

Vacuum Gripper

ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13

Vacuum Gripper

ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

ZP

125 ZP125H 128 C 80 104 13-11-81 Series ZPT/ZPX Vacuum Pad: Large Size Bellows Type Vertical Vacuum Entry with Buffer Construction Series ZPT Series ZPX y o t y o ZX Component Parts r e i No.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

High Vacuum L Type Valve

E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87

Pressure Sensor

-100 kPa 100 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OMG0004-D Dimensions PSE54(A)M3 M5 PSE54(A)-M3 PSE54(A)-M5 A 10.8 11.5 B 3 3.5 PSE54(A)01 N01 PSE54(A)R04 R06 PSE54(A)-R04 PSE54(A)-R06 A 4 6 B 18 20 PSE54(A)-IM5 PSE54(A)-IM5H -14No.PS-OMG0004-D Revision history A: For B: Complete revision C: Limited warranty and Disclaimer and measurement laws are added.

LEF-OM006xx

* LECA6 LECA6 PNP PNP 3 00 mm 300 300 AP * AP * 2000 2000 2000 mm B 8m 8 8 B 10m 1.5 m 1 1 A A 15m m 3m 3 3m 3 B B 20m 5 5m 5 C C 5m 3 00 3 00 500 500 600 600 7 00 7 00 800 800 900 900 1000 1000 1 2 00 1 2 00 1500 1500 1800 1800 2000 2000 LEFB16 LEFB16 LEFB25 LEFB25 () R R LEFB32 LEFB32 S S / P.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14

XLA- ∗ -F7NJ ∗ - ∗ Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Auto switch mounting bracket For the auto switch D-F7NJ*, the mounting bracket XLA25-100 is used. 3.

KQ-OMS0022

B: Compliance Requirements: Caution added -Connection thread: R and NPT Changed notation of tightening method.

VER2000/4000

6 q w e r t y u i Block packing !

CJ2

A1 L1 MM NX NDH10 R1 U1 Dd9 d L m t l 3 15.2 12.2 CD-J010 10 1.2 0.3 Type C 3.2 3.3 0.030 0.060 CM2 10 4.8 22.7 18.3 CD-Z015 16 I-J010B 10 CD-J010 1.5 0.7 Type C 5 8 21 M4 x 0.7 3 15.2 12.2 1.2 0.3 Type C 3.2 5.3 3.3 3.3 +0.048 0 0.030 0.060 0.030 0.060 3.1 8 9 CD-JA010 16 3 18.2 15.2 10 I-J016B 16 IY-J015 1.2 0.3 Type C 3.2 8 25 M5 x 0.8 4.8 16.6 12.2 1.5 0.7 Type C 5 3.3 5.3 5.3 +0.048

HRX-OM-X071

TEMP READY function setting example [1] Circulating fluid temperature at start of operation: about 20 C [2] Circulating fluid setting temperature: 15 C [3] "TEMP READY Bandwidth (Upper Limit)": Set to "2.0 C". [4] "TEMP READY Bandwidth (Lower Limit)": Set to "-2.0 C". [5] "TEMP READY stabilization time": set to "60 sec". [6] "TEMP READY monitoring start time": set to "30 sec". [7] "Time

MHx-OMY0005

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

Model Selection 1

M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

Rotary Actuator

Basic inertia moment 2 r m I m : Weight of load (kg) r : Load center of gravity and distance of rotation axis. (m) r m Fig. (10) Inertia moment This shows inertia moment of m (weight) at r from the rotation axis. Calculation of inertia moment depends on the shape of the object.

SYJ Series

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the passing leakage voltage through the C-R circuit. The suppressor residual leakage voltage should be as follows. Design / Selection 1.