VFRA3000, 4000 Series

No.VFR3000-OMH0005-B 5 Port Air Operated Valve PRODUCT NAME VFRA3000, 4000 Series MODEL/ Series Contents Safety Instructions -2, 3 Precautions on Design -4 Selection -4 Mounting -5 Piping -5 Lubrication -6 Air Supply -6 Operating Environment -7 Maintenance -7 Specific Product Precautions -8, 9 Trouble shooting -10 Remedy -10 -1VFR3000-OMH0005-B Safety Instructions These safety instructions

VFR3000-OMY0001

-2No.VFR3000-OMY0001 / 1 1.5 *3) *3)1 1 () No.VFR3000-OMY0001 -3- VFRA30004000 5 / () () () () -10 3 3 EXH (VVFS3000-R-03-1,2 VVFS4000-R-04-1,2) () () 3 , 4 VFR3000-OMY0001 VFRA3000,4000 5 1) 2) 1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 1 1) M5 1/61/4 11.5Nm ) 2) Rc Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMY0001 VFRA3000,4000 5 () () 5 3 30 ( ) 1 ()ISO

VEX-OMV0001

) (11) (22) (12) (13) (14) (15) 10 VEX-OMV0001 P2 (22) (16) (12) (22) (17) () (18) (19) 3(R) (3) (6) (4) (20) 2(A) (22) (21) 11 VEX-OMV0001 No

Exhaust Cleaner for Clean Rooms AMP Series

10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 6 (Nylon Bowl), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 8 (Metal Bowl w/Level Gauge), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 25, 30, 40), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: JN (J + N), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: N (Non-Relieving Exhaust Mechanism), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: Standard, Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: Standard, Semi-Standard 2: W (Drain Cock w/Barb Fitting for ø6 x ø4 Nylon Tube)

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: R (Flow Direction: Right to Left)

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Body Size: 6 (1/2 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 04 (1/2), Applicable Tube OD: 10 (Ø10 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 6 (1/2 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 04 (1/2), Applicable Tube OD: 10 (Ø10 mm), Sealant: S (Sealant)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: 3 (270°), Thread: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 04 (ø4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 2 (90°), Thread: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 04 (ø4)