03-mk-e

2 13 !4 @2 @3 @4 Hexagon socket head set screw Chromium molybdenum steel Sharp end section: 90 Set of left nos. @2, @3, @4 CQSB16-PS Guide pin Stainless steel Nitriding MK20Z-PS O-ring NBR MK25Z-PS Round R-type retaining ring Carbon tool steel Except 12, 16 MK32Z-PS Set of left nos. !

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

ZS-32-A Length: 2 m (With rubber cover) Note Lead wire with connector Mist separator regulator AWM20/AWM30/AWM40 For ISE35--A (AR/AW series) Mounting thread (M3 x 7L, 2 pcs.), adapter, lock pin, O-ring are attached ZS-32-C Mounting option Micro mist separator regulator AWD20/AWD30/AWD40 For ISE35--B (ARM10/11 series) Mounting thread (M3 x 13, 2 pcs.), adapter, lock pin, O-ring are attached

Ionizer Nozzle type IZN10 Series IZS

When using piping materials prepared by the customer, secure a sectional area of a 4 mm inside diameter (approx. 13 mm3 or more) for the air passage of the piping, and if using tubing, ensure a minimum bending radius.

Soft Start-up Valve

The surface may become hot depending on the energized condition; therefore, do not touch the solenoid valves. 13 A AV2000-A/3000-A/4000-A/5000-A Series Specific Product Precautions 5 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Peltier-type Chiller Thermo-con/ Compact Type

When the fluid level goes below the Low level, ERR20 (Low fluid level alarm) will be triggered. 13 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

The maximum piston speed for retraction is approximately 70% that of extension. 848 Dual Rod Cylinder/Compact Type CXSJ 2122CXSJ/ 1112Auto Switch Proper Mounting Positions (Detection at Stroke End) CXSJ6 / CXSJ6 11122122D B (mm) D-M9 23 (24) 2 (1) 13 (11.5) 8 (9) D-A93 19 (20) 14.5 (15.5) 6.5 (7.5) Symbol A B C D Note 1) A C Note 1) The above mentioned values are indicated as a guide for

Series 10-, 21- AW-B Filter Regulator

241.1 91.4 Dimensions B B B B Standard specifications Model Optional specifications Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20-B 10-/21-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

44 98 96 6.3 5 16 18 M8 x 1.25 x 23 L and M8 x 1.25 2 x M6 x 1 (Through-hole) 2 x M5 x 0.8 thread depth 8 (Hexagon bolt) (Hexagon nut) M8 x 1.25 x 16 L (Hexagon socket head cap screw) 8 x M5 x 0.8 thread depth 7.5 (Opposite side: Same) 2 x M5 x 0.8 thread depth 4.5 Note) (Z) 30 (Opposite side: Same) 11.5 19 9 20 4 x (Rc, NPT, G) 1/8 thread depth 6.5 (Piping port), (Opposite side: Same) 13

Environment

kg] Lead 4: LEY32C 60 Lead 8: LEY32B 30 Motorless 50 Lead 8: LEY32B 22 40 20 LAT 30 Lead 16: LEY32A 11 20 10 LZ Lead 16: LEY32A 10 0 0 LC3F2 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY40m LEY40m 100 60 Lead 4: LEY40C 53 Horizontal work load [kg] 80 Vertical work load [kg] 40 Lead 4: LEY40C 60 Lead 8: LEY40B Lead 8: LEY40B 27 40 20 30 Lead 16: LEY40A 13

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

24.5 7 46 5.5 19.8 28 38 79.2 Manual override Insulation: Black () 14.7 B 13.6 40 A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14) 1.2 (52) (2 x 4.2 Mounting holes) 44 (For E type) (49.5) 0.3 mm2 (42.5) 40 40 14.7 125 (39.4) 123.3 L (Lead wire length) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} 39.4 0.9 18 2 1.2 (23.9) EB P EA 39.5 13

Series AP500

Vespel is a registered trademark of DuPont. 13 Delivery of sub-atmospheric pressure Single Stage Regulator for Ultra High Purity Series AP1100 For UHP gas delivery Sub-atmospheric to low positive pressure delivery Flow capacity : to 0.5 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AP11 S FV4 FV4 01 2PW

Miniature Regulator

0.6 0.7 0.8 0.9 ITV Inlet pressure (MPa) IC Construction ITVH ARJ310-01 ARJ310F-01 ITVX 6 17 3 PVQ 8 11 VY1 15 1 VBA VBAT 7 9 AP100 Material Note Component Parts 14 4 Description Body Valve guide Bonnet Piston Valve Adjusting screw Panel nut Hexagon nut Adjusting spring Valve spring Spring holder Mini Y-seal O-ring Lock washer Bracket Pressure gauge Cassette No. 1 2 3 4 5 6 7 8 9 10 11 12 13

Manifold Regulator Modular Type ARM2500/3000 Series

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

Please contact us for the latest version.sales@ocaire.com, 25MM MXS CLEAN ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, I5, 25MM MXS CLEAN ROOM, 5.70051 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS252337.527.517.517.520.536.552.585.5100.535.5(33)25.5(23)15.5(13)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8

)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8

)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8

SI unit for EtherNet/IP TM

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

EXxx-OMS0026CN

SI PWR(V)_LED DC24 V+10/-5 SI SI SI EX600-SEN3 (PNP ) 13 EX600-SEN4 (NPN ) SI SI -39No.EX-OMS0026CN No. (PNPNPN) SI PWR_LED DC24 V10% 14 (PNPNPN) SI PWR(V_LED DC24 V+10/-5 PLC -40No.EX-OMS0026CN No. SI PWR_LED DC24 V10% 15 SI PWR(V)_LED DC24 V+10/-5 PLC -41No.EX-OMS0026CN TM Web EX600 /EtherNet/IP SI No.

EX600-WEN_WSV.eng

W-MS Vollsveien 13 C, Granfos Nringspark N-1366 Lysaker, Norway POLAND (48) 22 211 96 00 Step 2 Setting / installation of the wireless unit Troubleshooting ul. Poloneza 89, 02-826 Warszawa, Poland Red LED is ON. Non-restorable error is detected. (e.g. Hardware failure) (1) Set the number of occupied I/O points for the module and each parameter of the "remote".

EXxx-OMV0028.eng

(Pairing) Vollsveien 13 C, Granfos Nringspark N-1366 Lysaker, Norway Red/Green Orange LED is ON. Forced output mode. POLAND (48) 22 211 96 00 Step 2 Setting / installation of the wireless unit OFF Remote is not registered. ul. Poloneza 89, 02-826 Warszawa, Poland Troubleshooting Green LED is ON.