Size, Body, Valve Type: 30A (Size: 3; Body Mat'l: Aluminum; Port Size: 1/4; Orifice Dia: 5, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2A (24VDC; DIN Terminal w/Surge Voltage Suppressor & Light), Other Options: L (Low Concentration Ozone Resistant, FKM Seal, Oil-free, NPT Thread)

Body Size: 30A, Thread: N (NPT), Port Size: 03 (3/8), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 30A, Thread: N (NPT), Port Size: 03 (3/8), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: NRZ (N + R + Z)

Body Size: 30A, Thread: N (NPT), Port Size: 03 (3/8), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: SV (S + V), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 30A, Thread: N (NPT), Port Size: 03 (3/8), Option: M (Round Type Pressure Gauge w/Color Zone), Attachment: S (Pressure Switch), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: Standard, Attachment: Standard, Semi-Standard 1: 3 (Lubricator w/Drain Cock, Exhaust Port), Semi-Standard 2: Standard

Body Size: 30A, Thread: N (NPT), Port Size: 02 (1/4), Option: DG (D + G), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: D (N.O. Float Type Auto Drain), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: CG (C + G), Attachment: Standard, Semi-Standard 1: 3 (Lubricator w/Drain Cock, Exhaust Port), Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: C (N.C. Float Type Auto Drain), Attachment: Standard, Semi-Standard 1: 3 (Lubricator w/Drain Cock, Exhaust Port), Semi-Standard 2: R (Flow Direction: Right to Left)

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, SLIDE TABLE, STROKE ADJ, ACTUATOR, MXS/MXJ GUIDED CYLINDER, HE, 20MM MXS DBL-ACT AUTO-SW, 2.86600 lb, ModelStandard stroke (mm)Additional mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 6MM MXJ/MXS CLEAN-ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, C5, 6MM MXJ/MXS CLEAN-ROOM, 0.34105 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS65.95.65.65.617.623.6????3.6(1.1)3.6(1.1)3.6(1.1)15.6(13.1)21.6(19.1)????4.5

Table of Contents

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

2

) v Note 13) v Note 13) v Note 13) v Note 13) v Note 13) Note 1) Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

ZP

-11-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.