VHK

B L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 Q L2 M1 Model 1(P)2(A) 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 11 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-M5-06F VHKl-M5-04F 18 41 16.5 3.5 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-01S-06F VHKl-01S-04F 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 1 8 8 VHKl-01S-08F 62.2

VHS

Filtration rating has to be 5m or smaller. 3(R) Model VHS2500 VHS3500 VHS4500 VHS5500 A 60 78 85 136 B 20 29 32 56 C 12.8 12.8 12.6 32 D 40 53 70 90 E 44 53 64 80 F 33 42 49 65 G 28 29 36 54 H 7.5 7.5 10 10 3.6-18

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Station Dimensions n L 11 12 13 14 15 16 17 18 19 28 20 39 31 50 42 61 53

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

M5 thread) VV5QZ12lll VQZ1l20 VQZ1l21 addition Rc(PT) 1/8 Top VQZ1000 2 to 20 stations per 1 station: 18 SY 2 stations: 86 C4(4) C6(6) M5(M5 thread) VQZ2l20 VQZ2l21 addition Rc(PT) 1/8 Top VQZ2000 2 to 20 stations SYJ VV5QZ22lll per 1 station: 26 SX 2 stations: 181 C6(6) C8(8) C10(10) Rc(PT)1/4 VQZ3l20 VQZ3l21 addition Rc(PT) 1/4 Top VQZ3000 2 to 20 stations VK VV5QZ32lll per 1 station: 53

Air Suction Filter With One-touch Fittings Series ZFB 1

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size Collar part arrow ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 8.5 14.4 15.5 50 15 17.5 24 12.5 22.5 53 26 48 Metric size Inch size 15.2 6 8 Transparent cover 9.5 16.6 17.5 61 16 19.5 27 13.5 24.5 65 28 52 57 8 10 18.5 11 18 21.5 65 17 21 29.5 14.5 27 69.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201

ZX

Filter unit (F) ZX100-K8-F 1 41 51 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 8.8 4.8 1 10 19 Filter unit (Mounting hole) 13-2-53 53 Series ZX Vacuum Pump System/Manifold Specifications Function Max. number of units 8 units Vacuum supply from PV port of the manifold is common supply. Air supply from PS port is common supply.

%silltr

Cyl.Dia Mass (kg) T 60" 45' 30' e u 0.01 po.2 p 0.01 It 0.2 p 0.01 p 0.2 tr 0,01 It 0.2 25 100 50 25 12.5 51.8 (87.2) 80 40 20 1 0 32 180 90 45 22.5 54.9 (s5.6) 47.8 53 78.4 39.2 4 2.2 '| .

Air Pilot Operated

NPTF Botrom (5} 53 sPA 0114 li" NPTF Bottom (5) 54 SPA 01]5 {' NPTF Side {b) 55 DIFECTIONAL AIR VALVE DIMENSIONS PARTS LIST SERIES NVSA 4E14 NVSA 4114 DETAIL REF. DESCRIP'ION }IATERIAL PART I{O. Body Alum. O-C. SDrino . Reluh AXT 333-3 3 Spring S6at AXT 333 4 End CaD w/(4) Screws Alum. D.C. E C 0 1 1 1 1 5 End Cag Alum. D.C. Scr6ws End Cap (4) 7 Spool & Sleeve Ass'y. 440F. S.S.

Title not found

69 0.0292 .75mm 0.0295 68 0.0310 1/32 0.0312 .8mm 0.0315 67 0.0320 66 0.0330 .85mm 0.0335 65 0.0350 .9mm 0.0354 64 0.0360 63 0.0370 .95mm 0.0374 62 0.0380 61 0.0390 1mm 0.0394 60 0.0400 59 0.0410 1.05 0.0413 58 0.0420 57 0.0430 1.1mm 0.0433 1.15mm 0.0453 56 0.0465 3/64 0.0469 1.2mm 0.0472 1.25mm 0.0492 1.3mm 0.0512 55 0.0520 1.35mm 0.0531 54 0.0550 1.4mm 0.0551 1.45mm 0.0571 1.5mm 0.0591 53

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Analog voltage 1 to 5 V Analog voltage 1 to 5 V Or IO-Link hub (Commercially available) Process Data Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH11 measured value: 16-bit signed integer Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Measurement data of sensors for 4 channels are combined and cyclically sent as a process data.

Heavy Duty Stopper Cylinder

-C) Head side pressure port (When piping on flange side) Rod side pressure port (When piping on flange side) RSQ RSG 2 x P RS2H RS2H E GB WB W QB RSH MIW MIS A (mm) Circumscribed circle O QA Model Stroke A B CD CT CZ D E FT FX FZ GA GB H L N 212.5 QB 8 RS2H50 RS2H63 RS2H80 30 84.5 20 8 36 32 64 20 73 93 16 16 128 85 44 9 14 depth 5 10 30 234.5 90 20 10 45 40 77 25 90 114 24 24 144.5 103 53

RSH/RS1H

RE A B 0.2 53 REC 67 CX CY MQQ M RHC 4-6.6 through 8-11 depth of recessed area 5 Load carrying direction MK(2) 12 3 RS Q G 28 13 6 10.3 6 RS H A RZQ 12 Conveyor lower limit position MI W S 1 3 R25 CEP1 CE1 Stroke 73 87 CE2 2-P 20 ML2B C J G5-S 16 8 160 CV MVGQ Rear pressure port 16 CC Front pressure port RB J D-X 6.5 23 14 2-Plug 46 2051.5 (Width across corners 62) Data P (Piping port) TN

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

Valve Single Unit

Refer to external dimensions in pages 1-6-51 to 1-6-53, and then mount it. 1-6-50 Body Ported Series SX3000/5000/7000 SX7000: SS5X7-20PStations L1 L2 10 (A, B port) 2n2-One-touch fitting (Pitch) Applicable tubing O.D.: 8 (A, B port) 2n1-Rc 1/4 (Mounting hole) 4-4.5 P = 20.5 13.5 10 16.5 9.4 21 19.5 76.8 22.4 11.5 SV B A B A B A B A B A B A B A 19 20.5 EA EB P SZ EB EA P 20 20 21 21 SY 62.5

Title not found

69 0.0292 .75mm 0.0295 68 0.0310 1/32 0.0312 .8mm 0.0315 67 0.0320 66 0.0330 .85mm 0.0335 65 0.0350 .9mm 0.0354 64 0.0360 63 0.0370 .95mm 0.0374 62 0.0380 61 0.0390 1mm 0.0394 60 0.0400 59 0.0410 1.05 0.0413 58 0.0420 57 0.0430 1.1mm 0.0433 1.15mm 0.0453 56 0.0465 3/64 0.0469 1.2mm 0.0472 1.25mm 0.0492 1.3mm 0.0512 55 0.0520 1.35mm 0.0531 54 0.0550 1.4mm 0.0551 1.45mm 0.0571 1.5mm 0.0591 53

Booster Regulator/Air Tank

IN port 1/4 OUT port 1/4 23 27 23 27 VEX 22 22 SRH 40 60 4 x 5.5 60 4 x 5.5 EXH port 1/4 8.5 70 70 50 SRP (When silencer installed: 107) (When high-noise reduction silencer installed: 126) (97) EXH port 1/4 VBA20A-03 SRF 300 39 ITV Pressure gauge (Option) 28 IC IN side gauge port 1/8 OUT side gauge port 1/8 ITVH IN port 3/8 176 ITVX 43 46 15 Silencer (Option) PVQ OUT port 3/8 21 VY1 24 53

VER2000/4000

Ambient temperature 20C) Coil resistance 4(A) 4(A) 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) 13 W (Ambient temperature 20C, with maximum current) Rated power consumption 2 (B) 2 (B) Coil insulation type Class H or equivalent (180C) Max. temperature rise 140C (Ambient temperature 50C, with maximum current) Electrical entry DIN terminal Manifold Model Accessory M5 x 45 VER2000 VER4000 AXT500-13 M6 x 53

Power Valve: Economy Valve Series VEX5

Grommet (G) 4 x M6 Thread depth 12 2 x 112, 2 Port 2 (A), 1 (P) Silencer (P3) 2 Port 3 (R) For bracket mounting Refer to page 2449. 4 x 7 Mounting hole 243 (Air operated) Max. 22.5 Min. 14 2448 Power Valve: Economy Valve Series VEX5 External Pilot Piping Caution Refer to front matter 53 for Safety Instructions and pages 3 to 8 for 3/4/5 Port Solenoid Valve Precautions.

1.1

l/min, total lifting height 25/25 m) 42/53 60 0.29/0.33 (at 37/49 l/min, total lifting height 25/25 m) 37/49 40 Rc 3/4 Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger) Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger) Wetted parts material Temperature range (C) Pressure range (MPa) Required flow rate Note 8) (50/60 Hz

VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 M1 Q L1 L2 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6