Magnet: D (Built-in Magnet), Mounting: B (Basic), Style: A (Air Cushion), Bore Size: 80mm, Thread: TF (Rubber Bumper: M5 20, 25; G: 32 to 100; Air Cushion: M5: 20, 25; G: 32 to 100), Seal Material: V (FKM Seals, Fluororubber), Stroke: 200mm

Magnet: None, Mounting: B (Basic), Style: A (Air Cushion), Bore Size: 32mm, Thread: TF (Rubber Bumper: M5 20, 25; G: 32 to 100; Air Cushion: M5: 20, 25; G: 32 to 100), Seal Material: V (FKM Seals, Fluororubber), Stroke: 25mm

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads, FILTER REGULATOR, MODULAR, AIRLINE EQUIPMENT, AW MASS PRO, AA, AW MASS PRO M5 MODULAR (PT), .33069

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Avoid to using 2 or more end lock cylinders at same time to perform a single task because binding may occur and one of the cylinders end lock may not release. y Use a speed controller as meter-out. Meter-in control may not allow lock to release. Locking style Turn 90 to counterclockwise pushing M/O button. Lock is released when G on cap and H OFF mark on M/O button correspond.

High Vacuum L Type Valve

nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76

Series 10-, 21- AF-A Air Filter

flats 17 Clearance for maintenance G 1/4 Drain A Metal bowl 10-/21-AF20-A 10-/21-AF30-A to 60-A With bowl guard Metal bowl with level gauge Metal bowl Applicable model Semi-standard specifications Dimensions B B B B Metal bowl with level gauge Bracket mounting size Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S

Special Specifications:

20 20 34 M5 female thread 1/4 female thread Note) In the case of Rc, G: 10 In the case of NPT: 3/8 Drain Drain Drain Drain guide Drain cock Auto-drain Series AFF Series AM, AMD, AMG, AMH Size Size 2B 4B A B C Note) Select in accordance with the type of thread on the main body.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

IDX-OM-W053

CM PE FM1 PRS P FM2 PE CM FM 12 OLR PTC PTC ILS PRS TB PE GFCI EDV 6 3 6 6 4 2 6 4 7 A A 7 1 7 2 A m 3/h(ANR) 1) (50/60Hz) 0.32/0.375 10 1ANR 65% 2 7 3 7 1 8 C 8 C 8-1 8-2 1) 2) 8-3 8 1 9 G G 9-1 9 1 10 H 10 H 10-1 ( ) 10-2 () AD48-2-A 10 IDFA6E-20-H N.O. () 0.151.0MPa 10 1 10 H IDF-S1941 () 1 AD48-2-A 1 1) 2019 3 2019 2 SERIAL No.XP IDF-S1940

XL-OMV0002

G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134

or DIN rail mount, and a choice of 2 piping directions.?

or DIN rail mount, and a choice of 2 piping directions.?

MRQ

F: Angle adjustable range 5 E: Angle adjustable range 5 E: Angle adjustable range 5 Angle adjusting screw 0 0 8 0 1 e l g e n Allowable lateral load to the piston rod end gl a n ng a ti g us in j d st a Using friction fittings makes it easier to mount the load to the piston rod end. u m dj u m a ni Mi m F: Angle adjustable range 5 u m xi Ma 0 Mi 17 nim e um gl an ad g ju in st 0 M 19

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

LEF-OM006xx

INP 1 INP ON 0.50 -35- 6.3 0.1mm [Nm] mm LEF16 M4x0.7 1.5 6 LEF25 M5x0.8 3.0 8 LEF32 M6x1 5.2 9 LEFS40 M8x1.25 12.5 14 A A mm) mm LEF16 M3 3.5 20 LEF25 M4 4.5 24 LEF32 M5 5.5 30 LEFS40 M6 6.6 31 40mm 6.4 6 /1000km /500 -36- 1. 2. 3. 1. 2. a. b. c. d.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

A IN OUT t A-A BLEED w y Note Component Parts Material No.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

Manifold Regulator Modular Type ARM2500/3000 Series

Please consult with SMC for the supply of a pressure gauge with NPT port threads. Note 2) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it will may result in a breakdown. For sealing, use a sealant tape. Flow rate (L/min (ANR)) ARP IR-A Option/Mounting Bolt Assembly IR Model Part no. Dimensions Qty.

Clean Exhaust Filter SFE Series

Operating temperature 5 to 45C Differential pressure proof Note 4) (Maximum operating pressure) 0.1 MPa Material Note 5) Body PBT, Polyolen, Polyurethane, PP*, Stainless steel*, EPDM (Fluoro coated)* Gasket NBR, Stainless steel Weight Male thread 1 g 7 g 12 g 17 g Plug-in 3 g 6 g 11 g 16 g One-touch tting 5.5 g 8 g 16 g 24 g Bracket weight 1.2 g 2.5 g 3.5 g 5.5 g Applicable tubing material