SMC Corporation of America
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HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | SolenT NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

HRS 20 A 030 Cooling capacity Option 030 2600W/3200W (50/60Hz) Null None B Earth leakage breaker Cooling method J Automatic water-supply A Air-cooled refrigerator type M Pure water piping W Water-cooled refrigerator type T High-pressure pump mounted W Fixed SI unit(*1) Piping thread type *1 Unit : MPa/ (degree Celsius) Null Rc Power supply F G (PT-G conversion fitting is included) 20 1-phase

8 RLQ MLU ML1C DB At the time of shipment -X @7 20Data Retraction locking C M(D)LUB25 Component Parts Description Material Note Description Material Note No. q w e r t y u i o !0 !1 !2 No. !5 !6 !7 !8 !

U Q P Front cylinder port P Rear cylinder port H effective thread depth C F V I D M E 22 11 Z T Minimum lead wire bending radius 10 Auto switch D-A7, A8 Dust cover (manual unlocking unit) 4-OA counter bore N 4-OB counter bore BP unlocking port (unlocks when pressurized) K Flat washer 4 pcs.

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Graph 1 30 20 10 5 4 3 1600st 1400st 1200st 1000st 800st 600st 500st 400st 300st Load movement time: t(S) 2 1 Example) 200st 0.5 0.4 0.3 100st 0.2 280 V' 0.1 100 200 300 400 500 Maximum speed: V(mm/s) V W Step 2 Find the cylinder bore size.

: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adaptor t Adaptor w Lock ring w Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.

7 2 -81No.PF-OMM0004-D PF3W721 A AA B D E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W721 56 91 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78 35 56 43.5 -82No.PF-OMM0004-D PF3W704/720/740/711/721() A AA PF3W704--T 81 50 PF3W720--T 89 54 PF3W740--T 109 71 PF3W711--T 135 92 PF3W721--T 115 74 PF3W721-F12-T 119 76 PF3W721-F14-T 123 78 -83No.PF-OMM0004-D PF3W704/720

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

6 r t !3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

operating pressure Lo Fn W Guide First tentative bore size determination F3 D1.6 x P First tentative bore size determination F2 D1.6 x P First tentative bore size determination F1 D1.6 x P WB Inclined operation W+WBWV PPV W + WB>WV P>PV Allowable driving force table (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x

. l b t t . l b kwh Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 gal(U.S.)3.785 Volume mm3 6.10 x 10-5 cm3 (cc) 0.0610 m3 35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

L3 A3 Graph (1) Load Weight: W Mr Static moment Dynamic moment MXY6 W My W L3 A3 0.6 A2 L2 Rubber stopper screw MX Load weight W kg Mr 0.5 L1 A1 Metal stopper screw Mp 0.4 W MTS My W 0.3 W MY 0.2 Mey Mep 0.1 We CY We 0.0 A2 L3 A3 L2 Collision speed V mm/s 0 100 200 300 400 500 280 560 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

IDX-OM-U010-H PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFC60-23-C,L,R,T,V IDFC70-23-C,L,R,T,V IDFC80-23-C,L,R,T,V IDFC90-23-C,L,R,T,V This manual is intended to explain the installation and operation of the product.