Possible to transfer a workpiece at low-speed.

operating pressure Shaft type 0.1 MPa Min. operating pressure X Z Single shaft with four chamfers Double shaft with four chamfers Not attached Cushion 80 to 100, 170 to 190 Rotation Rc 1/8, G 1/8, NPT 1/8, NPTF 1/8 Port size Mountable Auto switch Dimensions Shaft type X Z Form (mm) D (g6) G H N UX UZ M Size 20 30 40 8 0 0.1 10 0 0.1 11 0 0.1 10 21 11 50 65 15 75 18 24 13 57 12 84 20 15 27 15 64

Compact Cylinder with Solenoid Valve/

Stroke EA E Axial piping Bore size (mm) F1 32 40 50 63 30 34.5 43.5 51 Bore size (mm) Stroke range (mm) A B E EA EB F HA HB J KA KB L M N OA 32 40 50 63 5 +0.2 0 5 +0.2 0 6 +0.2 0 6 +0.2 0 28 0.2 33 Note 1) 40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8 26 23.3 7 40 5.4 M6 x 1 5 to 100 46.5 42 0.2 40.5 Note 2) 48.5 Note 2) 10 to 100 64

CXS

dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42 CXS basic type + 15 Width 10 CXS10 0.170 72 + Stroke 46 17 -X 0.219 CXSJ15 70 + Stroke 54 19 15 CXS15 0.280 79 + Stroke 58 20 20CXS standard CXSJ Height 0.371 CXSJ20 84 + Stroke 62 24 20 Data CXS20 0.440 94 + Stroke 64

Low Profile Guide Type

2) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range 9 B1 B2 B3 (mm) 10 15 25 38 60 18 80 38 80 10 39 66 19 86 39 86 11 44.5 95.5 24.5 115.5 44.5 115.5 D-M9, D-M9V, D-M9W, D-M9WV D-M9A, D-M9AV Mounting pattern q B1 A1 (mm) Note 2) Operating range Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 B2 B3 (mm) 10 15 25 5.5 34 64

Steam Valve

Platinum silver painted PTFE, EPR, FKM Plate assembly Valve element Piston assembly Return spring Second plate assembly Brass, PTFE Aluminum alloy Piano wire Aluminum alloy Body option S is made of stainless steel. 636 Steam Valve: 2 Port Valve For SteamVND Series Port size: 6A, 8A, 10A (Valve open) Pilot port 12(P1) 2.5 Indicator (Option) 1 8 2 x 2 x 1/8 (Back side 10(P2)) P1 51.5 75 40 64

Large blow and

.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8 74.5 6 90 78 6.5

Bernoulli Gripper

Body material 30 Nil 30 23 8.7 27 34 M3 x 0.5 6 8.5 3.3 10.5 2.2 8.5 0.8 11.3 11.8 2 4.2 0.8 2.8 27 P 17 S 77 ZNC 40 Nil 40 32 11 3.5 34 42.2 44 48 P 30 S 139 M4 x 0.7 8 11.5 3.6 13.5 2 8.5 1.0 10.5 12 3 5 1 5.8 60 Nil 60 47 21 10 54 64 110 P 67 S 323 *1 The stopper, vibration suppression cover, and plug weights are not included. 13 Bernoulli Gripper ZNC Series Dimensions: 80 Basic type

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

80 100 125 F F 4 x 9.5 F 4 x 8 4 x 6 3 x 6.5 4 x 5 G 3 x 4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54 24 40.5 16.5 80 83 58 85 37 64

MY2

absorber stroke) E SD TT EY EA EC Stroke adjusting unit h Shock absorber FA W Applicable cylinder MY2H25 MY2H40 SD 17.7 Shock absorber model RB1412 RB2015 FA 56.4 67.8 h 6 6 W 25.8 38 EA 8.5 13 EC 9 13.5 EY 36 56.5 S 67.3 73.2 T 12 15 TT 7.1 (MAX 18.6) 10 (MAX 26) E 17.5 25 16 Series MY2C Side Support Side support MYC-SA G 2-H C B A F E D H 3.4 4.5 6.6 E 15 25 45 A 60.6 95.9 121.5 F 26 38 64

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Misc. 14-20-59 How to Order Bowl Assembly 14-20-62 Precautions 14-20-64 Information on Items to be Discontinued and Equivalent Products Auto-Drain Valve, Motor Operated Auto-drain, Heavy Duty Auto-Drain, Pressure Differential Gauge 14-20-49 Related Products Note) It describes the degree of compressed air quality based on ISO8573-1: 1991 and JIS B 8392-1: 2000. 14-20-1

AMD

Option) AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMD850 Applicable model Bracket assembly With cap bolt and spring washer BM51 BM52 BM53 BM54 BM55 BM56 BM57 Caution Be sure to read before handling.Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, pages 14-14-6 to 8 for Precautions on every series, and pages 14-20-62 to 64

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, pages 14-14-6 to 8 for Precautions on every series, and pages 14-20-62 to 64 for more detailed precautions on every series.

AMH

Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, pages 14-14-6 to 8 for Precautions on every series, and pages 14-20-62 to 64 for more detailed precautions on every series. 14-20-30 2 Micro Mist Separator with Prefilter Series AMH How to Order AMH150 to AMH850 AMH 250 03 J B Option Body size Accessory (Option) 1 4 150 Standard

Refrigerated Air Dryer

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) 110 VAC (50 Hz) 110 to 120 VAC (60 Hz) Single phase Single turn 78 94 100 64 75 4.2 x 7 (Long hole) 1.5 IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10 500 VA IDF-TR500-2 Output sealing C A Output outlet Input fuse

CRQ2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Form (mm) G H UX UZ M N D (g6) Size 20 30 40 8 21 50 65 15 10 11 75 18 12 10 24 57 13 84 20 15 11 27 64 15 2.

RSH

extended piston rod. 0.2 lFX lFZ S X 4-N Through hole 8-O Counter bore Load carrying direction L q CZ CT CT Y V U CD Conveyor lower limit position T R H B Stroke 2-Rc(PT)P D QA FT A GA Pressure port at rear side Pressure port at front side QB 2-Plug WB GB E W (Diagonal I) (mm) I B GB P QA CD QB CT CZ D E FT FX FZ GA H Stroke A L Bore (mm) N O 1 8 1 4 1 4 50 14 depth 5 85 93 16 10 20 7 8 36 32 64

JA/JAH/JB/JS

Allowable eccentricity U Center of sphere R Weight (kg) A B C D E F G H Nominal size Pitch Standard: Heavy Load Type Hydraulic: Up to 7 MPa JAH40-16-150 JAH50-20-150 JAH63-24-150 JAH80-30-150 JAH100-39-150 JAH100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 22 28 32 42 52 61 25 31 35 45 55 50 59.5 66 79 96 96 9.5 11.5 13 14 16 16 19 24 27 30 36 36 16 16 20 22 24 29 32 32 41 46 55 70 52.5 64

ARM10/11

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 01 02 03 13 14 15 51 52 53 63 64 65 0.6 0.2 0.4 20 MPa 24 SMC 32.5 20 0.5 0.1 0.3 24 56 17 17 5.

CQM

EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 G1/8 NPT1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 Rc1/8 NPT1/8 NPT1/8 56.5 39.5 8 11 52 50 41.4 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 Rc1/4 NPT1/4 NPT1/4 60.5 40.5 10.5 10.5 64

CUJ

CU Length is shortened by approx. 64% max. Volume is reduced by approx. 70% max.