Parallel I/O Type: P (PNP), I/O Cable Length, m: 5, Bearing Type: M (Sliding Bearing), Stroke: 300mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: 1 (1.5), Bearing Type: M (Sliding Bearing), Stroke: 700mm

Parallel I/O Type: N (NPN), I/O Cable Length, m: 1 (1.5), Bearing Type: M (Sliding Bearing), Stroke: 100mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: 1 (1.5), Bearing Type: M (Sliding Bearing), Stroke: 100mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: 5, Bearing Type: M (Sliding Bearing), Stroke: 800mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: 3, Bearing Type: M (Sliding Bearing), Stroke: 200mm

Parallel I/O Type: N (NPN), I/O Cable Length, m: No Cable, Bearing Type: M (Sliding Bearing), Stroke: 600mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: 1 (1.5), Bearing Type: M (Sliding Bearing), Stroke: 600mm

Parallel I/O Type: N (NPN), I/O Cable Length, m: 3, Bearing Type: M (Sliding Bearing), Stroke: 600mm

Parallel I/O Type: N (NPN), I/O Cable Length, m: No Cable, Bearing Type: M (Sliding Bearing), Stroke: 200mm

Parallel I/O Type: N (NPN), I/O Cable Length, m: No Cable, Bearing Type: M (Sliding Bearing), Stroke: 100mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: 1 (1.5), Bearing Type: M (Sliding Bearing), Stroke: 900mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: 3, Bearing Type: M (Sliding Bearing), Stroke: 300mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: 3, Bearing Type: M (Sliding Bearing), Stroke: 600mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: 1 (1.5), Bearing Type: M (Sliding Bearing), Stroke: 800mm

Bearing Type: M (Sliding Bearing), Stroke: 200mm, Motor Option: None, Switch Rail Option: R (w/Magnet/Switch Rail), Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length, m: 1 (1.5), Controller Type - LEC, JXC: C91 (EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: No Cable, Controller Mounting: 7 (Screw Mounting)

Bearing Type: M (Sliding Bearing), Stroke: 100mm, Motor Option: None, Switch Rail Option: R (w/Magnet/Switch Rail), Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length, m: 1 (1.5), Controller Type - LEC, JXC: C91 (EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: No Cable, Controller Mounting: 7 (Screw Mounting)

SMC Pneumatic Clean Series

Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.

New

For Air Upstream pressure of valve P1 z 1.0 MPa Downstream pressure of valve (P2) [MPa] 1.0 0.8 Subsonic Critical 0.9 0.6 pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 500 700 10 700 1,000 Flow rate Q [L/min (ANR)] How to read the graph The sonic

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350