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Note 3) In case of 5 mm stroke (with 1 pc.) or 10 mm stroke (2 pcs.), the switch(es) may not go off or more than one switch may turn on simultaneously. Set them at 1 to 4 mm out of the values in the above table. Note 4) ( ): Dimensions for D-A93. Specific Product Precautions Be sure to read this before handling. Mounting Caution Appropriate tightening torque 1.

C85 C95 CP95 NCM Symbol S Z 5 16.5 10 25.5 5 29 10 38 Stroke Bore size (mm) 2.5 NCA DBore size: 4/CJ1B4-SU4 -X 204/2.5 polyurethane tubing (TU0425) or Data Soft nylon tubing (TS0425) are used. Symbol S Z 5 19.5 10 28.5 15 37.5 20 46.5 5 40 10 49 15 58 20 67 Bore size (mm) Stroke 4 6-2-5

How to Order CDQ2 D Z M9NJL XB14 With auto switch Mounting Number of auto switches Type Bore size (See Table 1.)

Standard accessories Hose nipple (1) Gasket (1) Rod end nut (2) Rod end nut (2) Provided to the model with rod end nut.

D-F7lWV, Z(5m) is not available. F7BA and F9BA is applicable to oil-proof auto switch (-X5).

50, 75, 100, 125, 1/4 Non-lube Double acting, 150, 200, 250, 300 Single rod 1/8 1/4 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing) Proof pressure Maximum operating pressure Minimum

50, 75, 100, 125, 1/4 Non-lube Double acting, 150, 200, 250, 300 Single rod 1/8 1/4 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing) Proof pressure Maximum operating pressure Minimum

Port size KKA3P-01M-1 -02M-1 -03M-1 KKA4P-02M-1 -03M-1 -04M-1 KKA6P-03M-1 -04M-1 -06M-1 KKA3S-01M-1 -02M-1 -03M-1 KKA4S-02M-1 -03M-1 -04M-1 KKA6S-03M-1 -04M-1 -06M-1 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Port size Body size Part no.

Port 1 Port 2 B Port 2 PS2410202-20-20 4.67" 3.38" 2.63" 2.88" 1 1/4-11 1/2 1 1/4-11 1/2 118.6 mm 85.9 mm 66.7 mm 73.0 mm NPTF NPTF PS2410202-24-24 4.67" 3.38" 2.63" 2.88" 1 1/2-11 1/2 1 1/2-11 1/2 118.6 mm 85.9 mm 66.7 mm 73.0 mm NPTF NPTF Port 1 PS3210202-32-32 4.88" 3.58" 3.06" 3.35" 2-11 1/2 2-11 1/2 123.9 mm 90.8 mm 77.6 mm 85.1 mm NPTF NPTF Dia Wrench Flats Quick Coupling Division 8145

2 3 ExOR step 1 with step 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 4 1st shift, Fill in 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 5 2nd shift, ExOR A001h 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 1 Value of 1st 6 3rd shift 0 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 byte: 7 4th shift, ExOR A001h 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 1 "01h" 8 5th shift 0 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 9 6th shift, ExOR A001h 1 0 0 0 0 0 0 1 1

circuit (power) 0: disable, 1: enable 1 Monitor short circuit (out) 0: disable, 1: enable 2 Inrush current filter 0: disable, 1: enable 2 3 Restart after short circuit (Output) 0: manual, 1: auto 4..5 Input filtering time 0: 0.1 ms, 1: 1 ms, 2: 10 ms, 3: 20 ms 6..7 Input extension time 0: 1 ms, 1: 15 ms, 2: 100 ms, 3: 200 ms Channel parameter Channel 0 to 7 0 (Ch0 input) Monitor counter

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

2+(Y2-Y1) 2+(Z2-Z1) 2) =((X2-X1) (X2, Y2, Z2) X =((X2-X1)/) Y =((Y2-Y1)/) Z =((Z2-Z1)/) X (X1, Y1, Z1) Z 3.6 64 No.SFOD-OMT0009CN-B )100mm/s 1 100mm2 100mm No.1 50mm/s 1 100mm 2 50mm No.2 Step No. mm/s / 1 2 2 2 mm mm/s mm/s mm mm mm 1 LIN-A 100 100.00 1000 1000 0 0 0.5 2 LIN-A 100.00 0 0 0.5 1 3 4 1 LIN-I 50 100.00 1000 1000 0 0 0.5 2 LIN-I 50.00 0 0 0.5 2 3 4 () 2 50mm

[] (1) ():1 ():1 Undefined No.11 1 4096 X 800 1 (2) ():1 ():2 1600 1 (3) ():2 ():1 400 1 ):1 ():1 01 40974096 1 1 [] 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 1 800 2.5mm Undefined No.12 1 4096 X 2 3 =1 /2 (3 ) =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 1 -50No.JXC-OMT0001CN-C 9.3 XX X () 1:CW 2:CCW X ORIG direction 1 2 1 2: XX ORIG

: (800) 258-9200-www.stevenengineering.com 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Sub-plate port size Thread type Rc Nil Without sub-plate Side ported Rc 1/4 Nil A02 A03 B02 B03 YZ NPTF T G F Side ported Rc 3/8 Bottom ported Rc 1/4 1 (P) 5 (R1) 3 (R2) Bottom ported Rc 3/8 (A) 4 (B) 2 Port R is Rc 3/8 Seal FHG Nil R Metal seal Rubber seal 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Option FJG Nil Z V None

temperature of servo motor 1 SD (Note 1) (Note 1) (Note 1) 46.2 Abnormal temperature of servo motor 2 SD (Note 1) (Note 1) (Note 1) 46 Servo motor overheat 46.3 Thermistor disconnected SD (Note 1) (Note 1) (Note 1) (Note 1) 46.5 Abnormal temperature of servo motor 3 DB (Note 1) (Note 1) (Note 1) 46.6 Abnormal temperature of servo motor 4 DB (Note 1) (Note 1) (Note 1) 47 Cooling fan error

1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !