5 Port Solenoid Valve SY Series

Symbol 3 position closed center (A) (B) 4 2 q w y u r 3 position exhaust center 3 position pressure center (EB) 3 (EA) 5 (P) 1 t (This figure shows a closed center type.)

MRHQ

4H9 depth 6 (one each on three sides) 4-M3 x 0.5 (attachment mounting screw ) M5 x 0.8 Finger closing port 0 -0.1 8 0 -0.7 14.9 closed 4 7 4-M5 x 0.8 depth 8 (two on opposite side) 18.8 15 Max. 7.3 42 22.5 M5 x 0.8 Finger opening port 3-R2 3 29 15 16 10 22 8 31 18 51.5 6 40 78 Angle adjustment bolt 2-5.5 through 2-9.5 depth of counter bore 3 3-R2 11 2 10 +0.03 0 3-4H9 long groove depth 4

Regulator

Application 7 3. Standard Specifications 7 4. How to Order 8 5. Options 9 6. Structural Drawing and Replacement Parts 10 7. Assembly of Optional Parts 11-12 8. Operation and Adjustment 13-14 9. Trouble Shooting 15-16 10. How to Replace the Components 17-24 10-1. Diaphragm Assembly Replacement 17 10-2. Valve Guide Assembly and Valve Assembly Replacement 18 10-3.

Air Catch Sensor Series ISA

01 DIN rail: ISA-2-1 to 7 Gauge: G33-3-01 Bracket: ISA-1-A DIN rail: ISA-2-1 to 7 10 (Hexagonal) Material: SPC (Nickel plated) Material: Aluminum 100 110 q we r t L 90 4 x 4.5 10 25 5 7.5 30 R 1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model ISA -1 ISA -2 ISA -1 ISA -3 ISA -2 ISA -4 ISA -3 ISA -5 ISA -4 ISA -6 ISA -5 ISA -6 Part no. 105 140 175 210 245 280 315 Description

IZx-OMX0087

/ Length Power supply cable layout direction / Length Symbol Layout direction Length (m) Symbol Layout direction Length (m) 3 3 N None N None 5 5 E 0.5 J 3 10 10 G 1 K 5 Straight 15 15 H 2 M 10 Straight N None J 3 S 3 To use AC adapter, specify "N", and select AC adapter with the option number.

25

Transition wiring cable length (same cable length) m Power supply cable length: 3 m Transition wiring cable length (same cable length) m Power supply cable length: 10 m Bar length symbol 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 2.

KA

-M6 16.5 17 1 8 KAT06-U01 3 8 KAT06-U03 24 23 21.5 20 14 12.8 10 10 6 23.5 1 4 KAT06-U02 10 13.9 13.9 16 24.5 25 17 12 1 8 1 4 KAT08-U01 KAT08-U02 22.5 24.5 14 19 26 2-applicable tubing 14 12 15.2 8 23 18.2 18.2 18.5 3 8 KAT08-U03 17 25.5 27 27 1 8 KAT10-U01 29.5 27 26.5 25 31 27 30 1 4 3 8 KAT10-U02 KAT10-U03 30 30.5 17 26.5 17 18.5 10 29.0 29.0 21 1 2 KAT10-U04

Pin Clamp Cylinder Series CKQ/CLKQ

3 u q !9 y @7 @0 @6 @5 @4 Auto switch !8 @1 @2 !6 !1 @3 !7 !0 !5 !

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 B port A port 0.5 ( A , B , C ) 4-M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 11-5-12 These drawings indicate the condition when the B

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

HEC_001W-E

LABEL -3-2 3.4 APPEARANCE -3-3 3.5 OPERATING PRINCIPLES -3-4 3.5.1 CONSTRUCTION AND PRINCIPLE OF THERMOELECTRIC MODULE -3-4 3.5.2 CONSTRUCTION OF TEMPERATURE CONTROLLING DEVICE -3-5 3.5.3 ELECTRICAL DIAGRAM -3-6 3.6 FUNCTIONS-3-7 3.6.1 AUTO TUNING -3-7 3.6.2 OFFSET FUNCTION -3-7 ii Number of pages 3.6.3 LEARNING CONTROL FUNCTION-3-7 3.6.4 EXTERNAL TUNE CONTROL FUNCTION -3-7 3.6.5 TEMPERATURE

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.042 lb

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Caution Disassembly/Replacement A special tool is required when reassembling the cylinder after disassembled.

PFxx-OMX0007

If using the product to detect very small flow differences, warm up the product for 10 to 15 minutes first. There will be a drift on the display/ analogue output of approx 2 to 3% for 10 minutes after the power supply is turned on. The product doesn't produce and output signal for 3 seconds after the power is supplied. Perform settings suitable for the operating conditions.

VZ100/300/500

Note 3) In the case of VZ120, supply air to 3 (R) port and exhaust from 1(P) port.

Compact Slide Series MXH

7 w q!9 t !8 i !0 @0 @0 y @1 !6 w q !9 t !8 !0 i !1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Component Parts Description Material Note Note Description Material No.

I

-01 G43-2-01 G43-4-01 G43-10-01 G43-10-01 G43-4-01 G43-10-01 Accuracy + 3% (full span) Courtesy of Steven Engineering, Inc. !

CP95

of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Angular Air Gripper Series MHC2/MHCA2/MHCM2

8 e q y !3 w !1 !6 !7 !2 t !9 !5 !4 u Parts list No. Description Parts list No.