Series DXT474

Q=226S P(P2+0.1013) Sonic flow : P1+0.10131.89(P2+0.1013) Q=113S(P1+0.1013) Q : Flow rate [ /min(ANR)] S : Effective area (mm2) P : Pressure differential (P1-P2) [MPa] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] When the air temperature is different, multiply the flow rate calculated with the above formula by the following coefficient for compensation. -20 1.08 -10 0 10 30

Thermo-chiller

4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated ow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating ow rate6 [L

Centering Unit

psi [0.4 to 0.7 MPa] Proof pressure 145 psi [1 MPa] Lubrication Non-lube Cylinder for lock Weight [kg] 0.7 1 2 7 Operating Precautions Caution 1.

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.042 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.042 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.042 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.042 lb

NVEPA|VEFseies

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Electro-Pneumatic Valve NVEP/NVEF Series

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

ISO Cylinder

11 22 14 30 C8512 0.3 10 15 6 15 9 20 C8510 Head ( side ) C858 0.5 6 10 4 10 6 14 0.1 0.7 4 8 3 8 4 11 Clevis: N Rod trunnion: U 0.3 24 36 17 35 22 46 0.5 18 27 12 26 16 W W 34 0.7 14 22 10 21 13 28 0.01 (40)1 (40)1 (40)1 (40)1 (100)1 0.3 80 400 350 300 250 200 150 100 50 450 0 (40)1 (40)1 Cylinder stroke [mm] Rod (side) 0.5 38 30 61 77 Head trunnion: U (40)1 0.7 35 32 25 51 64 W C85 Series

LEC-OM07605CN

(2) (10.2) 50 [ms] 40 30 T8 T9 20 T7 10 T6 T5 0 0 1000 2000 3000 4000 5000 6000 [r/min] LE-T10.3.2 [] LE-T5LE-T6LE-T730 LE-T8LE-T910 6 10. 10.4 a 1 10 8 5 10 7 1 10 7 5 10 6 a: [ms] 1 10 6 5 10 5 b: SSCNET 1 10 5 5 10 4 1 10 4 b 5 10 3 1 10 3 4 7 10 20 40 70 100 200 [mm] 10.5 2500kVA1mAC240V()LECSS2T5LECSS2-T9AC200V (A0-P) (L1L2L3) (L11L21) LECSS2-T5LECSS2-T7 LECSS2-T8

LEC-OM02904

-4 YET-60-1 q FVD2-6 YNT-1614 r FVD5.5-10 YNT-1210S s FVD22-10 YF-1E-4 YNE-38 DH-113DH-123 (1)t R38-10 YPT-60-21 TD-112TD-124 YF-1E-4 YET-60-1 (1)u R60-10 YPT-60-21 TD-113TD-125 YF-1E-4 YET-60-1 1. 2. 8 [N m] L1/L2/L3/ L11/L12 TE1-1/ TE1 TE2 TE3 PE U/V/W/P1/ TE1-2 TE2-1 TE2-2 P/C/N LECSS1.2 15 (9) National Electrical Code , Canada Electrical Code (10) UL/cUL UL489MCCBT AC AC

OMU0023

If the least significant bit was "1", exclusive OR the content with A001h after the 1-bit shift. bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 A001h 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 1 High byte "CRC16(H)" Low byte "CRC16(L)" ExOR Step Hex Arithmetic content flag 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 Preload Fh 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Load 1st byte "01h" 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

32 10 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 25 to 600 25 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 7 18 80 63 32 to 600 32 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 7 18 99 80 41 to 750 41 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 10 22 117 100 45 to 750 45 to 750 40 37 116 41 140 1/4 1

CNG

8 50.5 14 8 85 10 (12) 18 5.5 6 4 8 5 M4 x 0.7 Up to 200 201 to 350 20 to 200 201 to 350 31 22 19.5 17 45 103 1/8 57 16.5 10 96 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 400 20 to 300 301 to 400 38 22 19.5 17 45 104 1/8 57 20 12 97 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 450 20 to 300 301 to 450 47 30 27 19 52 112 1/8 65.5 26 16 104 10 (13) 26 7 11 7 12 8 M6 x 1 Up to 300

VQ4000

thread Rc 1/4: Rc 1/4 thread 2 4 VQZ B A B A 7 SMC SMC SMC SMC SMC SMC B A 2 4 B A B A 6 B A VQD 2 4 B A B A 5 D side B A 6.5 L1 2 4 B A B A 4 B A 2 4 Manual override B A B A 3 B A 4 2 B A A 2 A 4 2 B A A 1 SMC Indicator light A 2 4 R4.5 Stations 12 X 16.5 (External pilot port) Rc 1/8 9 9 106 10 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 SMC (Pilot EXH port) Rc 1/8 1 P 5 3 R2 R1 42 17.5

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Operating time s 0.05 0.1 0.21 0.24 0.26 0.28 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF

CLA

::;Hs 1(0) 1(0) 5(1.5 8 4 0(6.5) 71.5 76.5 84.0 92.5 \02.5 D-A4 A 0(0) 0(0) 0(2.5) 2(6 4(75) [).Q3 B 1(0) 1(0) 5(1.5) 8(4) 10(6. 5) D-K3 ~ H, B3 88 95.5 10. 114 A 0(0) 0(0) 0(3 2.56.5 4.5 8 D-G5, [)'B5 1.5(0 1.5(0) 5.5(2) 8.5 4.5 10.5(7) ~.D-K5 ~ , 38 43.5 SO.5 59 69.5 A 0(0) 0(0) O{4.S 3 8) (9.5) D-I'S B 3(0) 3(0) 7(3.5) 10{6 12(8.5) , , D-JS 40 43.5 49 55.5 83 ~ Ht 31 42 35 so 51.5 _A 0

4-channel Flow Monitor ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.

HEC_W-E

-1 10.1 SIGNAL AND STYLE OF CONNECTORS -10-1 10.2 POWER SUPPLY CABLE -10-2 10.3 CALCULATION OF DEW POINT (FROM PSYCHOMETRIC CHART) -10-3 v Contents Figure List Page No.