ALF400 to 900, ALT-5/-9

1 Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9 Standard Specifications Model Auto feed lube Auto feed tank 1 2 ALT-9-IS1 2 ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 ALT-5 ALT-5-ISALT-9 ALT-9-IS4 1 2 1 1 1 1 2 4 1 4 3 AIR: OIL: 4 3 2 1 4 1 Port size 8 3 8 3 1 Fluid Proof pressure Max. operating pressure Air 1.5 MPa 0.7 MPa 1.0 MPa Courtesy of Steven Engineering, Inc.-230 Ryan

MHx-OMY0005

0.65 Nm 20 0.36 Nm 16 1.14 Nm 20 2.7 Nm 13 3-3. 1 (MHF2-8DMHF2-8D1) 1. 2.

Micro Mist Separator

Operation and Adjustment 13 to 14 8-1. Discharge from the product with drain cock 13 8-2. Manual drain discharge from the auto drain 14 9. Troubleshooting 15 10. How to Replace the Components 16 to 17 10-1. Bowl assembly Replacement 16 10-2. Element Replacement 17 11. Disassembly Drawing 18 12.

ALF400 to 900, ALT-5/-9

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9 Standard Specifications Model Auto feed lube Auto feed tank 1 2 ALT-9-IS1 2 ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 ALT-5 ALT-5-ISALT-9 ALT-9-IS4 1 2 1 1 1 1 2 4 1 4 3 AIR: OIL: 4 3 2 1 4 1 Port size 8 3 8 3 1 Fluid Proof pressure Max. operating pressure Air 1.5 MPa 0.7 MPa 1.0 MPa (1) Operating pressure differential range (Difference

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

ZVB20_E_

Caution 1. This product has not been cleaned. When using this product in a clean room environment, flush and confirm the products purification level before use. Handling Caution 1. Do not drop, hit or apply excessive shock to the product. Even if the body is not damaged, the internal components may be damaged, leading to a malfunction. -4- 1. How to Operate 1.1 Outline 1.

ZVB40_E_

1.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1) , and other safety regulations. *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems. IEC 60204-1: Safety of machinery -Electrical equipment of machines .

Mist Separator

Operation and Adjustment 13 to 14 8-1. Discharge from the product with drain cock 13 8-2. Manual drain discharge from the auto drain 14 9. Troubleshooting 15 10. How to Replace the Components 16 to 17 10-1. Bowl assembly Replacement 16 10-2. Element Replacement 17 11. Disassembly Drawing 18 12.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3. Wall x y x z x 2. Bottom 4. Vertical z y x y z Example 1.

VFR2000 Series

Leakage Worn spool packing (5) Intrusion of foreign matter (11) Spool valve has not completely shifted. (1),(7) Poor seal on actuator (cylinder, etc.) side (12) (13) Air leaks throuth gasket. Insufficient bolt tightening Air leaks through EXH.

Activated Carbon Filter

How to Replace the Components 13 to 14 9-1. Bowl assembly Replacement 13 9-2. Element Replacement 14 10. Disassembly Drawing 15 11. Dimensions 16 -1- Activated Carbon Filter Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Line Filter

Operation and Adjustment 13 to 14 8-1. Discharge from the product with drain cock 13 8-2. Manual drain discharge from the auto drain 14 9. Troubleshooting 15 10. How to Replace the Components 16 to 17 10-1. Bowl assembly Replacement 16 10-2. Element Replacement 17 11. Disassembly Drawing 18 12.

LG1H

1 i !4 Section A-A u Parts list Material Note No. Description No.

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27 32 32 37 37 39 55 166 187 187 218 218 241 241 277 334 AMD150 40 40 50 50 55 55 65 85 AMD250 AMD350 AMD450 AMD550 AMD650 AMD450SAM,

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

3 @1 @0 !1 !0 !2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 r !7 !6 t !8 !0 !2 i !9 y u MHZ Component Parts MHF Description Material Description Material Note Note No. No.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

710 670 20 700 230 120 222 2 1 14-13-14

PS-OMH0005CN

-2No.PS-OMH0005CN-D 1 1.5 3) *3) 1 1 () -3No.PS-OMH0005CN-D () () -4No.PS-OMH0005CN-D ( ) * (10 10 ) * (13 ) FG (50N 25N ) -5No.PS-OMH0005CN-D *() 6 33 2 () () 10m DC(-)() * ( ) ( ) CE -6No.PS-OMH0005CN-D -5~50 * ON , 20~30 1% 18~27 LCD * -7No.PS-OMH0005CN-D PSE20 2 0 NPN5 + 1 PNP5 + 4C (4 ) 1 A B + 1 M SI 2 1 2 kPa MPa / ZS-26-A 2 m ZS-28-C 1 ZS-26-B (M38L 2

3-Position Rotary Table

1 #0 t u r w @3 !9 MSZAA (High precision type) $1 e $0 @7 @1 @9 !0 !2 #2 !6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.