HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

PSxx-OMT0001CN

ISA-20 2.6 ISA-14 -39No.PS-OMT0001CN-E 3 () ISA-21ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 E210-U01 2 ISA-17 2.6 Y200T-A -40No.PS-OMT0001CN-E 3 () 2 E210-U01 ZS-31-C ZS-31-B Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-41No.PS-OMT0001CN-E 4 80 kPa220 kPa (ON/OFF) OFF ON (43 ) 1 5 2 OUT1 OUT2 / (62 ) (48 ) (45 ) ,[F10](56 ) -42No.PS-OMT0001CN-E 4 () (ON/OFF

VK3000

VV5K3-20-06 VV5K3-40-06-M5 Common SUP/Common EXH VK Type 20: Body ported (A, B port top ported) Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 How to Order A port: Rc 1/8, M5 x 0.8 VZ VV5K3 20 05 A, B port Rc 1/8, M5 x 0.8 VK3120 Thread type VF VK332 Valve stations Nil 00F 00N 00T Rc 01 1 station Applicable blanking plate assembly VK3000-7-1A VFR G NPT 20 20 stations R port:

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Stations D side U side SOL.A 1 ( ) ( + ) Black None SOL.B 14 ( ) ( + ) Yellow Black 1 station 1 14 SOL.A 2 ( ) ( + ) Brown None 2 15 SOL.B 15 ( ) ( + ) Pink Black 2 stations 3 16 4 SOL.A 3 ( ) ( + ) Red None 17 5 SOL.B 16 ( ) ( + ) Blue White 3 stations 18 6 19 SOL.A 4 ( ) ( + ) Orange None 7 SOL.B 17 ( ) ( + ) Purple None 4 stations 20 8 21 SOL.A 5 ( ) ( + ) Yellow None 9 22 SOL.B

25

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

EXxx-OMW0014CN

/15% US1 DC19.2 V 6 A DC24 V 20%/15% US2 4 A 1.2 V(DC24 V ) US1-US2 JSY JSY300JSY5000 SY SY3000SY5000 VQC VQC2000VQC4000 32 DC24 V,1 W PNP() 7/8 5 )10A EX245-SPN3A 4AXD1/XD2 6A 37 No.EX-OMW0014CN-A . 6-2 () EX245-SPN1A EX245-SPN2A EX245-SPN3A PROFINET I/O C (IRT ) (FSU) (FSUFast Start Up) MRP (MRPMedia Redundancy Protocol) MRPD (MRPDMedia Redundancy for Planned Duplication

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

CYV

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Cable length (L) [m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 (5.7) 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 10 15 Actuator side Controller side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

IDX-OM-W053

V 15-1 . 15-1 15-2 . 15-2 15-3 . 15-2 16 16-1 . 16-1 2 i i i 1 () OFF 3 ON OFF i 1 1 3 i 1 i i 2 5 i 2 1 i-2 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 i-3 i i 2 6 WARNING !

SMC Basic Pneumatics

Th6 table is based on a supply pressure 6 bar (approx. 90 psig) and a pressure drop of 1 bar (15 psig) before the cylindr. lt includes also th6 loss by adiabatic pressure change and th temperalure coetficient for 20'G. Usually this will suffice for most real world applications.

%silltr

Th6 table is based on a supply pressure 6 bar (approx. 90 psig) and a pressure drop of 1 bar (15 psig) before the cylindr. lt includes also th6 loss by adiabatic pressure change and th temperalure coetficient for 20'G. Usually this will suffice for most real world applications.

Title not found

Both sdes (2 to 20 siaiions) '!

5 Port Solenoid Valve Series SQ1000/2000

or less Maximum operating pressure 0.7MPa (High pressure type: 1.0MPa) Single 2 position 3 position 4 position 4.5 (0.25) SQ1131 15 or less 80 Rubber seal 20 or less 0.1MPa 0.15MPa Single 3.2 (0.18) SQ1230 15 or less 80 Metal seal 0.18MPa 0.18MPa Double (latching) Double (latching) Minimum operating pressure 4.5 (0.25) SQ1231 20 or less 80 Rubber seal 0.1MPa 0.1MPa Double (double solenoid

Title not found

20 Power supply 100-240 VAC 100-240 VAC 24 VDC 100-240 VAC 24 VDC + 10% 15 % + 10% 15% + 20% 15% + 10% 15% + 20% 15% 50/60 Hz 50/60 Hz 50/60 Hz Maximum micro power cut 10ms 10ms 5ms 10ms 5ms Maximum inrush current 0.7A 1.5A 0.7A 1.5A 7A 0.7A 1.5A 7A Maximum power 3W 4W 3W 8W 6W consumption ANALOGUE INPUT CHARACTERISTICS AC INPUT CHARACTERISTICS 10 6 inputs from I01 to I06 Input voltage 100

CJ1

37.5 20 46.5 5 40 10 49 15 58 20 67 Bore (mm) Stroke 4 1.1-5 World Wide QS\E Support...