Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

: Reserve 0 3: 0..10V 4: 0..5V 5: 1..5V 6: 0..20mA 7: 4..20mA 0x0382 CH0-CH1 Analog output range 1 Bit7-4: CH1 Bit3-0: CH0 Bit8-15: Reserve 0 0x0384 CH0-CH1 User setting value upper limit error 1 Bit7-4: CH1 Bit3-0: CH0 0: disable, 1: enable Bit8-15: Reserve 0 0x0385 CH0-CH1 User setting value lower limit error 1 Bit7-4: CH1 Bit3-0: CH0 0: disable, 1: enable Bit8-15: Reserve 0 CH0-CH1 Output

PFxx-OMX0007

PLS1_L U8 0 Y 0: 100 (L/pulse) 1: 1000 (L/pulse) 1520 0x05F0 0 R/W 1530 0x05FA 0 R/W PLS1_Ft3 U8 0 Y 0: 1 (L/pulse) 1: 10 (L/pulse) 0: Add (Addition) 1: dEC1 AC (Setting of the accumulated flow output direction) Setting of the accumulated flow output direction 1600 0x0640 0 R/W U8 0 Y (Subtraction OUT1) 2: dEC2 (Subtraction OUT2) 0: 1.0 sec 1: 2.0 sec 2: 5.0 sec 1800 0x0708 0 R/W FiL (Digital

LX

0.01 0.02 0.03 0.04 0 0.01 0.02 0.03 0 0.01 0.02 0.03 Time (s) Time (s) Time (s) LXFH5BD LXPB2BD/LXSH2BD LXPB5BD/LXSH5BD 80 80 80 Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load Transfer load 10kg 10kg Transfer load 50 50 50 3kg 6kg 6kg 2kg 3kg 3kg 1kg 0kg 0kg 0kg 0.01 0.02 0.03 0.04 0.01 0.02 0.03 0 0 0.01 0.02 0.03 0 Time (s) Time (s) Time (s) Acceleration Time Guide/Ball Screw

Fieldbus system Analog unit

0 to 10 V 0 to 5 V 0 to 20 mA 0FFF 4095 5.25 21 0FFF 4095 10.5 5.25 21 0F1C 3868 5 20 0F3D 3901 10 5 20 0800 2048 3 12 0800 2048 5.25 2.625 10.5 00E4 228 1 4 0 0 0 0 0 0 0 0.75 3 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD value LSB -20No.EX-OMN0038-C Input signal range: -10

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Description MBF461 O-g~-1 Manifold block 0 , Terminal 0 , Metal joinVclamp O. 8. Plug-in type MBF4611-03-1 Gasket 8. 8. O-ring 0, 0. Receptacle ass'y 0 Manifold block ass'y MBF471*-g~-1 Manifold block 0. Metal jOint 0, 8. Gasket 6). 0 . O-ring 0.0 Non plug-in type MEF463LR-04-1 End plate (U) en> ,End plate (D) G) . Metal joint/clamp 0, 8. Plug-in type Gasket 6). 8.

Made to Order

(mm) Series CQ2 CQS Bore size (mm) G G Th9 Th9 0 0.043 0 0.043 12 1.5 1.5 15 15 0 0.052 0 0.052 16 1.5 1.5 20 20 MGC Series MGG Series (mm) (mm) 0 0.043 0 0.043 20 2 2 13 13 0 0.043 0 0.052 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 0 0.043 25 2 2 15 15 Bore size (mm) Bore size (mm) Throttle dia. () Throttle dia. () 32 2 21 20 5 20 3 40 2 28 25 5 25 3.5 50 2 35 32 6 32 6 63 2 35 -X -

Table of Contents

0 !

Integrated Controller

0 5 10 15 20 25 30 35 40 0 0 10 20 30 40 50 60 70 0 0 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load

Tie-rod Type Hydraulic Cylinder

0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) a CX B C d D CDH9 E F GB GA G J MA L K NB P NA RR S R MM A +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 12 10 21 18 25 14 9.5 M8 x 1.25 M14

0.4

"#$ $-.0&! )(%(#* "%! "1"(&"0&! " -+ (-# ! " (. #.0!% -, "#(,-&$ " (-# ( $! !%(#!$ 02 ! #.0!% -, -&!#-($ -.# -#! +-(# ,-% " (#*&! -&!#-($ 2+! "#$ )+-(# ,-% " $-.0&! -&!#-($ 2+! ! "& #.0!% -, -&!#-($ +-(# . #! '!!$ 7! ! (#(. 0!#$(#* %"$(. ,-% .0 '-##!' -% '"0&! ( VQC1000/2000/4000 ! #$#0 '< "" = *#('" 0 !1( 6 6 6 6 6 6 6 6 6 6 #$#0 " 0 #% 4'" %: (*1 !

4-channel Flow Monitor ( compatible)

16 L/min 0.016 0 L/min 40 L/min 0.04 0 100 L/min 0.1 0 250 L/min 0.25 0 4 L/min 0.001057 0 PF2W5 16 L/min 0.004225 0 gal/min 40 L/min 0.01057 0 100 L/min 0.02642 0 250 L/min 0.066 0 oC 100 oC 0.1 0 oF 212 oF 0.18 32 10 L/min 0.01 0 50 L/min 0.5 0 L/min 100 L/min 0.1 0 200 L/min 0.2 0 500 L/min 0.5 0 PF2A5 10 L/min 0.000353 0 50 L/min 0.001766 0 cfm 100 L/min 0.003531 0 200 L/min 0.00706 0

ZP

0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

EX120/121/122

Input unit for PNP (1 connector, 1 input type) Branch connector on the input unit side (e-con) CN0, 2, 4, ..., 14 Fuse For input +24 V q w e r q w e r For sensor +24 V +24 +24 +24 +24 +24 +24 +24 +24 RD (+) IN1 IN3 IN5 IN7 IN9 IN11 IN13 IN15 Input w RD () 0 0 0 0 0 0 0 0 For sensor 0 V For input 0 V IN0 IN2 IN4 IN6 IN8 IN10 IN12 IN14 Input q CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 V CN1, 3,

Table of Contents

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

ITV

ITVX 20 Output pressure (kPa) 0.5 0.5 Return PVQ 40 0 0 Out VEF VEP 60 0.5 0.5 VER VEA 80 1 0 25 50 75 100 1.0 0 25 50 75 100 0 2 4 6 8 10 VY1 Input signal (% F.S.) Count Input signal (% F.S.)

CRB2/CRBU2/CRB1

Single vane type Double vane type 0 -5 +4 0 a r n n R e o 9 g o g t 0 0 n a i e 9 +4 0 a t t 0 i a o r 0 1 e t 1 n n o 8 g o R 0 e n r i a g a +4 0 t a n n r t g a n o e r o R n i 2 t o a 7 t i 0 t o a R t o +4 0 R For size 40 actuators, a parallel keyway will be used instead of chamfer.

Electric Slide Tables

300 100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L5 200 400 L5 [mm] L5 [mm] L5 [mm] 150 300 Mer m 100 200 50 100 0 0 0 1 2 3 4 5 0 0.2 0.4 0.6 0.8 1 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500

Table of Contents

0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !