VQ5000

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

P JU JJ JC JD WE 3.5 4.5 4.5 5.5 Size 10 20 30 50 M8 x 1.25 12 15 15 18 M5 x 0.8 92 117 127 152 9 10 11.5 14.5 45 60 65 75 17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8 8 10 10 12 M8 x 1 34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5

CQM

J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38 10 5 60 58.5 4.5 28 19.8 7 34 5.5 9 7 58.5 31.5 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66 35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 8 80 41 14 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7-5-8 9 Series CQM Compact Cylinder: Guide Rod Type Double Acting, Single

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

Rotary One-touch Fittings Series KS/KX

(inch) Thread UNF NPT UNF, M5, M6 10-32 UNF, M5, M6 Weight (g) H (Hex.)

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

or less 13 or less VQ1200 Double M5 (M5 threads) 5.4 (0.3) Rubber seal 15 or less 20 or less VQ1201 C10 (for 10) C4 (for 4) C6 (for 6) C8 (for 8) 1051 (single) 1144 (double, 3P) 3.6 (0.2) Metal seal VQ1300 20 or less 26 or less VQ1000 Closed center VQ2000 VQ200 2 to 16 stations Options: Built-in silencer Direct exhaust VV5Q21Side 5.4 (0.3) Rubber seal VQ1301 25 or less 33 or less VQ201 78

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Replacement part/grease pack part no. : 20, 25, 32 : GR-S-010(10 g) 40, 50 : GR-S-020(20 g) 713 MHW2 Series Dimensions MHW2-20D Flat finger type (Standard) 20 2 x M5 x 0.8 thread depth 7 (Mounting thread) 17 60 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9 +0.052 depth

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth 4.5 (same on reverse side) 4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20-XB19 20 33 65 78.5 20 CXS6-30-XB19 30 43 75 88.5 25 CXS6-40-XB19 40 53 85 98.5 30

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

mounting groove (4 locations) 55 Width across flats 10 (4 locations) M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger opening port) 6.5 H 4 x M6 x 1 (Piston rod thread and rack thread) 22.6 2 x M5 x 0.8 Vacuum port 8 0.5 10 11 11 8 8 9 16.5 20.5 11 O S 39 19 K (58) 15 25 19 19 9 4 4 9 25 When open F 13 13 43 4 x M5 x 0.8 through (Thread for mounting attachment) When open G (mm) J 26 50 70

48

(M3, M5, and G threads) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

3 Port Solenoid Valve Series VQ100 1

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PPS PTFE PFA N Pilot port thread type Symbol Nil 2 Body class 6 one-touch fitting M5 x 0.8 Tubing O.D. Body class 2 3 4 5 Tubing O.D. Symbol Metric sizes 06 10 12 19 6 10 12 19 Inch sizes 07 11 13 19 1/4 3/8 1/2 3/4 Variations LVD20-T Model LVD30-T LVD40-T LVD50-T Orifice diameter 4 8 10 16 Tubing O.D. Metric 6 10 12 19 Inch Valve type Type Symbol 1/4 3/8 1/2 3/4 Basic type N.C.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Compact Cylinder with Solenoid Valve/

Bore size (mm) Stroke range (mm) OB P1 P2 Q RA RB S V W Y Z 32 40 50 63 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 59 38 5 to 100 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 67 46 5 to 100 11 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 14 8 17 54 63 83 58 10 to 100 14 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 18 10.5 17 54 63 97 69 10 to 100 6 Compact Cylinder with Solenoid Valve/Guide Rod Type Series CVQM Auto Switch

Compact Guide Cylinder

(M3, M5 type only) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

Slider Type/Ball Bushing Bearing

x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5 92.5 103 XA XB Z 194 205 250 ZZ 17.5 19.5 23.5 CY1F CY1H15 CY1H20 CY1H25 CYP 11.3 9.5 D-X Technical

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

+ Stroke Relief port With air cushion Cushion valve (Width across flats WH) WA GA RA Relief port M5 x 0.8 WB 20 10 S + Stroke ZZ + Stroke (mm) AL Bore size Stroke range 1 2 A GB I J MM P S ZZ K NA C H RA B1 KA D H1 E F GA Standard Long 20 25 32 40 50 63 80 100 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 10 10 10 10 10 15.5 19.5 19.5