CM2

20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A D-H7l D-H7C

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500 500 LAT 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500

Electric Actuator with Integrated Guide

(kg) 300 L2 200 Mer a=1000 a=2000 a=3000 L2 (mm) Rolling Yawing m 100 L2 Mer 50 40 30 20 10 0 m Transfer load m (kg) 300 200 a=1000 a=2000 a=3000 L3 (mm) L3 100 m Mey a 50 40 30 20 10 0 Transfer load m (kg) Refer to page 71 for deflection data. 42 46 Non-standard Motor/Horizontal Mount Specification Series LTF8 Dimensions/LTF8FPH(X10) Scale: 13% thread depth 9 4-M6 x 1 1.

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 95 (n 4) 2 15 + 40 (n 2) 2 80 + 40 (n 4) 2 85 + 40 (n 4) 2 (n 4) 2 (n 4) 2 D-M9/M9W 80 + 40 95 + 40 90 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

Electric Actuator

mA or less 2.5 to 40 mA Load current 0.8 V or less at 10 mA (2 V or less at 40 mA) 4 V or less Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .

21

20 25 32 40 6.8 15 30 30 37 3.2 18.4 59 139 9 15 40 40 50 4 28 75 161 9 15 40 40 50 4 28 75 174 Use a thin wrench when tightening the piston rod.

Compact Cylinder with Air Cushion Series RQ

-50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63-30 -40 -50 -75 -100 R(D)QB80-40 -50 -75 -100 R(D)QB100-40 -50 -75 -100 9 8 9.5 13.5 15.5 10 15 17.5 776 Compact Cylinder with Air Cushion Series RQ Construction 20 to 40 With auto switch (Built-in magnet) A part 50 to 100 With auto switch (Built-in

Precautions 1

Retaining rings (cotter pins for 40) are included. Rod End Nut (mm) Trunnion Nut (mm) Mounting Nut (mm) H Material: Carbon steel Material: Carbon steel Material: Carbon steel d d B D D C C C D H B H B d Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 B C D d H D d H C B d H B C D Part no. NT-02 NT-03 NT-04 Part no.

Compact Cylinder with Lock Series CLQ

L D d l m t d H B C 0.040 0.076 20 NT-02 IY-G02 20 21 7.6 16.2 1.5 0.9 M8 x 1.25 5 13 15.0 Type C 8 for axis 8 0.040 0.076 25 NT-03 IY-G03 25 25.6 9.6 20.2 1.55 1.15 M10 x 1.25 6 17 19.6 Type C 10 for axis 10 0.040 0.076 32, 40 NT-04 IY-G04 32, 40 41.6 9.6 36.2 1.55 1.15 M14 x 1.5 8 22 25.4 Type C 10 for axis 10 0.050 0.093 50, 63 NT-05 IY-G05 50, 63 50.6 13.4 44.2 2.05 1.15 M18 x 1.5 11

RQ

50, 63 80, 100 15, 20, 25, 30, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 RQ MU DManufacture of Intermediate Stroke -X Description Part no.

Compact Cylinder with Air Cushion

50, 63 80, 100 15, 20, 25, 30, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 Manufacture of Intermediate Strokes Method Ordering Method Special body type Refer to "How to Order" for standard part numbers.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

150 stroke 20 20 10 10 2 3 4 5 3 4 5 40 40 32 32 Mass W (kg) Mass W (kg) 2 1 1 25 25 20 0.5 0.4 0.3 0.5 0.4 0.3 20 0.2 0.2 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 20 20 10 10 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) 40 2 2 32 D32 1 1 0.5 0.4 0.3

MTS

180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph

CLQ

Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 t Applicable bore size (mm) Applicable snap ring 20 25 32, 40 50, 63 80 100 Part no.

CLQ

Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction

Vacuum Ejector Series ZM

40 40 60 30 30 Suction flow rate 40 20 20 20 10 10 0 0 0 0 45 40 35 25 15 30 20 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate l/min (ANR) 992 Series ZM Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Vacuum Switch ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021 Model Sensor type Switch Set pressure

Compact Cylinder with Air Cushion and Lock Series RLQ

Description RLQ40 RLQ50 RLQ63 Compact Cylinder with Air Cushion and Lock PT elbow Restrictor PT tee 32, 40: AS2200-(N, F)01-S 50, 63: AS2200-(N, F)02-S 32, 40: KRL06-01SW2 50, 63: KRL06-02SW2 TRB0604W KR-06C Metal speed controller 5 2 Dimensions not shown are the same as standard type.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 100 Non-lube Double acting, Double rod (40 to 63) 20 25 32 40 50 63 80 100 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20 25 32 40 50 63 80 100 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63/80/100 1.5 MPa 1.0 MPa

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

. 30 10, 20, 30, 40, 50, 75, 100 40 10, 20, 30, 40, 50, 75, 100 Bore size Strokes are available in 1 mm increments by installing spacers in standard stroke cylinders. 10 16 20 25 30 40 10 mm 16 mm 20 mm 25 mm 30 mm 40 mm Port thread type M thread Rc NPT G 10 to 20 Nil 25 to 40 TN TF Series MQQ is not auto switch capable.