Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 40 (Common SUP, Common EXH, Bottom Ported), Stations: 13 Stations, Port Size: M5 (M5X0.8)

Valve Mounting Direction: Solenoid on Same Side as A,B Port, Passage: Common SUP, Common EXH, Side Ported, Stations: 6 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 16 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 5 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 6 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 10 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 12 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 13 Stations, Port Size: M5X0.8, Thread: -

Dual Speed Controller with One-touch Fitting Series ASD

8 11.7 M5 x 0.8 27.4 7.8 ASD230F-M5-06D 20.6 11.6 32.5 6 13.7 ASD330F-01-06SD 38.9 22.9 11.6 38.5 14 6 13.7 35.6 1.2 14.2 11.8 7.2 12 R 1/8 31.6 10.6 ASD330F-01-08SD 38.2 28.2 15.2 44.8 15.8 8 18.5 ASD430F-02-06SD 25.2 12.8 43.5 6 17 18 ASD430F-02-08SD 41.7 40.7 1.2 28.2 18.5 15 7.2 17 15.2 46.5 8 R 1/4 34.7 11 18.5 ASD430F-02-10SD 31 18.5 49.3 19.7 10 21 ASD530F-02-06SD 25.2 12.8 48.3 6

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 28.8 25.1 30.1 9.6 33.8 M5 x 0.8 8 13.5

E-P HYREG ® Series VY1

VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg)

Speed Controller: Standard Type Series AS In-line Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Pressure Gauge Guide

MPa G46-2-01 to 02-SRA 0 to 0.2 44.5(46.5) 5 44.5(46.5) G46-2-01 to 02-SRB G46-4-01 to 02-SRA 0 to 0.4 G46-4-01 to 02-SRB M5 x 0.8 x 5 M5 x 0.8 x 5 8 1 R MPa 4 1 R G46-7-02-SRA 0 to 0.7 G46-7-02-SRB M48 x 2 M48 x 2 G46-10-02-SRA 0 to 1.0 G46-10-02-SRB Note) Do not apply pressure more than the maximum display pressure. This will cause a malfunction.

High Vacuum L Type Valve

Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Pilot port Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening size wrench torque XLF-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 -63 M10 8 15 -80 Body Supply air pressure of 0.4MPa (G) to the pilot port.

Pressure Sensor

M5 R06 R07 N01 Port size M5 x 0.8 male thread 6 reducer type 1/4 inch reducer type Wetted parts material Pressure sensor: Silicon, O-ring: NBR Body: Stainless steel 304 Body: PBT With sensor cable (3 m) 41 g 38 g Mass Without sensor cable 7 g 3.8 g -12No.PS-OME0004-G Analog output Range Rated pressure range A B C For vacuum 0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -101 to 101 kPa -101

ML1

Applicable auto switch Electrical entry Page Style Model Indicator D-E7lA Reed switch Grommet (In-line) Yes 5.3-24 D-E80A No 5.3-24 D-M5 Yes 5.3-41 MK/MK2 Grommet (In-line) Solid state D-M5lW 5.3-47 Yes (2 color indication) D-M5lTL RSQ/RSG 5.3-62 Yes (With timer) RSH Precautions CE1 Be sure to read before handling. Refer to p.0-44 to 0-46 for common precautions of auto switch.

4/5 Port Air Operated Valve SYJA3000 Series

-03-M5 1 pc.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

Dimensions/20 to 100 Basic/CG1YB GA GB 2-P (Port size) (Rc, NPT, G) 2-TC Section TA/TB Width across flats B1 H1 MM 0 -0.05 I 0 -0.05 TD E D E AL A TA TB 4-TC K F F H TE TF TG NA S + Stroke ZZ + Stroke KA C 0.1 8-J NA Section TA/TB (mm) Bore size (mm) 20 25 32 40 50 63 TC TDH9 TE TF TG M5 x 0.8 4 0.5 5.5 +0.08 0 8 +0.08 0 M6 x 0.75 5 1 6.5 10 +0.08 0 M8 x 1.0 5.5 1 7.5 12 +0.08 0 6 1.25 8.5

Platform Cylinder Series CXT

.: GR-S-010 (10 g) Individual -X 527 Series CXT Dimensions: 12 to 25 S + Stroke X + Stroke H 4 x LD through, counterbore B depth C 4 x MM HP Depth M Back side 4 x J depth JK HG HA T PA T (N) d d NN RW RW PW QW PB GP E W Y Z 2 x M5 x 0.8 2 x RB G G HT U (NA) (Option) A L HN (Max.)

CXT

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Y Z 2-M5 x 0.8 2-RB G G HT U (NA) (Option) A L HN (Max.)