5 Port Solenoid Valve Series SQ1000/2000

4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5

Table of Contents - Tubing

Max. operating length (m) Part No.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

EX500-DX_e

System configuration EX500-DX A EX500-DX B How to order: EX500-AC 030 SSPS Power supply cable Cable length (L) 003 0.3 [m] Connector GW unit SSPS Socket side: Straight Plug side: Straight With SI unit Valve manifold (SY/SV/VQC/S0700 Series) 005 0.5 [m] Thank you for purchasing an SMC EX500 Series Fieldbus system.

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

SZ Type of actuation 2 position single 3 position pressure center Port size [4(A), 2(B) port] VP4 (A) 4 (B) 2 (A) 4 (B) 2 Note 1) 5 VQZ3000 VQZ2000 VQZ1000 Symbol Port size 1 C3 C4 C6 C8 C10 M5 02 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting 8 one-touch fitting 10 one-touch fitting M5 thread Rc 1/4 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) S0700 2 position double 3 port for

Round Type Low Pressure Hydraulic Cylinder Series CH
M

HS Auto switch 36 12 24.5 SMC SMC A 33 B Auto switch 49.5 A B G 1/2 (applicable cable O.D. 6.8 to 11.5) Proper auto switch mounting positions (mm) D-H7 D-H7C D-H7W D-H7BAL D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, D-A34 D-A44 D-B5 D-B6 D-G5NTL D-H7F D-B59W Bore size (mm) A A B A A A A B A B B B B B 20 14 10 8.5 12 10.5 14 9 15 13 12 6.5 8.5 12 7 25 14.5 12.5 9.5 9 11 14.5 9.5 12.5 15.5 11.5

CM2

D-G39A D-K39A D-A44A D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-B5 D-B6 D-H7l D-H7C D-B59W D-G5NTL Bore 20 25 32 40 A B 5(3) 5(3) 6(4) 11 A 6(4) 6(4) 7(5) 12 B 0(0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter)

Series: 25A-ISE20, Rated Pressure Range: -0.1 TO 1 Mpa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: Panel Mount Adapter

End Lock Cylinder Series CBJ2

6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3

Magnet Gripper

marked with "v" are produced upon receipt of order. *: For details about auto switches with pre-wired connectors, refer to Best Pneumatics No. 3. *: Auto switches are shipped together, but not assembled. 1 m M (Example) M9NWVM 3 m L (Example) M9NWVL 5 m Z (Example) M9NWVZ Specifications Bumper Order No.

Pressure Sensor for General Fluids

Remarks Lead wire and M12 connector (3 m) Straight ZS-37-A 1 pc. Lead wire and M12 connector (3 m) Right angle ZS-37-B 1 pc. Connector for pressure sensor controller ZS-28-CA-4 1 pc. Adapter with throttle Rc1/4 ZS-31-X175 1 pc.

Foot Pedal Type

size Port 1(P), Port 2(B), Port 4(A): Rc1/8 Port 3(EB), Port 5(EA): M5 x 0.8 XT34-60 (With lock) 192 177 149.3 MOD.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

(Values at the initial period) VG JIS Symbol VP S070 VQ Model Valve model VKF VS3145 VS3135 P A C [dm3(sb Cv b Cv b Cv b Cv Flow characteristics 6.1 7.3 9.0 0.3 0.2 0.2 1.6 1.8 2.4 0.4 0.2 0.3 1.5 1.8 2.3 1/4 3/8 1/2 3/4 6.1 7.2 9.0 0.27 0.21 4.8 5.1 16 15 0.34 0.46 4.1 4.5 18 20 VZ VS AC DC 30 or less

PFxx-OMU0002

Do not use a cable longer than 30 m. Wire the DC(-) line (blue) as close as possible to the power supply.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

IDX-OM-P026E

Checks and Inspection Hose Circulating pump Water quantity 20 to 30 L/min Pressure 0.1 to 0.3MPa 0. 10. 3 2030 L/m i n Fig. 2 ( ) Tank (drum can, etc.) b) Operation procedure when a cooling tower is used 1. If a cooling tower is used, supply the cleaning liquid and circulate it for a certain amount of time. 2.

Pressure Sensor

M5 R06 R07 N01 Port size M5 x 0.8 male thread 6 reducer type 1/4 inch reducer type Wetted parts material Pressure sensor: Silicon, O-ring: NBR Body: Stainless steel 304 Body: PBT With sensor cable (3 m) 41 g 38 g Mass Without sensor cable 7 g 3.8 g -12No.PS-OME0004-G Analog output Range Rated pressure range A B C For vacuum 0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -101 to 101 kPa -101

Fan Type Ionizer

The angle adjustment range of the bracket is 50 degrees in direction A, and 90 degrees in direction B. 2) Installation without bracket Direction B 90o Direction A 50o M5 If a bracket is not used, install the product using the M4 screw holes (depth: 6 mm) on both sides of the body. Be sure to secure both sides of the body when fixing this product.