Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 6-5-45 for details.

C85

2 t !7 q !4 !1 w e !3 !

CYV

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F QW PB N A E depth EK Q + Stroke G Z + Stroke Stroke adjustment screw (inner cover) LW A A HP H HL HA HA HI TA TA R 4-J Depth JK Thread depth PC (from counter bore surface) 2-P 2-Counter bore dia.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F QW PB N A E depth EK Q + Stroke G Z + Stroke Stroke adjustment screw (inner cover) LW A A HP H HL HA HA HI TA TA R 4-J Depth JK Thread depth PC (from counter bore surface) 2-P 2-Counter bore dia.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Keeper plate Rod end nut 30 d JIS class 2 threads 2-d l 0.2 B D C m T H H B Material: Rolled steel Material: Carbon steel Bore size (mm) Cap bolt Bore size (mm) Rod series Part no.

CRJ

0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range

Compact

Change of lead wire Power voltage Internat drop votrag" t M':: 9f"t:jllg, voltaoe ol load.

Rotary Table/

Load mass m (kg) . Rotation angle . Rotation time t (s) . Load configuration = m x (a2 + b2) / 12 + m x H2 Effective torque 10 Ta Effective torque (3 to 5) Tf Effective torque Ts 0.2 to 1.0s / 90 Effective torque Inertial moment Allowable load Note) I substitutes for t the value for inertial moment.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

M max is the allowable moment. 2 = M/M max MY 2. Static moment CY 3 = Me/Me max Review Me1, Me3. Me max is the allowable moment. 3.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC SS-T R: Right !1 I/O cable length [m]*10 o Cable length [m]*6, *9 LEC Y Nil Without cable H Without cable (Connector only) 1 1.5 *9 The length of the encoder, motor and lock cables are the same. Nil Without cable 2 2 m 5 5 m A 10 m Nil: Left Motorless *10 When Without driver is selected for driver type, only Nil: Without cable can be selected.

2/3 Port Valve

0 is connected to valve element A t by parallel pin !1. Valve element becomes free to incline and it certainly reaches valve seat. Coated Coated q w e r t y u i o !0 !1 !

KR

M5 x 0.8 Width across flats 8 Effective area: 4.0 mm2 Weight: 3.7 g Gasket: M-5G1, M-5GH Weight: 0.01 g Weight: 0.04 g 15-3-28

VZS

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

MNB

P-76 (M)

4/5 Port Air Operated Valve Series SYJA3000

L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 94.4 86.9 61.6 [68.6] M8 x 1 66.1 75.6 0.6 0.6 46.2 48.6 0.6 105.2 0.6 0.6 0.6 74.5 [76.7] 64.7 [66.9] 84.5 83.6 107 [111.4] 73.6 87.4 [91.8] 103.4 [107.8] 66.2 123 [127.4] 125.2 90.4 127 106.4 Max. 10 141.2 121.2 143 72.7 [79.7] Approx. 300 (Lead wire length) Pg7 Approx. 300 (Lead wire length) Applicable code O.D

LG1H

of gravity (mm) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 L2 (mm) 400 Mer Rolling Yawing m 200 L2 Mer 0 10 20 30 Transfer load m (kg) m 4000 a = 1000 L3 (mm) L3 a = 3000 a = 2000 2000 m Mey a 0 10 20 30 Transfer load m (kg) Refer to page 183 for deflection data. 148 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

HRX-OM-W038

[DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-3 6.4.1 Optional Accessories [Electric resistivity/conductivity sensor set] . 6-3 6.5 Optional Accessories [Drain

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10.5 M3 x 0.5 10 M5 x 0.8 11.5 M4 x 0.7 16 M6 x 1.0 13.5 M5 x 0.8 20 M8 x 1.25 16.5 M6 x 1.0 25 M10 x 1.25 22.5 M8 x 1.25 28 M14 x 1.5 Clevis pin part numbers d m m l Dd9 t L t Applicable bore size (mm) Applicable snap ring Part no.