MXU

For details, refer to page 8-30-31. 8-3-11

Model Selection 1

VNA Single unit Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 7, 11, 15, 14, 20, 16, 25, 22, 32, 28, 40, 33, 50 Low vacuum to 1 Pilot pressure: 0.1 to 0.7 Single unit 1/8 to 2 (2B) 17-4-13 VNB N.C./N.O./C.O.

MXU

For details, refer to page 8-30-31. 8-3-11

High Vacuum L Type Valve

Note) For XLFV-16/25, mount the washer in the orientation that the groove of the washer faces to the valve seal 2.

Series CE1

50 75 100 125 150 175 200 300 500 250 400 25 to 150 12 100V AC P P P P P P P P P P P P 25 to 300 20 24V DC P P P P P P P P P P 25 to 400 32 P P P P P P P P P 25 to 600 40 P P P P P P P P P 25 to 600 50 P P P 25 to 600 63 P P P 4.4-2 Stroke Reading Cylinder Series CE1 Applications Parts inspection Confirmation of press-fit Measures part dimensions, differentiates between good and defective

VDW Series

-1/8 (OUT port) 11 P = 22 11 1.5 4.5 6 32 6 54 ( 19.5) 11 9.5 11 9.5 4-M4 x 0.7 10 24 10 46 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes.

IDX-OM-O004E

Specification for Option M 11 . 1 Safety instructions . 11 1 11 . 2 Specifications . 11 1 11 . 3 Installation of motor type auto drain . 11 2 11 . 4 Electric wiring diagram . 11 2 Chapter 12 Specification for Option R 12 . 1 Safety instructions . 12 1 12 . 2 Specifications . 12 1 12 . 3 Power supply connection procedure . 12 1 12 . 4 Cautions for handling the GFCI . 12 2 12 . 5 Electric

IDX-OM-O004C

1) 2830Nm 30 (5) (22)(27) () () () 2) 10.4 10 2 11.M M 11 11.1 ( ) 11.2 ADM200 IDF15E1-10-M IDF15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W 11 1 11.M 11.3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 11.4 IDF15E1-10-M IDF15E1-20-M PC L N PE TB ILS ILS OLR PTC OLR PTC CM CM C02 C01 C11 FM C11 PRS FM PRS P MOV P MOV CM PTC PTC

IDX-OM-W089

Specification for OptionK 11 1 Safety instructions . 11 1 11 2 Specification . 11 1 Chapter 12 Specification for Option_L 12 1 Safety instructions . 12 1 12 2 Specification . 12 1 12 3 Installation . 12 2 12 4 Maintenance . 12 2 Chapter 13 Specification for Option_R 13 1 Safety instructions . 13 1 13 2 Specifications of the GFCI . 13 2 13 3 How to connect the power supply . 13 2

Fluoropolymer Tubing Variations

/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.

Clamp Cylinder

rod 24 Auto switch mounting bracket 25 Magnetic field resistant auto switch 26 Hexagon socket head cap screw M4x0.7x14L 27 Hexagon socket head cap screw M4x0.7x8L 28 Hexagon socket head cap screw M3x0.5x14L 29 Switch mounting spacer 30 Cushion ring 25 Fig. 11 Construction of the built-in strong magnet clamp cylinder No.

VXA21/22

6 170 Construction/Components 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 0.61 4.5 11 1 4 250 Normally closed (N.C.) (8A) 6 1.05 19 8 1.7 31 1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

VFS4000-OMY0001

VVFS2000-30A-3 5m 206138-11 * VVFS2000-30A-4 7m 66101-224 AMB * VVFS2000-30A-5 10m VCTF24 0.75mm 2 * VVFS2000-30A-6 15m * VVFS2000-30A-7 20m * 10 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100

EX510-GDN1.eng

When input unit is not used Power supply for DeviceNet can be operated by 11 to 25 VDC.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20 M5 x 0.8 depth 6 0 0.03 30 2 18 65 27 10 13 11.4 13.5 19

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

.:::11.:; ;,i=-, ,,.r:,,. ,:: 1::':::,4':::rr.i,;.::'i.ri:;.: 'i.t.i.il:i:i=*1+at=r=i1t:i:i:t:, =!i i:r-i=,, ti ' ' ' ,*r:,:,.r.,:::aa:.:;l.;:i.i.i.tii-,:,'.ar'''ll.'1:1,:,::,1*tlLr:f:fl:a::.:::a::l:a:..:r.:,,::,i,.i,i..,. -r.rLi'g+;,:,=.:11:i:::':itf::1.:i,;=:.:,1 ;,t .,.', , . i:,:*:,'*':,1=]:t*r:1:f?:t:a:l*!a,-,'a*r1]la::1::':..:::.:::.1 . . =r. r::!1::1+ti i:a"a:r:r ia '.

Information

LECSB Positioning unit QD75D (Manufactured by Mitsubishi Electric) 24 VDC Note 2) Note 4) CN1 Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 17 PULSE R+ S/S NG 36 4 LA 18 PULSE

KS/KX

(mm) Connection thread R Effective area (mm2) Min. port size Weight (g) D1 D2 M L1 L2 A Model Nylon Urethane M5 x 0.8 M6 x 1 KXL04-M5 KXL04-M6 KXL04-01S KXL06-M5 KXL06-M6 KXL06-01S KXL06-02S KXL08-01S KXL08-02S KXL08-03S KXL10-02S KXL10-03S KXL10-04S KXL12-03S KXL12-04S 22.5 23 24 8 11 4 13 10.4 22 16 2.5 3.5 3.5 1 8 M5 x 0.8 M6 x 1 12 16 24 23.5 24 25 25 2.5 3 3.5 5.0 3.5

Sensor Monitor

Current consumption 25 mA or less Protection Polarity protection Accuracy Display accuracy 0.5%F.S. Min. display unit (at ambient temperature 25 oC Constant temperature) Repeatability 0.1%F.S. Min. display unit (at ambient temperature 25 oC Constant temperature) Temperature characteristics 0.5%F.S.

High Vacuum L Type Valve

Specifications Table 1 Valve specifications Table 2 Power/ Current With rated voltage applied Model XLS-16 XLS-25 XLS-16-P*G XLS-25-P*G Flange (valve) size 16 25 16 25 Actuating type Normally closed (N.C.)