PSxx-OMU0008CN

ZSE20CF [P_1] OUT1 50.0 kPa [P_2] OUT2 50.0 kPa [H_1] OUT1 5.0 kPa [H_2] OUT2 5.0 kPa ISE20CH [P_1] OUT1 1.000 MPa [P_2] OUT2 1.000 MPa [H_1] OUT1 0.100 MPa [H_2] OUT2 0.100 MPa 1 -25No.PS-OMU0008CN-D 3 3 3 () <> 3() 3(P_1n_1P_2n_2)(H_1H_2) () 1 () 1 1 1[-](( 63)) -26No.PS-OMU0008CN-D (P1LP1H) 26P1L()P1H()WH1() (n1Ln1H) 35 OUT2 [F 1]OUT1[F 2]OUT2// -27No.PS-OMU0008CN-D <> () () 13

PSxx-OMM0002CN

(A-B)/2 H_1= (A-B)/2 B= OUT2P_1n_1H_1P_2n_2H_2 -33No.PS-OMM0002CN-F [F 9] 30 () <> [F 9] [Eco] [F9] 30 (ON ) ON -34No.PS-OMM0002CN-F [F10] <> [F10] [Pin] [F10] 000 40 -35No.PS-OMM0002CN-F [F98] <> [F98] [ALL] [on] 1 [oFF] [oFF] 2 [F98] 1 37 -36No.PS-OMM0002CN-F 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 7 OUT2 8 OUT2 -N-P 9 OUT2 10 OUT2 11 12 -R-S-T-V 13

JSY1000/3000/5000 Series (Non Plug-in)

Caution 13 No.JSY1000V-OMW0004-A JSY1000/3000/5000 series Specific Product Precautions 5 Be sure to read this before handling.

SYJ300-OMU0003

Assy M8 Ass'y M8IP65() Ass'yV100-49-1NECA4202 IEC60947-5-2 FA M8 SY100-68-A3PIN SYJ300, 10.5mm 10.5mm 0.40.6Nm IP65 30N 300mm 6 600mm 10 1000mm IP65 V100-49-1 15 1500mm 20 2000mm 25 2500mm 30 3000mm 50 5000mm Assy Ass M8 1300mm y <1> 2000mm W1WA1300mm SYJ312-5LOZ-M3 SY100-68-A-20 W2WA2500mm W3WA31000mm <2> 300mm W4WA42000mm SYJ312-5LPZ-M3 W7WA75000mm Assy Ass'y SYJ312-5W1ZE-M3 13

EXxx-OMN0029CN

(PNP NPN) SI PWR LED DC24 V10% (PNP NPN) 13 SI PWR(V)_LED DC24 V+10/-5 PLC -41No.EX-OMN0029CN-D No. SI PWR_LED DC24 V10% SI PWR(V)_LED DC24 V+10/-5 14 PLC -42No.EX-OMN0029CN-D EX600 /PLC H.T.PLC H.T. H.T.PLC H.T. PLC PLC PLC H.T. No. (H.T.) H.T. EDS SI OFF/ SI Switch Hold/Clear (Hold/Clear) 1 TM EDS DeviceNet H.T.

EXxx-OMP0004CN

NPN() MJ CC-Link -8No.EX-OMP0004CN-I 1 (BUS OUT) CC-Link () 1 (M12 5 A code) 2 (BUS IN) CC-Link (IN ) 1 (M12 4 A code) 3 SI 1 (M12 5 B code) 4 (M3 ) 5 6 LED SI 2 7 SI (M330) SI 2 (BUS OUT)(1 ) 128 2LED 16 -9No.EX-OMP0004CN-I SI n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 L 9 10 11 12 13

10

0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 1.5 0.05 to 1 4 0.5 RJ series Soft type M8 x 1.0 6 1 RJ0806L(U) RJ1007H(U) M10 x 1.0 7 3 RJ1007L(U) Basic type RJ1412H(U) M14 x 1.5 12 10 RJ1412L(U) P.886 to RJ2015H(U) Nut M20 x 1.5 15 30 RJ2015L(U) RJ2725H(U) M27 x 1.5 25 70 RJ2725L(U) RJ0805(U) M8 x 1.0 M10 x 1.0 M14 x 1.5 M6 x 0.75 5 6 10 4 5 6 6 7 11 12 15 25 6 7 11 12 15 25 4 7 8 8.5 13

PSE530/200

SET SET To measuring mode 16-3-13 13 Series PSE530/200 Operation 2: Pressure Setting Auto preset Channel selection MPa Measuring mode kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE CH1 CH2 CH3 CH4 SET Adsorption Verification SET High Suction Auto preset mode Vacuum Work 1 Work 2 Work n OUT1 auto preset preparation Prepare the equipment to be set in this mode. Max.

125

0.28 0.6 0.7 VEX342-04 1/2 13 0.20 13 0.24 12 0.29 14 0.20 0.6 0.7 Base This is not a manual override.

Power Valve: Economy Valve Series VEX5

N Port 2 (A),1 (P) Port size A Model E F G H I J L M P R T U B C D K N O Q S Port 3 (R) VEX5510 VEX5511 160 50 25 10 7 25 173 80 60 98 Center 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 Thread depth 9 116.5 , ,1 25 VEX5710 VEX5711 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1,1 1 c Bracket mounting dimensions g Grommet

SMC CORPORATION OF JAPAN

, or FB values) SHMITT TRIGGER 19 Turn an Input On at the High Value and Off at the Low Value (or vice versa) Hour Meter 19 Records the accumulated time a signal has been ON System Outputs 10 Controls External Devices through Relays and Transistors. 1*) No. of bytes used = 19 + 1 x (Characters in Equation) 2*) No. of bytes used = 8 + 4 x (Number of time switches) 3*) No. of bytes used = 13

AL800/900

1 Urethane resin Urethane resin NBR NBR 14-13-4 3 Large Flow Type Lubricator Series AL800/900 Option Dimensions Metal bowl AL800/900 Port size F.R.L.

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

PS1000/PS1100

Dimensions 220 30 25.5 3000 Lead wire length Left end adjustment limit Right end adjustment limit AIRCHECKER PS1000-R06L + 13 10 PRESS. 0.10 to 45 MPa {1 to 4.6 kgf/cm2} MADE IN JAPAN Internal Circuit/Wiring Calibration trimmer Lead wire colors inside ( ) are those prior to conformity to IEC standards.

VCB

state) VN LVC LVA Characteristic Specifications LVH Max. operating pressure (MPa) LVD (1) (1) Max. operating pressure differential (MPa) Flow characteristics Port size Orifice size (mm) Weight (kg) Class Model LVQ Av x 10-6(m2) Cv converted 0.16 2 2.0 3.8 LQ 0.33 3 0.8 7.9 1/8 (6A) 1/4 (8A) 3.0 1/8 : 0.21 1/4 : 0.24 2 VCB2 0.51 4 0.5 12 LVN 0.65 5 0.3 16 0.35 3 2.0 8.4 TI/ TIL 0.54 4 0.8 13

VCS

the initial state) VN LVC LVA LVH Characteristic Specifications LVD Max. operating pressure differential MPa (1) Orifice size (mm) Flow characteristics Weight (kg) Max. system pressure MPa LVQ (1) Class Model Port size Av x 10-6 (m2) Cv converted LQ 0.16 3.8 1.0 2 LVN 0.33 7.9 0.8 3 1/8 (6A) 1/4 (8A) 1.0 1/8: 0.21 1/4: 0.24 2 VCS2 0.51 12 0.5 4 TI/ TIL 0.65 16 0.3 5 0.35 8.4 1.0 3 PA 0.54 13

VVXA21/22

D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K 6.5 8.5 M 54 58 17-3-100 5 The VX series will be revised shortly.

VXA21/22

OUT Note 1) Refer to page 17-3-13 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.

VCA

of the valve Volume : 13% Weight : 25% Compared to previous series (Class 2) Electrical entry directions } Electrical entry is possible from four directions Flame resistance UL94 V-0 standard SMC 1 Special construction reduces operating resistance When shipped from the factory, the electrical entry is on the IN port side.

NVZseies

(Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O. A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].