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30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

HY C M A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 16 D-X Individual -X Technical data Series CJ5-S Dimensions Rod side flange style (F): CJ5FS R V 0 0.3 0 0.3 CA BA BB Rod cover side GB Piping port 2 x M5 x 0.8 GA NN MM Piping port M5 x 0.8 Cover surface 0 0.3 BA CB D FY FB With head cover port in axial location (R) 2 x FC Mounting hole FX FZ NA F FT 0 0.3 BB

MHZ MHF Hysteresis Switch operating position (ON) MHL Switch reset position (OFF) Auto switch Flat head watchmakers screwdriver MHR (mm) Auto switch model Air gripper model D-Y7W D-Y7WV D-Y59, D-Y7P D-Y69, D-Y7PV D-Y7BAL MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Air gripper model D-M9(V) D-M9W(V) D-M9A(V)L D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV , Note) Use a watchmaker s screwdriver with a grip diameter of 5 to 6 mm to tighten the set screws (M2.5). The tightening torque should be 0.05 to 0.1 Nm. As a rule, it should be turned about 90 beyond the point at which tightening can be felt.

D End Plate> SS070A012A Replacement Parts No. 9 No. Description Material Number < D Side End Plate Assembly > 3 D side end plate assembly No.

e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i s a s s e m b l e D i s a s s e m b l i n g p r o c e d u r e A s s e m b l e p r o c e d u r e T r o u bl e s hoo t i n g Safety

D E R (N)ZM V A C U U M E J E C T O R (N)ZM D I M E N S I O N S W I T H VA C U U M S W I T C H D I M E N S I O N S B A S I C T Y P E N O Z Z L E D I A M E T E R 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm T Y P E 2 Body Ported 4 Manifold Type-Common SUP 6 Manifold Type-Individual SUP S U P P LY P R E S S U R E H 5 Bar M 3.5 Bar P O R T T H R E A D Nil PT* Remove (N) when ordering T NPTF S W I T C

Command Response Status Check sum code data Response data details + 0 1 2 3 4 5 Sign Indicated value(Decimal system) Reading preset data Command Block # 0 0 D R [CR] Unit No. Command Preset No. Check sum code Response Block # 0 0 D R [CR] Unit No. Command Preset No.

Operating Range The figure shows the mounting example for the D-M9(V)/ M9W(V)/ M9A(V)/ A9(V) Auto switch model Bore size (mm) 32 40 50 63 80 100 D-M9/ M9V D-M9W/ M9WV D-M9A/ M9AV 4 4.5 4.5 4.5 5 6 D-Y59/ Y69 D-Y7P/ Y7PV D-Y7W/ Y7WV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5/ J59 D-F5W/ J59W D-F5BA/ F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/ K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5

Mass (g) Auto Switch Internal Circuit D-M9N D-M9P D-M9B Auto switch model 0.5 8 8 7 D-M9N 1 14 14 13 Lead wire length (m) DC (+) Brown 3 41 41 38 5 68 68 63 Main circuit of switch OUT Black Dimensions (mm) DC () Blue D-M9l M2.5 x 4 l Slotted set screw D-M9P DC (+) Brown Indicator light 2.6 Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC () Blue VNA D-M9B VNB 3.2 OUT

24.5 37.5 55.5 55.5 30.5 20.5 MXQ20 47.5 37.5 27.5 37.5 43.5 75.5 78.5 81.5 35.5 33.5 65.5 68.5 73.5 37.5 27.5 17.5 27.5 25.5 23 MXQ25 56.5 46.5 36.5 36.5 50.5 64.5 92.5 92.5 50.5 40.5 54.5 82.5 73.5 46.5 36.5 26.5 26.5 40.5 27 Solid State Auto Switch: D-M9BV, D-M9NV, D-M9PV, D-M9BWV, D-M9NWV, D-M9PWV Stroke B Stroke E Model A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150

Ported Type 20 Manifold Grommet: G DIN terminal: D 4-Rc 1/8 1(P), 3(R) port Manual override (Non-locking) Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 2-4.5 (Mounting hole) 67.5 59 19 17 2 R P P R mPm 7 20 34 2.3 Pg.7 4-Rc 1/8 1(P), 3(R) port A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 300 (Lead wire length) n-Rc 1/8, M5 x 0.8 2(A) port 7 20 34 Courtesy of

D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 9 8 9.5 13.5 10 3 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Auto Switch Mounting Bracket Part Nos.

4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000