VCB

E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.

VXF

Insulation type Electrical entry Electrical option Class B G C D, T S Note) S L, Z 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) AC DC Note) Surge voltage suppressor is attached in the middle of a lead wire. 17-3-72 3 The VX series will be revised shortly.

Smooth Cylinder Series CQSY

How to Order Standard B 20 30 D C CQSY B 20 30 D C F9BW S CDQSY With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

Precision Cylinder Series MTS

freezing) Bearing type Ball spline Rubber bumper Cushion Air cushion Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Non-lube Reed switch: D-A9 Solid state switch: D-F9 D-F8 Reed switch: D-A9 Solid state switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

How to Order Valve 10 VQ110 External non-leak specifications 9 Series VQ100 Base Mounted Plug-in Unit The broken line indicates DIN rail mounted type (-D) and side entry connector (S).

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

VXZ

B N.O. 1/2 G 15 With surge voltage suppressor C 110 VAC Stainless steel D 200 VAC 5 20A H C37 N.C. 3/4 20 E 230 VAC C N.O. J Stainless steel F 24 VDC 6 25A N.C. K C37 Stainless steel 1 25 G DIN terminal 24 VDC D N.O.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, 25, 50, 75, 100, 125, 150, 200 Up to 1500 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied.

VXF2

E F G H J K L M N P Q R S T U V W 65A 5 100 VAC Grommet Flange type with surge voltage suppressor 110 VAC A B C D Direct piping type 200 VAC Flange type 230 VAC 80A 6 Flange body I type 24 VDC Flange body II type 24 VDC DIN terminal with surge voltage suppressor 100 VAC 7 8 90A B Flange type 110 VAC 100A 200 VAC 230 VAC 24 VDC Conduit terminal 100 VAC with surge voltage suppressor 110 VAC

IDX-OM-X011

Allowable power supply fluctuation: 3 phase 200 VAC +/-10% (50Hz); 3 phase 200 VAC to 220V +/-10% (60Hz) 3 phase with different voltage (IDF190 / 240D-9-): AC220V, 240V, 380V, 400V, 415V, 440V+/-10% Power supply cable specification Prepare the power supply cables below. Power supply cable: 10AWG (5.5mm2 or greater), cable O.D.

EX260-SEC-A_eng

Designation Description 2 Fieldbus interface connector (BUS IN) EtherCAT connection (M12 4-pole socket, D-coded) 4 5 2 *1: Blinking pattern SV24 V +24 V for solenoid valve 1 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 5-pole plug, A-coded) 3 2 SV0 V 0 V for solenoid valve 200 ms 200 ms 1 SI24 V +24 V for SI unit operation 3 4 Ground

PFxx-OMX0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) -95No.PF-OMX0002-B Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 -96No.PF-OMX0002-B Lead wire with M12 connector (ZS-37-A) Pin

Fieldbus system PROFIBUS DP compatible SI unit

End plate: Connected at EX600 Manifolds D side, incorporating the power supply connection. Solenoid valve manifold: An assembly of solenoid valves.

AS-FPQ/AS-FPG

Printed in Japan. 1st printing November, 2000 D-SMC.L.A. P-80 (D)

VT325

DIN terminal With surge voltage suppressor VP 200 VAC, 50/60 Hz Port size 110 VAC, 50/60 Hz 02 1 4 4 AC: Can be attached to Grommet, Conduit, Conduit terminal.

SI Unit for Vacuum Manifold

Fieldbus interface connector BUS OUT/Port2: M12 4 pin socket D-coded (Port type: MDI-X) No. Designation Content 1 RD+ Receive Data + 2 TD+ Transmit Data + 3 RDReceive Data 4 TDTransmit Data BUS IN/Port1: M12 4 pin socket D-coded (Port type: MDI) No. Designation Content 1 TD+ Transmit Data + 2 RD+ Receive Data + 3 TDTransmit Data 4 RDReceive Data Fig. 2-1.

Large blow and

Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185 4 1 M4 x 0.7 8 400 200 250 119.5 55 32 15 19.5 23.5 111 48 56 48 4.5 56.5 29 21.6 Rc1/4 44 ZH30 40--X185 Without bracket Air pressure supply (P) port Thread size: Q 45 45

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

CHKD/CHKG

Auto Switches: Proper Mounting Positions and Mounting Heights for Stroke End Detection 32 to 100 20, 25 B B D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 D-Y5 D-Y7 D-Y7W D-Y7BA D-Z7 D-Z80 A B MA B MA A D-M9V D-M9WV D-M9AV D-Y6 D-Y7V D-Y7WV D-A9V D-M9V D-M9WV D-M9AV D-A9V A A Auto Switch Proper Mounting Positions (mm) Solid state auto switch Reed auto switch D-Y59/Y69 D-Y7/Y7V D-Y7W/Y7WV D-Y7BA

KJ

L1 L2 M D I.D.