Air-hydro Unit

800 400 30 Capacity of converter (cm3) 300 CC CC 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 100 100 80 CRA1H63-90 CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 160 100 63 40 20 100 200 300 400 500 600 700 800 Nominal size of converter (mm) Cylinder stroke (mm) How to read the graph (ex: when using

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Motor output [W]/Size [mm] 100/40 200/60 Motor type AC servo motor (100/200 VAC) Electric specifications Encoder Motor type S2, S3: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7: Absolute 18-bit encoder (Resolution: 262144 p/rev) Power consumption [W] Note 7) Horizontal 65 80 Vertical 165 235 Standby power consumption when operating [W] Note 8) Horizontal 2 2 Vertical

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Guide Table Series MGF

Bore size Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches Lead wire length (m) Load voltage Auto switch model no.

JXCx-OMX0009

Move the actuator from the origin to a point 100 mm away at 100 mm/s. (Step Data No.1 is used for this operation). From the 100 mm point, the actuator must start a pushing operation of 10 mm/s speed and 50% or less force. (the pushing distance is up to 5 mm).

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

0.05 Slide screw 200 2 Guide rod type Series LXP 200 3 0.05 Slide screw 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 Slide table type Series LXS 200 4.5 Slide screw 0.05 100 6 Without motor brake 100 9 30 10 Ball screw 0.03

MTS

(N) 32 12 0.3 0.5 Deflection (mm) Deflection (mm) MTS32-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st 0.2 MTS12-100 st 75 st 0.1 50 st 25 st 0 50 100 0 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st Deflection (mm) Deflection (mm) 0.2 0.2 MTS16-100 st 75 st 50 st 25 st 0.1 0.1 0 50 100 150 0 10 Lateral load (N) Lateral

CEx-OMP0016

Load factor 50 100 mm Operating pressure 0.5MPa The length of Brake releasing pressure 0.3MPa 50 No load overrun Mounting position Horizontal 0.5 1.0 Piston speed just before stop ms 11-2 Dispersion of stopping position When cylinder is stopped intermediately, the stopping position is not fixed.

Direct Operated Precision Regulator Modular Style Series ARP3000 1

(MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR

Heavy Duty Stopper Cylinder ø 50, ø 63, ø 80 RS2H Series

E2E-X2D1-N Model Normally open Output type 12 to 24 VDC (10 to 30 VDC) Ripple 10% or less (P-P) Power supply voltage (Operating voltage range) Current consumption (Leakage current) 0.8 mA or less Response frequency 1.5 kHz Control output (Chest) 3 to 100 mA Operation indication (Red LED), Set operation indication (Green LED) Indicator LED RSQ Ambient temperature 25 to 70C (No freezing) Operating

ZK2-C

H_3 P.25F 2OUT2 P_1-60kPaH_3 45 P_1H_3-60-45-105 P_1H_3 -105 H_3 P_1 H_3 ,P_1 H_3 100 -43NO.ZK2-OM00801-B , (1015 ) -44NO.ZK2-OM00801-B ZK2-ZSV-A () No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 No.6 -45NO.ZK2-OM00801-B No.7 Yes No No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 A No.15 -46NO.ZK2-OM00801-B No.

IDX-OM-P026E

) 100 (375) 1795 6 2 6.

EXxx-OMN0027CN

5 Shield T PROFIBUS DP BUS OUT SI IP67 PROFIBUS DP A [kbps] 9.6 19.2 45.45 93.75 187.5 500 1,500 3,000 6,000 12,000 [m] 1,200 1,000 400 200 100 -17No.EX-OMN0027CN-D (1) (2) (3) (4) (0.30.4Nm) OFF OFF 0, -18No.EX-OMN0027CN-D PROFIBUS DP (X10)PROFIBUS DP (X1)PROFIBUS DP (8)PROFIBUS DP Settings1 Address 8 X10 X1 0 0 0() 0 1 1 0 2 2 OFF 9 8 98 9 9 99 0 0 100 0 1 101 ON 2 5 125

Fieldbus system CC-Link compatible SI unit

P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc. P tight screw (4 x 14), 2 pcs. (3)Intermediate support bracket EX600-ZMB1for direct mounting Enclosed parts: Round head screw (M4 x 5), 2 pcs.

Exhaust Cleaner for Clean Rooms AMP Series

Exhaust Cleaner for Clean Rooms AMPSeries Exhaust Air Cleanliness Equivalent to Class 100 Piping Labor Reduced Increased Space Savings Worry Free Two Stage Element Construction Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult P/A in advance, as this will differ depending on the operating

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Rated voltage CE-compliant For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type CE-compliant For AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (Lead wire length 300 mm) M: With lead wire (Lead wire

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Note 4) When ordering the body only, select the symbol from to respectively. 2020 PVQ Specifications VEF VEP Rated pressure range Display/Set pressure range Withstand pressure Display/Minimum setting unit Applicable fluid Power supply voltage Current consumption Switch output 0 to 1 MPa 0.1 to 1 MPa 1.5 MPa 0.01 MPa (Air, Non-corrosive gas, Non-flammable gas) 12 to 24 VDC 10%, Ripple (p-p

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Note 4) When ordering the body only, select the symbol from to respectively. 2020 ITVX Specifications PVQ Rated pressure range Display/Set pressure range Withstand pressure Display/Minimum setting unit Applicable fluid Power supply voltage Current consumption Switch output 0 to 1 MPa 0.1 to 1 MPa 1.5 MPa 0.01 MPa (Air, Non-corrosive gas, Non-flammable gas) 12 to 24 VDC 10%, Ripple (p-p)