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D-Z73 D-Y59B D-Y59A Load voltage 24 VDC,100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less Load current range Indicator light Application Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC 5 to 40 mA, 5 to 20 mA 5 to 40 mA 40 mA or less PLC: Programmable Logic Controller Refer to page 889 for the applicable auto switch list.

[J27L PNP open collector SOmA ZSE5B-O-67L ISE5B-[]-26L None (Analog output) 1 ~5V(5%F.S.) 2 output NPN open collector 30V,80mA ISE5B-D-27L Standard Specifications PNP open collector SOmA ISE5B-D-67L ZSE5B ~I ZSE5B Item ZSE5B ISE5B ISE5B .jISE5B With unit change function for use all over the world.

t o o g e a n L c 2 s u s d Particulate generation has been reduced at the stroke ends by reducing impact using a sine cushion and by stopping the stroke using an internal stopper. i e Reduction of outgassing due to surface treatment n Impact acceleration [m/s2] o u d t R g g e a c 1 s u s d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable type Nil Robotic cable (Flexible cable) S Standard cable Cable color Connector D terminal no.

* C D H* Description None Mounting Bracket Float Auto Drain (N.C.)

(N.O. type/N.C. type can be changed.) 3 Do not connect wiring. 1 14 25 13 D-sub 25-pin female (socket) type 8 HRL Series Dual Channel Refrigerated Thermo-chiller for Lasers Communication Functions Serial Communication The following operations can be performed by the serial communication RS-232C/RS-485.

Auto Switch Proper Mounting Position (Detection at Stroke End) Solid state auto switch D-M9 Reed auto switch D-A93 C B A Lead wire, in-line entry Values in the table below are used as a reference when mounting the auto switches for stroke end detection. For actually setting the auto switches, adjust them after confirming their operation.

* C D H* Description None Mounting Bracket Float Auto Drain (N.C.)

nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge V V V V V G Round type pressure gauge (without limit indicator) V Round type pressure gauge (with limit indicator) V V V V M Round type pressure gauge (with color zone) V V V V + b Pressure gauge Note 4) c Set pressure Note 5) Nil 0.05 to 0.7 MPa setting V V V V V 1 0.02 to 0.2 MPa setting V V V V V + d

Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

(D-M9 only) Operation Environment Recommended Tool Description Model Wire stripper D-M9N-SWY * Stripper for a round cable (2.0) can be used for a 2-wire type cable. Warning (1) Never use in an atmosphere with explosive gases. Auto switches are not designed with explosion-proof construction. Never use in an atmosphere containing explosive gas since this may cause a serious explosion.

MH*-OMM0056 MHS2-D MHS3-D MHS4-D MHSJ3-D MHSH(J)3-D 1. 23 2. 2-1. 45 3. 3-1. 6 3-2. 67 3-3. 713 3-4. 13 3-5. 14 3-6. 14 3-7. 14 4. 4-1. 14 4-2. 1518 4-3. 1922 4-4. 2326 1 [ ][][] ISO4414*1)JISB8370*2) 1) ISO4414Pneumatic fluid power-Recommendations for the application of equipment to transmission and control systems. 2) JIS B8370 2 1. 2. 3. 4. 3 2 2-1 MHS2 MHS2 -16D MHS2 -20D MHS2 -25D

CN2TB/PC () 19 - .CN4 6.1 1 EMG+ EMG 2 EMGEMG 3 24V 5 4 3 2 () 4 0V 5 FG FG (LEC)(0V) ULUL1310Class2 6.2 2) AWG20(0.5mm (24V0V) 60 2) EMG AWG20(0.5mm (EMG+,EMG-) 60 8mm 20 - D(100) D 6.3 (CN2SW)ON(EMG+,EMG-) (LEC)EMG (CN2SW) RY CN4 CN2 EMG+ EMG24V 0V (CN2SW)ON EMG+,EMG-(LEC) OFF (LEC)(EMG+,EMG-) 21 - (LEC) ( LEC6) DC24V 0V Ry EMG+ Ry EMG(1) BK RLS EMG Ry C 24V 24V

e) 47 - D 100 154 1. 2. 3. 4. 5. 6. 7. 8. -10603585% 48 - 155 5 156 49 - 16/ 161 / UL1310Class2 162 ON 50 - 5 () 51 - 163 50mm 164 () 52 - 165 166 D 100 167 53 - Revision history No.JXC-OMT0030CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior

P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No. D Line No.

D-Z73 D-Y59B D-Y59A Load voltage 24 VDC,100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less Load current range Indicator light Application Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC 5 to 40mA, 5 to 20mA 5 to 40mA 40mA or less Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control