2 Phase Stepper Motor/Without Motor Brake Series LXS

(A contact) F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL Slide screw Lead screw type N.O. (A contact) N.C. (B contact) S N.C. (B contact) Lead screw lead N.C. (B contact) A B 6mm 12mm N.C. (B contact) N.O. (A contact) N.O. (A contact) Stroke N.O.

CJ2

D-F7BAVL Auto switch model D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-A7 D-A80 D-A79W Bore size (mm) A 2.5 3 B 2.5 3 A 1.5 2 B 1.5 2 A 3 3.5 B 3 3.5 A 3.5 4 B 3.5 4 A 0.5 1 B 0.5 1 10 16 Auto Switch Mounting Height D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F D-C7/C80 D-H7/H7W D-H7NF D-H7BAL Auto switch model D-F7V D-F7WV D-F7BAVL D-C73C D-C80C D-H7C D-A7 D-A80 D-A73C D-A80C

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

LJ1H

B C D A Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

Table of Contents

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

ZP

C B G Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

Swivels

B C D Dia.

JIS Standard Hydraulic Cylinder

Keeper plate Rod end nut 30 d 2 x d L1 0.2 B D C m T H H B Material: Carbon steel Material: Rolled steel Rod series Bore size (mm) Bore size (mm) Cap bolt L1 d H T B m Part no.

ZP

C D J K Y A J K B Y C D Misc.

CJ2

D-C7 D-C8 D-C73C D-C80C D-H7 D-H7C D-H7W D-H7BAL D-H7F D-A7/A8 D-A79W Bore B A B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side Station No. 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-3/8, 1/2 (ports A, B ) B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC Cable length A B B B B B Manual override B 2 A 4 A B 4 A B 2 A 4 L2 L1 58.5 P=41 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P=41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 Electrical entry on D side (LD) 17 107.8 D side 22 179 (single, double, 3

ZP

D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 Series ZPT/ZPR Replacement Parts

REA/REB

B A REC A dimension B dimension Auto switch model CX D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/FWV D-F7BA D-F79F CY D-F7NTL D-A73/A80 D-F7NTL D-A73/A80 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

REA/REB

Auto switch model Bore size (mm) D-A9 A dimension D-M9 B dimension C dimension D dimension D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7

&snac

f o r a i r t u b e s i z e a n d i e n g t n s h o u l d b e 5 m a n d b e l o w ' F o r o u r s i n g a i r t u b e 5 r n a n o a D o v e ' p l e a s e d o n o t i n s t a t l v a l v e i f t u b e i s b e n d o r c o n s t f u c t e d ' l f t h e d e h u n r i d i f t l i n s p e r f 0 r m a n c e w i t t l o w e r . o f m e m b r a n e a i r d r Y e r T a b l e c 0 n d i t 4 i o n color

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL 0.5 0.5 0.5 0.5 0.5 3 3 3 3 3 Slide screw S Lead screw type N.C. (B contact) N.C. (B contact) Lead screw lead N.C. (B contact) N.C. (B contact) 6mm 12mm A B N.O. (A contact) N.O. (A contact) Stroke N.O. (A contact) 50mm 75mm 100mm 125mm 150mm 170mm 200mm 50 75 100 125 150 170 200 N.O.

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

Air Cylinder

D-X Technical Data 357 CG1 Series Auto Switch Proper Mounting Position (Detection at Stroke End) With End Lock (CBG1) (mm) Auto switch model D-G5lW D-K59W D-G59F D-G5 D-K5 D-G5NT D-G5BA D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-H7l D-H7C D-H7lW D-H7BA D-H7NF D-C7 D-C8 D-C73C D-C80C D-A9l D-A9lV D-B5 D-B6 D-B59W Lock position A B A B A B A B A B A B A B Bore size Head end 33 36 29 32 28.5

Battery-less

4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

Rotary Actuator/Vane Type

CRA1 P P h L1 b CRQ2 b (h9) h (h9) L1 A port B port A port B port 4 0 0.030 4 0 0.030 20 MSQ A A MSZ F F A parallel key is used instead of single flat for size 40. E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.