SMC Corporation of America
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Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

Combination Catalog CAT.E5G-C for types of attachments.)

01 M5 x 0.8 Rc 1/8 (A port) For the port size 01 only.

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

D A B Side support B MY-SB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 NLP-32A RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 NLP-40A RCS-12 GMY40 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR C-7 SO-015-22 SO-015-16 8.3 X 4.5 X 1.9 SO-010-16 SO-010-16 C-100 NLP-25-19A RCS-8 GMY25 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 %9 Hard anodized Hard anodized Hard anodized M1L025-17A82076

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 $1 MK(2) RS Q G Clear anodized Clear anodized 20, 32 only 20, 32 only RS H A RZQ MI W S Nickel plated Nickel plated CEP1 Type C snap ring for shaft Type C snap ring for shaft CE1 Type C snap ring for shaft Return spring CE2 Hexagon socket head set screw Hexagon socket head set screw 20 only Nickel plated 20 only ML2B Hexagon

T 2 x P (Rc, NPT, G) Q B S W U K L E R I AA AL AP X A AB J V Y + Stroke Z + Stroke 8 x AF AC AD AE (mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) A AA AB AC AD AE AF AL AP B C D E F G H I J K L M N 90 11 11 7.5 75 30 6 25 108 15 60 92 5.5 30 55 60 80 25 45 M5 x 0.8 depth 10 M8 x 1.25 depth 14 75, 100, 125, 150, 200 9.5 depth 6 100 14 13 7.5 85 30 6 30 130 17.5 65 113 6.6 35 65 70 100

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 $1 MK(2) RS Q G Clear anodized Clear anodized 20, 32 only 20, 32 only RS H A RZQ MI W S Nickel plated Nickel plated CEP1 Type C snap ring for shaft Type C snap ring for shaft CE1 Type C snap ring for shaft Return spring CE2 Hexagon socket head set screw Hexagon socket head set screw 20 only Nickel plated 20 only ML2B Hexagon

Positive pressure ISE1 ZSE1 Vacuum Wiring specifications Piping specifications Grommet type (Lead wire: 0.6 m) 00 Nil For mounting on ZM ejector Single mounting R 1/8 Note 2) 01 Grommet type (Lead wire: 3 m) L Single mounting NPTF 1/8 Note 2) T1 Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Note 2) Single mounting style: M5 x 0.8 (female) threaded.

Model Av x 106 m2 C [dm3/(sbar)] N.C. 0.96 Cv 0.40 b 0.14 Cv converted 0.04 1 0.04 VDW10 M5 1.6 0.07 0.07 1.7 0.25 0.30 1.6 0.09 0.08 1.9 0.45 0.31 M5 1/8 (6A) VDW20 2.3 0.18 0.18 4.3 0.45 0.58 3.2 0.33 0.30 7.2 0.38 1.2 2 0.16 0.16 3.8 0.52 0.52 1/8 (6A) 1/4 (8A) VDW30 3 0.30 0.28 6.7 0.52 1.0 4 0.46 0.44 11 0.49 1.5 244

16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -78No.PS-OMU0002CN-D A B -79No.PS-OMU0002CN-D 0.57 + 0.57 -80No.PS-OMU0002CN-D 2 (n ) <> <> 31n +3.5n -1 31n +3.5n -1 -81No.PS-OMU0002CN-D Revision history A [2018 7 ] B [2020 2 ] C [2021 2 ] D [2022 2 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5,298 5,362

PF3W711/721 (Vinyl chloride piping) -81No.PF-OMM0005-N Flow characteristics of the flow rate adjustment valve PF3W704S PF3W720S PF3W740S -82No.PF-OMM0005-N Analogue output Analogue output (Flow) (PF3W704/720/740) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 6 mA 20 mA (PF3W711) A B C Voltage output 1 V 1.4 V 5 V Current output 4 mA 5.6 mA 20 mA (PF3W721-12/14) A B C Voltage output

Voltage leakage Particularly when using a C-R element (surge voltage suppressor) for protection of the switching element, use cation that leakage voltage will increase due to leakage current flowing through the C-R element, etc. Caution 1.