Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

12 V 12 V IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 IC circuit 100 V Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches can be mounted

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Meap Nm 4.2 Find the load factor 2 of the dynamic moment. 420 V mm/s Examine Mey.

C95

: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m [kg] 32 Load weight: m [kg] 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ 1.11-31 Series C95 Refer to P.5.3-17, 27, 37

Table of Contents

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

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Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

12 V Relay, PLC Grommet Yes 24 V 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) 2-wire 12 V Yes No Yes No 100 V Reed auto switch Relay, PLC IC circuit 100 V or less Grommet 24 V 2-wire 12 V 100 V, 200 V 200 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

ML1C

Moment (Nm) Moment (Nm) Moment (Nm) Load mass (kg) M1 = F1 x L1 Piston speed V (mm/s) ML1C/M2, M3 M2 = F2 x L2 M3 = F3 x L3 Piston speed V (mm/s) (How to calculate the load ratio) A. Consider (1) max. load mass, (2) static moment, (3) dynamic moment (when stopper collides) when calculating the max. allowable moment and load mass.

IIIIIIIIII

/min. (28 LPM) RECOMMENDED FILTRATION 5 micron Model Number Description V-800-10-W/K 0-10" Hg Vacuum regulator with adjusting knob V-800-10-W/S 0-10" Hg Vacuum regulator with 1/4" adjusting shaft V-800-10-W/OS 0-10" Hg Vacuum regulator with slotted adjusting shaft V-800-30-W/K 0-30" Hg Vacuum regulator with adjusting knob V-800-30-W/S 0-30" Hg Vacuum regulator with 1/4" adjusting shaft V-

Ionizer Nozzle type IZN10 Series IZS

Metal ( shaded) part Metal ( shaded) part Tap for ground wiring Resin part ( shaded) 454 Ionizer IZN10 Series Power Supply Cable Connection Circuit NPN PNP Ionizer Ionizer IZS Brown +24 VDC Brown +24 VDC +24 V +24 V Power supply 24 VDC 10% 0 V +24 V Power supply 24 VDC 10% 0 V +24 V Blue 0 V Blue 0 V IZN IZN INPUT PLC OUTPUT OUTPUT PLC INPUT IZF Orange Discharge stop signal Orange Discharge

CY1F

/s Piston speed mm/s Piston speed mm/s 4 Series CY1F Vertical Actuation qVertical operation In vertical operation, observe the maximum load mass and the maximum operating pressure shown in the table below to prevent a drop due to slipping off of magnet couplings.

IDG

Type V regulator (AR) is modified to produce the micro mist separator regulator (AWD).

Shock Absorbers and Rate Controls

I Non-Adjustable Hydraulic Series @g,t0 Glevis Mounting Metric PMl2OCM(S) -r PM225CM(S) PRO 110Ct\,4(S) --+PRO225CM(S) OS M Pl\,41525C1\4(S) * Plt/2150C|V(S) Lock Ring l/lodel wr (kgl (l|!loa No.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piston speed V (mm/s) M2 = F2 x L2 ML1C/M2, M3 Moment (Nm) M3 = F3 x L3 Piston speed V (mm/s) (How to calculate the load ratio) A.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Moment (Nm) Moment (Nm) Load weight (kg) M1 = F1 x L1 Piston speed V (mm/s) M2 = F2 x L2 ML1C/M2, M3 Moment (Nm) M3 = F3 x L3 Piston speed V (mm/s) (How to calculate the load ratio) A. Consider (1) max. load weight, (2) static moment, (3) dynamic moment (when stopper collides) when calculating the max. allowable moment and load weight.

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

VQ4000

OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) JEMANET (JPCN-1) Mitsubishi Electric Corp.: CC-LINK System Rockwell Automation: Allen Bradley Remote I/O (RIO) System NKE Corp.: Uni-wire H System 1 to 16 stations Kit L Kit L BB C D F1 J1 J2 K Q R1 R2 U V G H 3 to18 stations SD S Simple specials are available with SMC Simple Special System.

Round Type Hydraulic Cylinder

Solid state auto switch Connector IC circuit 3-wire (NPN) 2-wire 5 V, 12 V 12 V Terminal conduit Relay PLC Yes 24 V 3-wire (NPN) Diagnostic indication (2-color indicator) IC circuit 5 V, 12 V 12 V 3-wire (PNP) 2-wire Grommet 3-wire (NPN) IC circuit Water resistant (2-color indicator) 5 V, 12 V M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 12 V 5 V, 12 V 5 V H7NF A96 A93 A90 B54 B64 C73C

Low Profile Guide Type

12 V CY1H 12 V Solid state auto switch Reed auto switch Yes IC circuit CY1F CY1F 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Grommet 24 V 12 V CYP IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V IC circuit 3-wire (NPN equivalent) A96V A96 5 V 12 V Yes 24 V Grommet Relay, PLC A93V2 A93 A90 100 V 2-wire A90V IC circuit No

33

Corrosion Scale HRW generation pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v HECR 5. This product series are constant-temperature fluid circulating machines with built-in tanks.