Mechanically Jointed Rodless Cylinder Series MY1

Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

tolerance Port size Vacuum port, relief port Ambient and fluid temperature JIS class 2 +1.0 0 mm 0.035MPa 0.025MPa M5 x 0.8 M5 x 0.8 Without auto switch: 10 to 70C With auto switch: 10 to 60C Piston speed Piston rod diameter 1 to 200mm/s 0.5 to 200mm/s Bore size (mm) 11(Vacuum type) 16 M8 x 1.25 M14 x 1.5 JIS class 2 Standard stroke: mm M5 x 0.8 12 16 20 25 Female threads Male threads Fluid

AMR3000 to 6000

IS1000-01 Model 0.1 to 0.4 MPa Set pressure range (OFF) 0.08 MPa Differential 1a Contact point construction 2 VA AC, 2 W DC Max. contact point capacity 12 V 48 V 100 V 24 V Voltage (AC, DC) 50 mA 40 mA 20 mA 50 mA Max. current 1.2 ms Operating time 30 G Shock resistance JIS Symbol AMR5100 AMR4000 AMR3000 14-7-1 2 Series AMR3000 to 6000 How to Order E3 03 R S AMR 4 0 00 Adapter Assembly (Part

D. P. Lube ALD600/900 Series

P.

CJ2Q

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

Floating Joint/Stainless Steel Type Series JS

How to Order J S 32 10-125 Stainless steel type Dust cover material Symbol Nil S Material Fluoro rubber Silicon rubber Applicable cylinder bore size (mm) Nominal thread size Applicable cylinder bore size (mm) 10 10, 16 20 25, 32 40 50, 63 Symbol Applicable cylinder thread nominal size M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 Symbol 10 16 20 32 40 63 4-070 5-080 8-125 10-

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

AS-FPQ/AS-FPG

P-80 (D)

MHx-OMZ0004

M6x23 : : M3X7 D-M9P-5 JMHZ2-16D M-5ALHU-2 2 KQ2S04-M5N 3 V114-5LU ASN2-M5-X937 3x6 ISO9409-1 M4x25 6x10 M6x10 M8 8 () M6x10 ISO9409-1 6x10 5 - 3-1. JMHZ2-16D-X7400B-ASSISTA(-P) mm 16 MPa 0.1~0.7 (oC) -10~50 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 (g) 680 D-M9(N/P)-5 ISO9409-1-31.5-4-M5 (www.smcworld.com)JMHZ2 Series P .15 M12 8 6 - 3-2. 2 1 F 7 - 3-3.

Precision Cylinder Series MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

Pressure Gauge Guide

Symbol Specifications Grade Symbol Unit: MPa Nil M With M5 (Female thread) 0.2 0.4 0.7 1.0 2 4 7 10 Symbol Component parts polishing, Assembly environment Note) Use M5 female thread when panel-mounting for piping.

VZA2000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics Pilot port size Pilot port piping location b Cv b C [dm3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Function Port size Valve model VHS VZA2121-M5 VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141

VP4

Regarding VP435 (3 position closed center type) Be aware that when the cylinder is in an intermediate stop state, if the supply pressure to the P port is discharged or decreased, this valve is constructed so that the pressure in the cylinder will be discharged to the P port, causing the cylinder to move. 7.

Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Connector Type: S (M12 connector type)

PFxx-OMO0004CN

) ZS-33-JS () ZS-33-M () (3.02 ) ZS-33-MS () (3.03 ) ZS-33-R DIN 1 2 3 4 5 DIN F02(G/14)DIN -12No.PF-OMO0004CN-E (OUT) (IN) 1 2 2 INOUT DIN 1 2: LCD LED (UP) (SET) SET (DOWN) UP DOWN 3 ON/OFF (UP) 3 ON/OFF (DOWN) LED (OUT1)/ (SET) OUT1OUT2 OUT1ON OUT2ON 3 -13No.PF-OMO0004CN-E F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF ()

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

AMP

P-80 (YG)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.3.4-14. Auto Switch Mounting Bracket Part No.

PFxx-OMO0007CN

PF2A7--29--X560 PF2A7--69--X560 (15 V) (420 mA) 12 V 300 24 V 600 1 k 5F.S. 1 s A B 1 V 5 V 4 mA 20 mA 1 NL/min 10 NL/min PF2A710 3.5 CFM10 -2 35.0 CFM10 -2 5 NL/min 50 NL/min PF2A750 18 CFM10 -2 176 CFM10 -2 10 NL/min 100 NL/min PF2A711 3.5 CFM10 -1 35.5 CFM10 -1 20 NL/min 200 NL/min PF2A721 7 CFM10 -1 71 CFM10 -1 50 NL/min 500 NL/min PF2A751 18 CFM10 -1 176 CFM10 -1 0.927= -41No.PF-OMO0007CN

or more / 5 mA or more(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied voltage of 0 V)5 V or less / 1 mA or less(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied