E,R.L.

Exr 27N-4O (40pm), 2NB '||oL: O.der ol assembly (Erample) OO' NAF + NAFI + iIAL Port Atlachment modl Air entry Port sire Applicable 0 6 % N P T t o I N P T Description Location s MF +NAq +a +M! NAF +6+ NAR NAC50?

HRX-OM-R005

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Air Cylinder MGQ Series Compact Guide Cylinder

When used in stopper application mounting hole, diameter should be 2d or more = E b o I il Cro.z Compact Guide Cylinder:Series MGQ Permissible lateral load (Ordinary-use load) F + 12 t6 ' i 4 : : : 49 25 51 F t 108 A6 104 176 3 3 206 686 343 80. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51

Air Cylinder NCM Series Stainless Steel Cylinders

S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

PSxx-OMH0002CN

8370: JIS B 8361: JIS B 9960-1: -() JIS B 8433-1993: 2) : : : 1 2 3 1 2 3 4 -2No.PS-OMH0002CN-D / / / / 1 1.5 3) 3) 1 1 () -3No.PS-OMH0002CN-D () () () () -4No.PS-OMH0002CN-D () * (ISE70 ) SUS630SUS430SUS304 (ISE75(H)) ON/OFF (ISE70 ) (10 10 ) UL1310 UL1585 UL -5No.PS-OMH0002CN-D * (50 N ) , ,ISE70 40 NmISE75(H)80 Nm 1.52 FG *() 6 33 2 () ( etc.) 10 m10 m DC(-)() -

PSxx-OME0003CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

3

Specifications Model PFMC7501 PFMC7102 PFMC7202 Fluid Applicable fluid Dry air, N2 (Air quality grade is JIS B 8392-1 1.1.2 to 1.6.2, ISO 8573-1 1.1.2 to 1.6.2.)

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

1

How to Calculate the Set Value A = Max. pressure value in auto preset mode B = Tentative min. pressure value in auto preset mode P1 = A (A B)/4 P2 = B + (A B)/4 Manual adjustment is possible after finishing in the auto preset mode.

P

Buffer connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 3 A14 2 10 to 16 3 20 to 32 B8 4 40, 50 4 ZP U6 B8 Y [qY type adaptor] B 3 ZP K20 [wBuffer] 3.8-63

The multi-pin connectors replace the

(from 2 to 3 and from 4 to 5) C(Sonic conductance) and b(critical pressure ratio) are subject to ISO 6358/JIS B 8390. Cv (Flow coefficient) is subject to ANSI/CNFPA) T3.21.3.

Title not found

When used in stopper application mounting hole, diameter should be 2d or more = E b o I il Cro.z Compact Guide Cylinder:Series MGQ Permissible lateral load (Ordinary-use load) F + 12 t6 ' i 4 : : : 49 25 51 F t 108 A6 104 176 3 3 206 686 343 80. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51

PF2x7.eng

U P DOWN Press and SET : Accumulation starts and flashes.

Electro-Pneumatic Proportional Valve Series VEF/VEP

Characteristics JIS B 8372 (In accordance with air regulator) SRF 1(P) 2(A) 3(R) VCHR (Inlet pressure) (Outlet pressure) Set point ITV IC ITVX PVQ Inlet pressure (MPa) VEF VEP VEF VEP 3(R) 2(A) Flow rate (L/min (ANR)) 1(P) 2(A) Inlet pressure: 0.3 MPa VER Set point VEA VY1 VBA VBAT Inlet pressure (MPa) AP100 Set point 3(R) 2(A) Flow rate (L/min (ANR)) 1(P) 2(A) Inlet pressure (MPa) 889

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 2 3 Male 4 P.19 Connector LQ2H 5 2 3 Female 4 P. 20 5 2 3 Male 4 P. 21 Elbow LQ2L 5 2 3 Female 4 P. 22 5 2 3 Male 4 P. 23 Run tee LQ2R 5 2 3 Female 4 P. 24 5 2 3 Male 4 P. 25 Branch tee LQ2B 5 2 3 Female 4 P. 26 5 2 3 Union elbow LQ2E 4 P. 27 5 2 3 Union tee LQ2T 4 P.

Air-hydro Unit

Step (3) Select required function for valve unit Select a model from data (B), by determining the functions that are needed for the valve unit in accordance with your application.

XL-OMY0001

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0001 /H0 H4 H5 510% O 0.1mm0.2mm 6 P13 3 3 P7P8 5 P11 7 P14 P18 6 XL-OMY0001 33 5 P11 16 25 40 50 XLA16-30-1-2 XLA25

Guide Table Series MGF

+ Stroke Dimensions (mm) A B GB Bore size 40 63 100 58 48.5 36.5 GB 73 61.5 38 78 66.5 38 Dimensions not listed above are the same as the standard model.

PSxx-OMR0005CN

RoHS PPA100MPa LCD"Err" 6 LCD"CAL" "POWER3 "POWER6 "POWER ON OFF ON 6 3 OFF 5 OFF () POWER "POWER 3 3LCD MPa bar MPa (PPA100) (PPA101) (PPA102) MPabar PSI kgf kPabar PSI inHg mmHg kPabar PSI kgf "POWER"+"LIGHT "LIGHT "POWER 3 )inHg )OFF"P"b LCD "P LCD "b POWER POWER POWER ON5 OFF () ( ) 6LCD "L" POWER"+"LIGHT 6 "LIGHT "POWER 6 6LCD "CAL LDC"-" LCD"Err" 0, 0, LCD LCD52 30 30"